Amorphous oxide film and article having such film thereon

• US 5,110,637 A
• Filed: 03/03/1989
• Issued: 05/05/1992
• Est. Priority Date: 03/03/1988
• Status: Expired due to Fees

• Current Assignee: Asahi Glass Company, Limited (AGC, Inc.)
• Original Assignee: Asahi Glass Company, Limited (AGC, Inc.)
• Inventors: Suzuki, Koichi, Suzuki, Susumu, Ebisawa, Junichi, Ando, Eiichi
• Primary Examiner(s): Robinson, Ellis P.
• Assistant Examiner(s): Loney, Donald J.
• Application Number:
  US07/318,330
• Time in Patent Office: 1,159 Days
• Field of Search: 428/34, 428/426, 428/427, 428/432, 428/446, 428/469, 428/472, 428/689, 428/697, 428/702, 428/704, 428/908.8, 428/428, 428/457, 428/699, 428/212, 428/913, 156/107, 156/109, 52/788, 52/790, 427/126.3, 427/419.1, 427/419.2, 427/167, 427/404, 501/49, 501/50, 501/51, 501/63-65, 501/77, 501/78, 501/94, 501/96, 501/102, 501/103, 501/154
• US Class Current: 428/34
• CPC Class Codes: C03C 17/23 Oxides C03C17/02 takes precedence
• CPC Class Codes: C03C 17/245 by deposition from the vapour phase
• CPC Class Codes: C03C 17/25 by deposition from the liquid phase
• CPC Class Codes: C03C 17/3417 all coatings being oxide coatings
• CPC Class Codes: C03C 17/3435 comprising a nitride, oxynitride, boronitride or carbonitride
• CPC Class Codes: C03C 17/3482 comprising silicon, hydrogenated silicon or a silicide
• CPC Class Codes: C03C 17/3488 comprising a boride or phosphide
• CPC Class Codes: C03C 17/36 at least one coating being a metal
• CPC Class Codes: C03C 17/3605 Coatings of the type glass/metal/inorganic compound
• CPC Class Codes: C03C 17/3613 Coatings of type glass/inorganic compound/metal/inorganic compound/metal/other
• CPC Class Codes: C03C 17/3615 Coatings of the type glass/metal/other inorganic layers, at least one layer being non-metallic
• CPC Class Codes: C03C 17/3618 Coatings of type glass/inorganic compound/other inorganic layers, at least one layer being metallic
• CPC Class Codes: C03C 17/3626 one layer at least containing a nitride, oxynitride, boronitride or carbonitride
• CPC Class Codes: C03C 17/3639 Multilayers containing at least two functional metal layers
• CPC Class Codes: C03C 17/3644 the metal being silver
• CPC Class Codes: C03C 17/3652 the coating stack containing at least one sacrificial layer to protect the metal from oxidation
• CPC Class Codes: C03C 17/3655 the multilayer coating containing at least one conducting layer
• CPC Class Codes: C03C 17/3657 the multilayer coating having optical properties
• CPC Class Codes: C03C 17/3681 the multilayer coating being used in glazing, e.g. windows or windscreens
• CPC Class Codes: C03C 2217/213 SiO2
• CPC Class Codes: C03C 2217/229 : Non-specific enumeration
• CPC Class Codes: C03C 2217/23 : Mixtures
• CPC Class Codes: C03C 2217/242 : with rare earth metals
• CPC Class Codes: C03C 2217/78 : Coatings specially designed to be durable, e.g. scratch-resistant
• CPC Class Codes: C03C 2218/11 : from solutions or suspensions
• CPC Class Codes: C03C 2218/15 : from the vapour phase
• CPC Class Codes: C03C 2218/154 : by sputtering
• CPC Class Codes: C23C 14/08 : Oxides C23C14/10 takes precedence
• CPC Class Codes: C23C 14/3414 : Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
• CPC Class Codes: G02B 1/10 : Optical coatings produced by application to, or surface treatment of, optical elements G02B1/08 takes precedence
• CPC Class Codes: G02B 1/105 : Protective coatings
• CPC Class Codes: G02B 1/14 : Protective coatings, e.g. hard coatings
• CPC Class Codes: Y02T 10/90 : Energy harvesting concepts as power supply for auxiliaries' energy consumption, e.g. photovoltaic sun-roof

Abstract

An amorphous oxide film composed essentially of an oxide containing at least one member selected from the group consisting of Zr, Ti, Hf, Sn, Ta and In and at least one member selected from the group consisting of B and Si.

Claims

1. An amorphous oxide film composed essentially of an oxide containing B and at least one member selected from the group consisting of Zr, Ti, Hf, Sn, Ta and In.

2. The amorphous oxide film according to claim 1, which is composed essentially of an oxide containing Zr and B (ZrB_x O_y), wherein the atomic ratio x of B to Zr is 0.05≦

x≦

3, and the atomic ratio y of O to Zr is 2<

y≦

6.5.

3. The amorphous oxide film according to claim 1, which is composed essentially of an oxide containing Zr and B (ZrB_x O_y), wherein the atomic ratio x of B to Zr is 0.05≦

x≦

1.0, and the atomic ratio y of O to Zr is 2<

y≦

3.5.

4. An article with high durability which comprises a substrate and one or more thin film layers formed thereon, wherein the outermost layer is made of an amorphous oxide film composed essentially of an oxide containing B and at least one member selected from the group consisting of Zr, Ti, Hf, Sn, Ta and In.

5. The article with high durability according to claim 4, wherein the outermost layer exposed to air is made of an amorphous oxide film composed essentially of ZrB_x O_y wherein x is 0.05≦

x≦

1.0 and y is 2<

y≦

3.5, or ZrB_x Si_z O_y wherein x, z and y are 0.05≦

x+z, z<

19 and 2<

y<

40, provided that when x>

3, x≦

3+0.25z.

6. The article with high durability according to claim 4 or 5, wherein at least two layers comprising a heat radiation reflecting film and the amorphous oxide film, are formed on the substrate in this order from the substrate side.

7. The article with high durability according to claim 4 or 5, wherein at least three layers comprising a transparent dielectric film, a heat radiation reflecting film and the amorphous oxide film, are formed on the substrate in this order from the substrate side.

8. The article with high durability according to claim 6, wherein the amorphous oxide layer has a refractive index of at most 2.0.

9. The article with high durability according to claim 4 or 5, wherein a total of 2n+1 coating layers (n≧

1) including a transparent oxide layer as the 2n+1 layer (n≧

0) and a silver layer as the 2n layer (n≧

1) are formed on the substrate, and the amorphous oxide layer is formed on the outermost layer of said 2n+1 coating layers.

10. The article with high durability according to claim 7, wherein the amorphous oxide layer has a refractive index of at most 2.0.

12. The article with high durability according to claim 4 or 5, wherein one layer of the amorphous oxide film is formed on one side or each side of the substrate.

11. A double-glazed windowpane comprising:

(1) a substrate having

(i) a total of 2n+1 coating layers (n≧

1) formed on said substrate including a transparent oxide layer as the 2n+1 layer (n≧

0) and a silver layer as the 2N layer (n≧

1) and

(ii) an amorphous oxide layer composed essentially of an oxide containing B and at least one member selected from the group consisting of Zr, Ti, Hf, Sn, Ta, and In formed on the outermost layer of said 2n+1 coating layers, and

(2) one or more substrates, double- or multi-glazed with an inner space between said substrates, and with said 2n+1 coating layers and said amorphous oxide layer facing the inner space.

13. A building or transportation means having windows provided with a windowpane which comprises a transparent substrate and one or more thin film layers formed thereon, wherein the outermost layer exposed to air is made of an amorphous oxide film composed essentially of an oxide containing B and at least one member selected from the group consisting of Zr, Ti, Hf, Sn, Ta and In.

15. The amorphous oxide film according to claim 13, which is composed essentially of an oxide containing Zr, B and Si (ZrB_x Si_z O_y), wherein the atomic ratio x of B to Zr, the atomic ratio z of Si to Zr and the atomic ratio y of O to Zr are 0.05≦

x+y, 19>

z and 2<

y<

40, provided that when x>

3, x≦

0.25z+3.

14. An amorphous oxide film composed essentially of an oxide containing B, Si and at least one member selected from the group consisting of Zr, Ti, Hf, Sn, Ta and In.