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Chamber cleaning apparatus and method

  • US 5,107,873 A
  • Filed: 08/08/1989
  • Issued: 04/28/1992
  • Est. Priority Date: 08/08/1989
  • Status: Expired due to Fees
First Claim
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1. Apparatus for cleaning a chamber with a fluid from a fluid source;

  • the chamber including a side wall, a first end wall having an inlet opening, and a second end wall having an outlet opening;

    the inlet and outlet openings generally defining a longitudinal axis extending through the interior of the chamber;

    the apparatus comprising;

    conduit means for conducting fluid from the fluid source into the chamber;

    nozzle means, connectable to the conduit means, for creating a selectable one of an axial fluid spray to clean the interior surfaces of the first and second end walls and a transverse fluid spray to clean the interior surfaces of the side wall;

    rotational drive means for rotating the nozzle means about a rotational axis generally parallel or coaxial with the longitudinal axis;

    axial drive means for moving the nozzle means toward and away from the first end wall a preselected distance in response to rotation of the nozzle means; and

    support means for supporting the nozzle means and for allowing motion of the nozzle means.

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