Chamber cleaning apparatus and method
First Claim
1. Apparatus for cleaning a chamber with a fluid from a fluid source;
- the chamber including a side wall, a first end wall having an inlet opening, and a second end wall having an outlet opening;
the inlet and outlet openings generally defining a longitudinal axis extending through the interior of the chamber;
the apparatus comprising;
conduit means for conducting fluid from the fluid source into the chamber;
nozzle means, connectable to the conduit means, for creating a selectable one of an axial fluid spray to clean the interior surfaces of the first and second end walls and a transverse fluid spray to clean the interior surfaces of the side wall;
rotational drive means for rotating the nozzle means about a rotational axis generally parallel or coaxial with the longitudinal axis;
axial drive means for moving the nozzle means toward and away from the first end wall a preselected distance in response to rotation of the nozzle means; and
support means for supporting the nozzle means and for allowing motion of the nozzle means.
4 Assignments
0 Petitions
Accused Products
Abstract
A chamber cleaning apparatus and method includes a conduit for conducting fluid into the chamber; a nozzle assembly, connected to the conduit, for creating one of an axial fluid spray to clean the interior surfaces of the first and second end walls of the chamber and a transverse fluid spray to clean the interior surfaces of the side walls of the chamber; a rotational drive assembly for rotating the nozzle means about a rotational axis generally parallel or coaxial with the longitudinal axis of the chamber; an axial drive assembly for moving the nozzle means a preselected distance toward or away from the first end wall of the chamber for each rotation of the nozzle assembly; a transverse drive assembly for moving the nozzle assembly a preselected transverse distance toward or away from the rotational axis for each rotation of the nozzle assembly. A swivel is provided having an outer sleeve body and an inner sleeve body with the inner sleeve body coaxially and rotatably positionable in the outer sleeve body. Two outer passageways extend through the outer sleeve body and two inner passageways extend through the inner sleeve body. Two circumferential channels are provided in the inside surface of the outer sleeve body. One outer passageway and one inner passageway is in continuous fluid communication with each circumferencial channel. A four-point beam support for supporting the cleaning apparatus is also provided.
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Citations
37 Claims
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1. Apparatus for cleaning a chamber with a fluid from a fluid source;
- the chamber including a side wall, a first end wall having an inlet opening, and a second end wall having an outlet opening;
the inlet and outlet openings generally defining a longitudinal axis extending through the interior of the chamber;
the apparatus comprising;conduit means for conducting fluid from the fluid source into the chamber; nozzle means, connectable to the conduit means, for creating a selectable one of an axial fluid spray to clean the interior surfaces of the first and second end walls and a transverse fluid spray to clean the interior surfaces of the side wall; rotational drive means for rotating the nozzle means about a rotational axis generally parallel or coaxial with the longitudinal axis; axial drive means for moving the nozzle means toward and away from the first end wall a preselected distance in response to rotation of the nozzle means; and support means for supporting the nozzle means and for allowing motion of the nozzle means. - View Dependent Claims (2)
- the chamber including a side wall, a first end wall having an inlet opening, and a second end wall having an outlet opening;
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3. Apparatus for cleaning a chamber with a fluid from a fluid source;
- the chamber including a side wall, a first end wall having an inlet opening, and a second end wall having an outlet opening;
the inlet and outlet openings generally defining a longitudinal axis extending through the interior of the chamber;
the apparatus comprising;conduit means for conducting fluid from the fluid source into the chamber; nozzle means, connectable to the conduit means, for creating a selectable one of an axial fluid spray to clean the interior surfaces of the first and second end walls and a transverse fluid spray to clean the interior surfaces of the side wall; rotational drive means for rotating the nozzle means about a rotational axis generally parallel or coaxial with the longitudinal axis, the rotational drive means comprising; rotational enabling means for enabling the rotational drive means to rotate the nozzle means; rotational preselecting means for preselecting the number of rotations of the nozzle means to be made after enablement of the rotational drive means; rotational counting means for counting the number of rotations of the nozzle means; and rotational disabling means for disabling rotation of the nozzle means when the preselected number of rotations are completed; axial drive means for moving the nozzle means toward and away from the first end wall, the axial drive means moving the nozzle means a preselected distance for each rotation of the nozzle means, the axial drive means comprising; axial enabling means for enabling the axial drive means to move the nozzle means when the rotational disabling means disables rotation of the nozzle means; axial preselecting means for preselecting the distance the nozzle means may be moved by the axial drive means after enablement of the axial drive means; axial measuring means for measuring the distance the nozzle means is moved by the axial drive means; and axial disabling means for disabling movement of the nozzle means by the axial drive means when the nozzle means has been moved the preselected distance by the axial drive means; and support means for supporting the nozzle means and for allowing motion of the nozzle means. - View Dependent Claims (4)
- the chamber including a side wall, a first end wall having an inlet opening, and a second end wall having an outlet opening;
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5. Apparatus for cleaning a chamber with a fluid from a fluid source;
- the chamber including a side wall, a first end wall having an inlet opening, and a second end wall having an outlet opening;
the inlet and outlet openings generally defining a longitudinal axis extending through the interior of the chamber;
the apparatus comprising;conduit means for conducting fluid from the fluid source into the chamber; nozzle means, connectable to the conduit means, for creating a selectable one of an axial fluid spray to clean the interior surfaces of the first and second end walls and a transverse fluid spray to clean the interior surfaces of the side wall; rotational drive means for rotating the nozzle means about a rotational axis generally parallel or coaxial with the longitudinal axis; axial drive means for moving the nozzle means toward and away from the first end wall, the axial drive means moving the nozzle means a preselected distance for each rotation of the nozzle means; transverse drive means for moving the nozzle means transversely toward or away from the rotational axis, the transverse drive means moving the nozzle means a pre-selected distance for each rotation of the nozzle means; and support means for supporting the nozzle means and for allowing motion of the nozzle means; and wherein the rotational drive means is further defined as providing a rotational signal indicating each rotation of the nozzle means; and wherein the transverse drive means is further defined as responding to the rotational signal for transversely moving the nozzle means; and in which the apparatus comprises; signal conducting means, connected between the rotational drive means and the transverse drive means, for conducting the rotational signal from the rotational drive means to the transverse drive means. - View Dependent Claims (6, 7, 8, 9)
- the chamber including a side wall, a first end wall having an inlet opening, and a second end wall having an outlet opening;
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10. Apparatus for cleaning a chamber with a fluid from a fluid source;
- the chamber including a side wall, a first end wall having an inlet opening, and a second end wall having an outlet opening;
the inlet and outlet openings generally defining a longitudinal axis extending through the interior of the chamber;
the apparatus comprising;conduit means for conducting fluid from the fluid source into the chamber; nozzle means, connectable to the conduit means, for creating a selectable one of an axial fluid spray to clean the interior surfaces of the first and second end walls and a transverse fluid spray to clean the interior surfaces of the side wall; rotational drive means for rotating the nozzle means about a rotational axis generally parallel or coaxial with the longitudinal axis; axial drive means for moving the nozzle means toward and away from the first end wall, the axial drive means moving the nozzle means a preselected distance for each rotation of the nozzle means; and support means for supporting the nozzle means and for allowing motion of the nozzle means; and wherein the chamber has an inlet having an inlet wall surrounding the inlet opening and extending generally axially from the first end wall, the inlet wall being spaced from the side wall; in which the support means comprises; a beam, positionable generally parallel or coaxially with the longitudinal axis of the chamber, the beam having a first end extending away from the chamber and a second end adjacent the inlet opening; and a beam support, positionable in the inlet, comprising; vertical support means for extending generally linearly across the inlet to a first contact and a second contact with the inlet wall and for elevating and supporting the beam in a position generally parallel with the longitudinal axis of the chamber; first strut means for extending from the vertical support means to a third contact with the inlet wall and for stabilizing the beam support, the third contact being located between the first and second contacts; and second strut means for extending from the vertical support means to a fourth contact with the inlet wall and for stabilizing the beam support, the fourth contact being located between the second and third contacts. - View Dependent Claims (11, 12, 13, 14)
- the chamber including a side wall, a first end wall having an inlet opening, and a second end wall having an outlet opening;
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15. Apparatus for cleaning a chamber with a fluid from a fluid source;
- the chamber including a side wall, a first end wall having an inlet opening, and a second end wall having an outlet opening;
the inlet and outlet openings generally defining a longitudinal axis extending through the interior of the chamber;
the apparatus comprising;conduit means for conducting fluid from the fluid source into the chamber; nozzle means, connectable to the conduit means, for creating a selectable one of an axial fluid spray to clean the interior surfaces of the first and second end walls and a transverse fluid spray to clean the interior surfaces of the side wall; rotational drive means for rotating the nozzle means about a rotational axis generally parallel or coaxial with the longitudinal axis; axial drive means for moving the nozzle means toward and away from the first end wall, the axial drive means moving the nozzle means a preselected distance for each rotation of the nozzle means; and support means for supporting the nozzle means and for allowing motion of the nozzle means; and wherein the rotational drive means rotates the conduit means about the rotational axis of the nozzle means in order to rotate the nozzle means; and in which the nozzle means comprises; a nozzle assembly, comprising; a transverse support arm extending transversely to the longitudinal axis of the chamber, the support arm having a first end connected to the conduit means and a second end extending transversely toward the side wall; a manifold assembly connected to the second end of the support arm, the manifold assembly having a longitudinal axis extending generally parallel to the longitudinal axis of the chamber, the manifold assembly having a first end extending in one axial direction from the support arm and a second end extending in the other axial direction from the support arm; and at least one nozzle, connected to the manifold assembly, for spraying fluid transversely away from the longitudinal axis of the chamber; at least one nozzle, connected to the manifold assembly, for spraying fluid transversely toward the longitudinal axis of the chamber; at least one nozzle, connected to the manifold assembly, for spraying fluid in one axial direction; at least one nozzle, connected to the manifold assembly, for spraying fluid in the other axial direction; and conducting means for conducting fluid from the conduit means to the manifold assembly. - View Dependent Claims (16, 17, 18)
- the chamber including a side wall, a first end wall having an inlet opening, and a second end wall having an outlet opening;
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19. Apparatus for cleaning a chamber with a fluid from a fluid source;
- the chamber including a side wall, a first end wall having an inlet opening, and a second end wall having an outlet opening;
the inlet and outlet openings generally defining a longitudinal axis extending through the chamber;
the apparatus comprising;conduit means for conducting fluid from the fluid source into the chamber; nozzle means, connectable to the conduit means, for creating a selectable one of an axial fluid spray to clean the interior surfaces of the first and second end walls and a transverse fluid spray to clean the interior surfaces of the side wall; rotational drive means for rotating the nozzle means about a rotational axis generally parallel or coaxial with the longitudinal axis, the rotational drive means comprising; rotational enabling means for enabling the rotational drive means to rotate the nozzle means; rotational preselecting means for preselecting the number of rotations of the nozzle means to be made after enablement of the rotational drive means; rotational counting means for counting the number of rotations of the nozzle means; and rotational disabling means for disabling rotation of the nozzle means when the preselected number of rotations are completed; axial drive means for moving the nozzle means toward and away from the first end wall, the axial drive means moving the nozzle means a preselected distance for each rotation of the nozzle means, the axial drive means comprising; axial enabling means for enabling the axial drive means to move the nozzle means when the rotational disabling means disables rotation of the nozzle means; axial preselecting means for preselecting the distance the nozzle means may be moved by the axial drive means after embodiment of the axial drive means; axial measuring means for measuring the distance the nozzle means is moved by the axial drive means; and axial disabling means for disabling movement of the nozzle means by the axial drive means when the nozzle means has been moved the preselected distance by the axial drive means; transverse drive means for moving the nozzle means transversely towards or away from the rotational axis, the transverse drive means moving the nozzle means a preselected distance for each rotation of the nozzle means, the transverse drive means comprising; transverse enabling means for enabling the transverse drive means to move the nozzle means when the rotational disabling means disables rotation of the nozzle means; transverse preselecting means for preselecting the distance the nozzle means may be moved by the transverse drive means after enablement of the transverse drive means; transverse measuring means for measuring the distance the nozzle means is moved by the transverse drive means; and transverse disabling means for disabling movement of the nozzle means by the transverse drive means when the nozzle means has been moved the preselected distance by the transverse drive means; and support means for supporting the nozzle means and for allowing motion of the nozzle means. - View Dependent Claims (20, 21, 22, 23)
- the chamber including a side wall, a first end wall having an inlet opening, and a second end wall having an outlet opening;
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24. Apparatus for cleaning a chamber with a fluid from a fluid source;
- the chamber including a side wall, a first end wall having an inlet opening, and a second end wall having an outlet opening;
the inlet and outlet openings generally defining a longitudinal axis extending through the chamber;
the apparatus comprising;conduit means for conducting fluid from the fluid source into the chamber; nozzle means, connectable to the conduit means, for creating a selectable one of an axial fluid spray to clean the interior surfaces of the first and second end walls and a transverse fluid spray to clean the interior surfaces of the side wall; rotational drive means for rotating the nozzle means about a rotational axis generally parallel to the longitudinal axis;
the rotational drive means comprising;rotational enabling means for enabling the rotational drive means to rotate the nozzle means; rotational preselecting means for preselecting the number of rotations of the nozzle means to be made after enablement of the rotational drive means; rotational counting means for counting the number of rotations of the nozzle means; and rotational disabling means for disabling rotation of the nozzle means when the preselected number of rotations are completed; axial drive means for moving the nozzle means axially between a first axial position near the first end wall and a second axial position near the second end wall, the axial drive means moving the nozzle means a preselected distance for each rotation of the nozzle means, the axial drive means comprising; axial enabling means for enabling the axial drive means to move the nozzle means after the rotational disabling means disables rotation of the nozzle means; axial preselecting means for preselecting the distance the nozzle means may be moved by the axial drive means after embodiment of the axial drive means; axial measuring means for measuring the distance the nozzle means is moved by the axial drive means; axial disabling means for disabling movement of the nozzle means by the axial drive means after the nozzle means has been moved the preselected axial distance by the axial drive means; and axially reversing means for automatically reversing the axial motion of the nozzle means when the nozzle means reaches the first axial position and when the nozzle means reaches the second axial position; transverse drive means for moving the nozzle means transversely towards a first transverse position near the rotational axis and a second transverse position near the rotational axis and a second transverse position near the chamber side wall, the transverse drive means moving the nozzle means a preselected distance for each rotation of the nozzle means, the transverse drive means comprising; transverse enabling means for enabling the transverse drive means to move the nozzle means after the rotational disabling means disables rotation of the nozzle means; transverse preselecting means for preselecting the distance the nozzle means may be moved by the transverse drive means after enablement of the transverse drive means; transverse measuring means for measuring the distance the nozzle means is moved by the transverse drive means; transverse disabling means for disabling movement of the nozzle means by the transverse drive means after the nozzle means has been moved the preselected distance by the transverse drive means; and transverse reversing means for reversing the transverse motion of the nozzle means when the nozzle means reaches the first transverse position and when the nozzle means reaches the second transverse position; switch means for preselecting one of the axial drive means and the transverse drive means to move the nozzle means when the rotational drive means is disabled; reenabling means for reenabling the disabled rotational drive means to rotate the nozzle means after the one of the axial drive means and the transverse drive means preselected by the switch means has moved the nozzle means the preselected distance and is disabled; and support means for supporting the nozzle means and for allowing motion of the nozzle means.
- the chamber including a side wall, a first end wall having an inlet opening, and a second end wall having an outlet opening;
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25. Apparatus for cleaning a chamber with a fluid from a fluid source;
- the chamber including a side wall, a first end wall having an inlet opening, and a second end wall having an outlet opening;
the inlet and outlet openings generally defining a longitudinal axis extending through the chamber;
the apparatus comprising;conduit means for conducting fluid from the fluid source into the chamber; nozzle means, connectable to the conduit means, for creating a selectable one of an axial fluid spray to clean the interior surfaces of the first and second end walls and a transverse fluid spray to clean the interior surfaces of the side wall; rotational drive means for rotating the nozzle means about a rotational axis generally parallel to the longitudinal axis and for providing a rotational signal indicating each rotation of the nozzle means; transverse drive means for responding to the rotational signal and moving the nozzle means transversely toward or away from the rotational axis; support means for supporting the nozzle means and for allowing motion of the nozzle means; signal conducting means, connected between the rotational drive means and the transverse drive means, for conducting the rotational signal from the rotational drive means to the transverse drive means; a first swivel, comprising; an outer sleeve body, including an outside surface;
an inside surface;
at least one outer passageway extending through the outer sleeve body from the outside surface to the inside surface, the outer passageway having a first end at the outside surface and a second end at the inside surface; andan inner sleeve body, generally coaxially and rotatably positionable in the outer sleeve body, the inner sleeve body including an outside surface;
an inside surface;
at least one inner passageway extending through the inner sleeve body, the inner passageway having a first end fluidly comminicable with the second end of the outside passageway and a second end;an elongate hollow member having a first end connectable to the inner sleeve body generally coaxially with the inner sleeve body and a second end connectable to the nozzle means; and wherein the rotational drive means rotates the conduit means about the rotational axis of the nozzle means; and wherein the conduit means passes generally concentrically through the inner sleeve body and the elongate hollow member and is connected to the inner sleeve body of the first swivel so that the inner sleeve body and the elongate hollow member are rotated with the conduit means; and wherein the transverse drive means is located adjacent the nozzle means; and in which the signal conducting means further comprises; a first segment fluid communicatingly connectable from the rotational drive means to the first end of the outer passageway of the outer sleeve body; and a second segment fluid communicatingly connectable from the second end of the inner passageway of the inner sleeve body through the hollow elongate member to the transverse drive means so that the second segment rotates with the inner sleeve. - View Dependent Claims (26, 27)
- the chamber including a side wall, a first end wall having an inlet opening, and a second end wall having an outlet opening;
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28. Apparatus for cleaning a chamber with a fluid from a fluid source;
- the chamber including a side wall;
a first end wall having an inlet opening;
a second end wall having an outlet opening;
the inlet and outlet openings generally defining a longitudinal axis extending through the chamber; and
an inlet having an inlet wall surrounding the inlet opening and extending axially from the first end wall;
the apparatus comprising;conduit means for conducting fluid from the fluid into the chamber; nozzle means, connectable to the conduit means, for creating a selectable one of an axial fluid spray to clean the interior surfaces of the first and second end walls and a transverse fluid spray to clean the interior surfaces of the side wall; rotational drive means for rotating the nozzle means about a rotational axis generally parallel to the longitudinal axis; axial drive means for moving the nozzle means toward and away from the first end wall; and support means for supporting the nozzle means and for allowing motion of the nozzle means, the support means comprising; a beam, positionable generally parallel or coaxial with the longitudinal axis of the chamber, the beam having a first end extending away from the chamber and a second end adjacent the inlet opening; and a beam support, positionable in the inlet, comprising; vertical support means, for extending generally linearly across the inlet to a first contact and a second contact with the inlet wall and for elevating and supporting the beam in a position generally parallel with the longitudinal axis of the chamber; first strut means for extending from the vertical support means to a third contact with the inlet wall and for stabilizing the beam support, the third contact being located between the first and second contact; and second strut means for extending from the vertical support means to a fourth contact with the inlet wall and for stabilizing the beam support, the fourth contact being located between the second and third contacts. - View Dependent Claims (29, 30, 31, 32)
- the chamber including a side wall;
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33. Apparatus for cleaning a chamber with a fluid from a fluid source;
- the chamber including a side wall, a first end wall having an inlet opening, and a second end wall having an outlet opening;
the inlet and outlet openings generally defining a longitudinal axis extending through the chamber;
the apparatus comprising;conduit means for conducting fluid from the fluid source into the chamber; a nozzle assembly, comprising; a transverse support arm extending transversely to the longitudinal axis of the chamber, the support arm having a first end connectable to the conduit means and a second end extending transversely toward the side wall; a manifold assembly connected to the second end of the support arm, the manifold assembly having a longitudinal axis extending generally parallel to the longitudinal axis of the chamber, the manifold assembly having a first end extending in one axial direction from the support arm and a second end extending in the other axial direction from the support arm; at least one nozzle, connected to the manifold assembly, for spraying fluid transversely away from the longitudinal axis of the chamber; at least one nozzle, connected to the manifold assembly, for spraying fluid transversely toward the longitudinal axis of the chamber; at least one nozzle, connected to the manifold assembly, for spraying fluid in one axial direction; at least one nozzle, connected to the manifold assembly, for spraying fluid in the other axial direction; and conducting means for conducting fluid from the conduit means to the manifold assembly; rotational drive means for rotating the nozzle assembly about a rotational axis generally parallel to the longitudinal axis of the chamber; axial drive means for moving the nozzle means toward and away from the first end wall; and support means for supporting the nozzle means and for allowing motion of the nozzle means. - View Dependent Claims (34, 35, 36, 37)
- the chamber including a side wall, a first end wall having an inlet opening, and a second end wall having an outlet opening;
Specification