Transport system for inline vacuum processing

• US 5,110,249 A
• Filed: 08/14/1989
• Issued: 05/05/1992
• Est. Priority Date: 10/23/1986
• Status: Expired due to Fees

• Current Assignee: Innotech Group Incorporated
• Original Assignee: Innotech Group Incorporated
• Inventors: Norman, Arthur E.
• Primary Examiner(s): Werner, Frank E.
• Application Number:
  US07/393,673
• Time in Patent Office: 995 Days
• Field of Search: 414/217, 414/331, 414/222, 414/749, 414/750, 414/911, 414/684, 204/298.23, 204/298.25, 204/298.26, 204/298.27, 118/50, 118/50.1, 118/719, 118/729, 118/730, 118/500, 118/503, 104/135
• US Class Current: 414/217
• CPC Class Codes: C23C 14/568 Transferring the substrates through a series of coating stations C23C14/562 takes precedence
• CPC Class Codes: H01L 21/67173 in-line arrangement
• CPC Class Codes: H01L 21/67778 involving loading and unloading of wafers

Abstract

An inline processing system for processing a batch of pallets, including a first magazine for supporting a predetermined number of unprocessed pallets. A load chamber for receiving and supporting the first magazine and for indexing the magazine to present individual ones of the unprocessed pallets to a transport position. One or more process chambers located inline with the load chamber and with each process chamber including a pair of valves at opposite ends of each process chamber to control the passage of individual ones of the pallets between each process chamber and the adjacent chamber. A second magazine for supporting the predetermined number of pallets after processing. An unload chamber for receiving and supporting the second magazine and for indexing the magazine to receive individual ones of the processed pallets from a transport position. A plurality of carriers equal in number to the number of chambers less one for location within the chambers for receiving individual ones of the pallets from the first magazine and for supporting the individual ones of the pallets for transport between the chambers to the second magazine. A drive and support structure located within each chamber for coupling to the carrier to support the carrier to drive the carrier from each chamber to an adjacent chamber.

Claims

1. An inline processing system for a plurality of pallets each supporting a plurality of substrates for, including,

a magazine for supporting the pallets in stacked relationship for processing,

a load chamber disposed in adjacent relationship to the magazine for receiving and supporting the magazine and including indexing means coupled to the magazine structure for indexing the magazine to provide for the transfer of successive ones of the pallets in the stacked relationship from the magazine to the load chamber,

a process chamber located inline with the load chamber and in adjacent relationship to the load chamber on the opposite side of the load chamber from the magazine and including a passageway between the load chamber and the process chamber to provide for the passage of individual ones of the pallets between the load chamber and the process chamber,

valve means coupled to the passageway for opening and closing the passageway to provide for the passage of individual ones of the pallets between the load chamber and the process chamber when the passageway is open and for sealing the load chamber from the process chamber to prevent passage of pallets between the load chamber and the process chamber and to provide for independence in the atmospheres in the load and process chambers when the passageway is closed to facilitate the processing of the substrates in the process chamber,

carrier means movable between the load and process chambers for receiving the individual ones of the pallets indexed from the magazine and for supporting the individual ones of the pallets for transport from the load chamber to the process chamber to a position for processing of the substrates in the process chamber,

first drive and support means located within the load chamber for coupling to the carrier means to support the carrier means and for driving the carrier means from the load chamber to the process chamber to transfer each pallet from the load chamber to the process chamber for processing of the substrates on such pallet in the process chamber and for returning the carrier means from the process chamber to the load chamber after the transfer of such pallet from the load chamber to the process chamber, and

second drive and support means located within the process chamber for coupling to the carrier means to support the carrier means and for driving the carrier means to the process chamber from the load chamber to transfer each pallet from the load chamber to the process chamber for processing of the substrate on such pallet in the process chamber and for returning the carrier means from the process chamber to the load chamber after the transfer of such pallet from the load chamber to the process chamber, and

means for receiving the pallets after the substrates in the pallets have been processed in the process chamber.

2. The inline processing system of claim 1 wherein the magazine structure includes magazine arms for supporting individual ones of the pallets.

3. The inline processing system of claim 2 wherein each individual pallet includes a hub having stepped portions and with the magazine arms having end portions to engage the stepped portions of the hub and with each pallet supported by magazine arms located on each side of the pallet.

4. The inline processing system of claim 2 wherein

the magazine arms are movable between first and second positions to move the pallets between the first and second positions and wherein the carrier means are disposed to receive the individual ones of the pallets when the magazine arms are in the second position and the load chamber includes actuator means coupled to the magazine for providing a controlled movement of the magazine arms between the first and second positions.

5. The inline processing system of claim 1 wherein the carrier means includes carrier arms for supporting individual ones of the pallets and magazine arms and carrier arms are provided which are parallel to each other and wherein individual ones of the pallets are transferred from the magazine arms to the carrier arms when the magazine arms are in the second position and wherein the pallets are received from the carrier arms for retransfer to the magazine when the magazine arms are in the second position and wherein the magazine arms are disposed on opposite sides of the pallet and wherein each individual pallet includes a hub having first stepped portions located on opposite sides of the pallet to receive the magazine arms on the opposite sides of the pallet and having second stepped portions located on opposite sides of the pallet to receive the carrier arms on the opposite sides of the pallet.

6. The inline processing system of claim 1 wherein the indexing means includes a ballscrew actuator to index the magazine to positions providing for the transfer of successive ones of the pallets in the stacked relationship from the magazine to the load chamber and the load chamber includes a door having open and closed positions to provide for the loading of the pallets into the magazine and the unloading of the pallets from the magazine and the door includes an enlarged portion extending outwardly from the load chamber to form a space with the door in the closed position to receive at least a portion of the magazine as the magazine is indexed to present individual ones of the pallets to the position for transfer to the load chamber, the enlarged portion of the door forms a space large enough to receive both the magazine and individual ones of the pallets as the pallets are indexed from the magazine.

7. The inline processing system of claim 1 wherein the process chamber includes spindle means for engaging individual ones of the pallets transferred into the process chamber to provide a rotation of the individual ones of the pallets and the process chamber is provided with front and back portions and the spindle means is formed by separate front and back mechanisms mounted respectively on the front and back portions of the process chamber and wherein both mechanisms are movable toward the individual ones of the pallets in the process chamber to capture such individual pallets between the mechanisms for rotation and wherein each individual pallet includes a hub having a configuration to receive the front and back mechanisms of the spindle means to capture such pallet for rotation.

8. The inline processing system of claim 1 wherein the carrier means includes carrier arms for supporting individual ones of the pallets and wherein the individual ones of the pallets are transferred from the magazine to the carrier arms for transport of the pallets by the carrier means to the process chamber for processing of the substrates on the pallet and wherein each individual pallet includes a hub having stepped portions for receiving the carrier arms of the carrier means.

9. The inline processing system of claim 1 wherein the carrier means includes a rack member and each of the first and second drive and support means includes a pinion engageable to the rack to drive the carrier means between the chambers and wherein the pinions are mounted to float relative to the rack member for providing for a slidable movement between the rack and pinions and an independent drive of the carrier means by at least one of the pinions.

10. The inline processing system of claim 1 wherein the support means and carrier means include complementary bearing surfaces for guiding the movement of the carrier means between the load and process chambers.

11. The inline processing system of claim 1 wherein each individual one of the pallets includes a plurality of openings to receive the substrates on the pallets for processing and wherein each opening includes a groove having a width slightly larger than the thickness of the substrate and the substrates are seated within the grooves to hold the substrates for processing and wherein the substrates and the openings in the pallets are annular and the grooves extend around the annular openings in the pallets to receive the substrates.

12. The inline processing system of claim 1 wherein the load chamber is used for unloading pallets from the magazine and for loading pallets into the magazine for processing the pallets disposed in the magazine.

13. The inline processing system of claim 1 wherein the process chamber constitutes a first process chamber and wherein additional process chambers are disposed inline with the first process chamber and adjacent to the first process chamber and to one another and wherein each additional process chamber includes a passageway between itself and the adjacent process chamber and includes valve means coupled to the passageway to provide for the passage of individual ones of the pallets and provide for independence in the atmospheres in the chambers and wherein each additional process chamber, except for the last process chamber in the sequence, includes carrier means and wherein each process chamber includes drive and support means for coupling to the associated carrier means for transporting individual pallets to the adjacent chamber and wherein an individual one of the carrier means is provided to transport individual ones of the pallets between the associated chamber and the adjacent chamber next in the sequence and wherein a plurality of carrier means equal in number to the number of chambers less one are provided to transport individual ones of the pallets between successive pairs of the chambers.

14. The inline processing system of claim 13 wherein the magazine constitutes a first magazine and wherein an unload chamber is formed substantially as a mirror image of the load chamber for receiving and supporting a second magazine formed substantially as a mirror image of the first magazine and wherein the unload chamber is located inline at the end of the line of process chambers for a substantially continuous flowthrough of pallets from the unprocessed state to the processed state and wherein each of the load and unload chambers includes a main portion and an inline extension from the main portion to park the carrier means outside of the main portion of the chamber so as not to obstruct the loading or unloading of the magazine.

15. The inline processing system of claim 1 wherein the load chamber includes a main portion and an inline extension to park the carrier means outside of the main portion of the chamber so as not to obstruct the loading of the magazine.

16. An inline system for processing a group of pallets each constructed to hold a plurality of substrates, including,

a first magazine for supporting a particular number of unprocessed pallets,

a load chamber disposed in cooperative relationship with the first magazine and including first means for indexing the magazine for presenting individual ones of the unprocessed pallets to a position for transfer from the magazine to the load chamber,

a plurality of process chambers each disposed in an inline relationship with the load chamber and including a pair of valve means at opposite ends of such process chamber to control the passage of individual ones of the pallets between such process chamber and the next process chamber in the inline arrangement, each of the process chambers being constructed to process the substrates on the pallets in such chamber,

a second magazine for supporting the pallets after processing the pallets in the process chambers,

an unload chamber disposed in an inline relationship with the process chambers and disposed relative to the second magazine and including second means for indexing the magazine for receiving individual ones of the processed pallets from the process chamber furthest removed from the load chamber,

the load chamber, the process chambers and the unload chamber being disposed in adjacent relationship with one another,

a plurality of carrier means equal in number to the number of process chambers less one, each of the carrier means being disposed for movement between an adjacent pair of the process, load and unload chambers for receiving individual ones of the pallets from the first one of the chambers in the pair and for supporting the individual ones of the pallets at positions for transport by such carrier means to the second one of the chambers in the pair and for returning thereafter to the first chamber in the pair, and

a plurality of drive and support means each normally located within an associated one of the chambers and associated with the carrier means in such chamber for coupling to the associated carrier means to support such associated carrier means and for driving such associated carrier means from such associated chamber to the next adjacent chamber in the pair and for returning the carrier means to such associated chamber in the pair.

17. The inline system of claim 16 wherein the magazines include magazine arms for supporting individual ones of the pallets and wherein each individual pallet includes a hub having stepped portions and wherein the magazine arms have end portions to engage the stepped portions of the hub and wherein the magazine arms are located on opposite sides of the associated pallet to support the associated pallet.

18. The inline system of claim 16 wherein the magazines include magazine arms for supporting individual ones of the pallets and wherein the magazine arms are movable between first and second positions to move the associated pallets between first and second positions and wherein the magazine arms support the pallets in the first position and individual ones of the pallets are transferred to the associated carrier means when the magazine arms are in the second position and wherein the load and unload chambers include actuator means coupled to the magazines for providing a controlled movement of the magazine arms between the first and second positions.

19. The inline system of claim 18 wherein each of the carrier means includes carrier arms for supporting individual ones of the pallets and the magazine arms and the carrier arms are parallel to each other and wherein individual ones of the pallets are transferred from the magazine arms to the carrier arms when the magazine arms are in the second position and are transferred to the magazines for disposition in the chambers when the magazine arms are in the first position and wherein each individual pallet includes a hub having first stepped portions located on opposite sides of the pallet to receive the magazine arms on opposite sides of the pallet and having second stepped portions located on opposite sides of the pallet to receive the carrier arms on opposite sides of the pallet.

20. The inline system of claim 16 wherein each of the first and second indexing means includes a ballscrew actuator to index the magazine to the position for transfer of individual ones of the pallets.

21. The inline system of claim 16 wherein each of the load and unload chambers includes a door having an open and closed positions to provide for the loading and unloading of the magazines and wherein each of the doors includes an enlarged portion extending outwardly to form a space with the door in the closed position for receiving at least a portion of the magazine as the magazine is indexed respectively to present or receive individual ones of the pallets in the transfer position.

22. The inline system of claim 16 wherein each process chamber includes a spindle mechanism to engage individual ones of the pallets in such process chamber for providing rotation of such pallets and wherein the spindle mechanism includes first and second mechanisms mounted respectively on opposite sides of the pallets and wherein the first and second mechanisms are movable toward individual ones of the pallets to capture the individual pallets between the first and second mechanisms for rotation and wherein each individual pallet includes a hub having a configuration to receive the first and second mechanisms of the spindle mechanism to capture the pallet for rotation by the spindle mechanism.

23. The inline system of claim 16 wherein each carrier means includes carrier arms for supporting individual ones of the pallets and wherein the individual ones of the pallets are respectively transferred from the magazine arms to the carrier arms for transport of the pallets by the carrier arms through the process chambers and wherein each individual pallet includes a hub having stepped portions for receiving the carrier arms.

24. The inline system of claim 16 wherein each carrier means includes a rack member and each associated drive and support means includes a pinion for engaging the rack member to drive the carrier means between the chambers in the pair associated with such carrier means and wherein each pinion is mounted to float relative to the associated rack member for a sliding movement between such rack member and such pinion until drive engagement occurs between such rack member and such pinion.

25. The inline system of claim 16 wherein the support means and the carrier means associated with each chamber includes complementary bearing surfaces for guiding such carrier means between the chambers in the pair.

26. The inline system of claim 16 wherein each of the pallets includes a plurality of openings to receive the substrates for processing and wherein each opening includes a groove having a depth slightly larger than the thickness of the substrate and wherein the substrates are seated within the grooves in the pallet for processing of the substrates.

27. The inline system of claim 16 wherein the unload chamber is formed substantially as a mirror image of the load chamber and the second magazine is formed substantially as a mirror image of the first magazine and wherein the loading into the load chamber of the pallets from the first magazine and the unloading of the pallets from the unload chamber into the second magazine provide for a substantially continuous flow of pallets through the chambers from an unprocessed state to a processed state and wherein each of the load and unload chambers includes a main portion and an inline extension for receiving the associated carrier means to park such carrier means in such inline extension outside of such main portion of such chamber to prevent obstruction of the respective loading or unloading of such magazine.

28. The inline system of claim 16 wherein each of the load and unload chambers includes an inline extension for receiving the associated carrier means to park such carrier means in such inline extension outside of such main portion of the chamber to prevent obstruction of the respective loading or unloading of such magazine.

29. An in-line system for processing a plurality of pallets each constructed to hold a plurality of substrates, including,

a plurality of processing chambers disposed in an in-line arrangement, each of the processing chambers being constructed to process the substrates on the pallets in such chamber,

an unloading chamber disposed in the in-line arrangement with the processing chambers, the unloading chamber being disposed at one end of the in-line arrangement,

a magazine for holding the pallets in a stacked relationship, the magazine being disposed relative to the unloading chamber for providing for a sequential transfer of the pallets in the unloading chamber to the magazine in a stacked relationship,

a plurality of carrier means each associated with an individual one of the processing chambers for providing for a sequential transfer of the pallets from such processing chamber to the next one of the chambers in the in-line arrangement and for returning to the associated chamber after such transfer,

means at each of the processing chambers for processing the pallets in such chamber upon the transfer of such pallets from the previous chamber in the on-line arrangement, and

a plurality of drive means each associated with an individual one of the processing chambers and the associated carrier means for such processing chamber for driving the associated carrier means between such associated processing chamber and the next chamber in the in-line arrangement.

30. An in-line system as set forth in claim 29 including,

a plurality of means each disposed at an individual one of the processing chambers and responsive to each transfer of one of the pallets to such chamber by the carrier means for such processing chamber for rotating such pallet during the processing of the pallet in such chamber.

31. An inline system as set forth in claim 30, including,

the carrier means for each processing station having first and second positions and operative in the first position to provide a transfer of each pallet from such processing chamber to the next chamber and to provide a return of the carrier means to such processing chamber and operative in the second position to provide for a rotation of the pallet by the rotating means associated with such chamber.

32. An in-line system as set forth in claim 29, including,

means for loading successive pallets in each processing chamber in the in-line arrangement upon the processing of the pallets previously in such chamber and the transfer of such pallets from such chamber to the next chamber in the in-line arrangement.

33. An in-line system for processing a plurality of pallets each constructed to hold a plurality of substrates, including,

a plurality of chambers, each constructed to process the substrates on the pallets, the chambers being disposed in an in-line arrangement,

a plurality of carrier means each associated with an individual one of the chambers and movable to a next chamber in the in-line arrangement for transferring the pallets from such associated chamber to the next chamber, the carrier means having first and second positions and being operable in the second position to provide for the processing of the substrates on the pallet in a next chamber after the associated chamber and operable in the first position to provide for a movement of such pallet from the associated chamber to the next station for the processing of the substrates on such pallet in the next station and to provide for a return of such carrier means to such associated chamber from the next chamber after such transfer of such pallet to the next chamber,

first magazine means,

first means for sequentially transferring the pallets from the first magazine means into the first one of the chambers in the in-line arrangement for a transfer of the pallets to progressive ones of the chambers in the in-line arrangement after the processing of such pallets in stations in the in-line arrangement previous to such progressive chambers,

second magazine means, and

second means for sequentially transferring the pallets from the last chamber in the in-line arrangement to the second magazine means after the processing of the pallets in the chambers.

34. An in-line system as set forth in claim 33, including,

control means for each chamber, the control means being operative to become coupled to the pallet in each such chamber with the carrier means in such station in the first position and to provide a rotation of the pallet in each such station upon the movement of the carrier means in such station to the second position, and

a plurality of processing means each associated with an individual one of the chambers and operative to process the pallet in such chamber during the rotation of the pallet in such chamber by the control means.

35. An in-line system as set forth in claim 33, including,

each of the first and second magazine means being constructed to store the pallets in a stacked relationship,

the first means being constructed to provide an indexing movement to transfer successive ones of the pallets in the stacked relationship in the first magazine means to the first one of the chambers in the in-line arrangement, and

the second means being constructed to provide an indexing movement to transfer successive ones of the pallets in the stacked relationship from the last one of the chambers in the in-line arrangement to the second magazine means.

36. An in-line system as set forth in claim 33, including,

the first means including first magazine arms movable between first and second positions and operable in the first position to support the pallets in the first magazine means and operable in the second position to release the pallets in the first magazine means for movement from the first magazine means to the first chamber by the carrier means associated with the first chamber in the in-line arrangement,

the second means including second magazine arms movable between first and second positions and operable in the first position to support the pallets in the second magazine means and operable in the second position to provide for the movement of the pallets from the last chamber in the inline arrangement to the second magazine means by the carrier means associated with the last chamber in the in-line arrangement.

37. An in-line system for processing a plurality of pallets each constructed to hold a plurality of substrates, including,

a first magazine for holding the pallets in a stacked relationship,

a load chamber disposed adjacent the first magazine,

first means disposed in the first magazine and movable between first and second positions and operable in the first position to retain the pallets in the first magazine and operable in the second position to provide for the transfer of pallets from the first magazine into the load chamber,

second means for indexing the first means to the positions in the first magazine for providing for the transfer of successive ones of the pallets from the first magazine into the load chamber,

at least one processing chamber disposed adjacent the load chamber for processing the pallets transferred from the first magazine,

first carrier means movable between the processing chamber and the load chamber for transferring the pallets from the load chamber to the processing chamber,

means for processing the pallets transferred to the processing chamber,

an unload chamber disposed adjacent the processing chamber,

a second magazine disposed adjacent the unload chamber for holding the pallets in a stacked relationship,

third means disposed in the second magazine and movable between first and second positions and operable in the first position to retain the pallets in the second magazine and operable in the second position to provide for a transfer of the pallets from the unload chamber into the second magazine,

second carrier means movable between the processing chamber and the unload chamber for transferring the pallets from the processing chamber into the unload chamber, and

fourth means for indexing the third means to the positions in the second magazine to provide for the transfer of successive ones of the pallets from the unload chamber into the second magazine.

38. An in-line system as set forth in claim 37 wherein

the first carrier means has first and second positions and is operable in the first position for transferring the pallets from the load chamber to the processing chamber and is operable in the second position for providing for a substantially uniform processing of the pallets in the processing chamber and wherein

the second carrier means has first and second positions and is operable in the first position to provide for a transfer of the pallets from the processing chamber into the unload chamber and is operable in the second position for releasing the pallets in the processing chamber from the substantially uniform processing in the processing chamber.

39. An in-line system as set forth in claim 37, including,

means for rotating the pallets in the processing chamber to provide for the substantially uniform processing of the pallets, and

means responsive to the disposition of the first carrier means in the second position for coupling the rotating means to the pallet in the processing chamber to provide for the rotation of the pallet by the rotating means.

40. An in-line system as set forth in claim 39 wherein

the first carrier means is movable in a first position from the load chamber to the processing chamber to transfer one of the pallets from the load chamber to the processing chamber for processing, is thereafter movable to the second position to provide for the coupling of the rotating means to such pallet, is subsequently movable to the first position and is then movable to the load chamber with the first carrier means in the first position and wherein

the second carrier means is movable in a first position from the processing chamber to the unload chamber to transfer the processed pallet in the processing chamber to the unload chamber and is thereafter movable in the first position to the processing chamber.