Integrated optical sensor arrangement with detecting means, and means for controlling the optical emission wavelength of the light beam source

• US 5,113,066 A
• Filed: 04/08/1991
• Issued: 05/12/1992
• Est. Priority Date: 04/11/1990
• Status: Expired due to Fees

• Current Assignee: Dr Johannes Heidenhain GmbH Traunreut West Germany
• Original Assignee: Dr. Johannes Heidenhain GmbH
• Inventors: Franz, Andreas, Michel, Dieter
• Primary Examiner(s): Nelms, David C.
• Assistant Examiner(s): DAVENPORT, TERESA
• Application Number:
  US07/681,883
• Time in Patent Office: 400 Days
• Field of Search: 250/237 G, 250/231.16, 250/231.14, 250/208.1, 250/205, 356/350, 385/11, 385/12, 385/14
• US Class Current: 250/205
• CPC Class Codes: G01D 5/38 by diffraction gratings
• CPC Class Codes: G02B 6/124 Geodesic lenses or integrated gratings
• CPC Class Codes: G02B 6/34 utilising prism or grating G02B6/293 takes precedence
• CPC Class Codes: G02B 6/43 Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
• CPC Class Codes: H04B 10/503 Laser transmitters
• CPC Class Codes: H04B 10/572 Wavelength control

Abstract

In an integrated optical arrangement, such as a photoelectric position measuring arrangement, a diffraction grid is scanned by light beam diffraction by a scanning unit having a laser. A light beam bundle emanating from the laser is split by the diffraction grid into two diffraction beam bundles, which are inserted into the top input waveguides of a waveguide coupler by two coupling elements. The two diffraction beam bundles interfere in the waveguide coupler and impinge on three detectors located at three output waveguides of the waveguide coupler for obtaining measured values. For readjustment of the optimal emission wavelength of the laser, an additional diffraction beam bundle emanating from the diffraction grid is entered into said integrated optical sensor arrangement by an additional coupling element. The additional beam bundle triggers a detector for generating a control signal to control the optimal emission wavelength of the laser.

Claims

1. An integrated optical sensor arrangement for controlling the optimal emission wavelength of a light beam source comprising:

a graduation scale for diffracting a light beam from said source into diffraction beam bundles;

means for coupling at least one diffracted beam to a waveguide coupler;

means for coupling an additional diffraction beam bundle to said integrated optical sensor; and

means for detecting and generating a control signal for controlling the optimal emission wavelength of said light beam source.

3. An arrangement according to claim 1 or 2 wherein said means for coupling said additional diffraction beam bundle comprises at least one coupling grid.

4. An arrangement according to claim 1 or 2 wherein said means for coupling said additional diffraction beam bundle comprises two coupling grids.

5. An arrangement according to claim 4 wherein said two coupling grids have different grid constants.

2. An integrated optical sensor arrangement for controlling the optimal emission wavelength of a light beam source comprising:

a graduation scale for diffracting a light beam from said source into diffraction beam bundles;

means for coupling said diffracted beams to a waveguide coupler wherein said diffracted beams are brought into interference;

means for detecting said interference and generating measure values;

means for coupling an additional diffraction beam bundle to said integrated optical sensor; and

means for detecting and generating a control signal for controlling the optimal emission wavelength of said light beam source.

6. An integrated optical sensor arrangement for controlling the optimal emission wavelength of a light beam source comprising:

a graduation scale for diffracting a light beam from said source into diffraction beam bundles;

means for coupling at least one diffracted beam to a waveguide coupler;

means for coupling an additional diffraction beam bundle to said integrated optical sensor;

means for diffracting said additional beam bundle into partial beam bundles;

means for coupling said partial bundles from said additional beam bundle to said integrated optical sensor; and

means for detecting said coupled partial beam bundles from said additional beam bundles and generating a control signal for controlling the optimal emission wavelength of said light beam source.

8. An arrangement according to claim 6 or 7 wherein said means for generating a control signal comprises a differential amplifier connected to said means for detecting.

9. An arrangement according to claim 6 or 7 wherein said coupled diffraction beam bundles are of equivalent intensity.

7. An integrated optical sensor arrangement for controlling the optimal emission wavelength of a light beam source comprising:

a graduation scale for diffracting a light beam from said source into diffraction beam bundles;

means for coupling said diffracted beams to a waveguide coupler wherein said diffracted beams are brought into interference;

means for detecting said interference and generating measure values;

means for coupling an additional diffraction beam bundle to said integrated optical sensor;

means for diffracting said additional beam bundle into partial beam bundles;

means for coupling said partial bundles from said additional beam bundle to said integrated optical sensor; and

means for detecting said coupled partial beam bundles from said additional beam bundles and generating a control signal for controlling the optimal emission wavelength of said light beam source.

10. A method of controlling the optimal emission wavelength of a light beam source in an integrated optical sensor arrangement comprising the steps of:

diffracting a beam of light from said source on a graduation scale;

coupling said diffracted beams to a waveguide coupler causing said diffracted beams to interfere;

detecting said interference and generating measured values;

coupling an additional diffraction beam bundle to said integrated optical sensor; and

detecting said additional beam bundle and generating a control signal for controlling the optimal emission wavelength of said light beam source.

11. A method according to claim 10 wherein said additional diffraction beam is coupled by at least one coupling grid.

12. A method according to claim 10 wherein said additional diffraction beam is coupled by two coupling grids.

13. A method of controlling the optimal emission wavelength of a light beam source in an integrated optical sensor arrangement comprising the steps of:

diffracting a beam of light from said source on a graduation scale;

coupling said diffracted beams to a waveguide coupler causing said diffracted beams to interfere;

detecting said interference and generating measured values;

diffracting said additional beam bundle into partial beam bundles;

coupling said partial beam bundles from said additional beam bundle to said integrated optical sensor; and

detecting said coupled partial beam bundles from said additional beam bundle and generating a control signal for controlling the optimal emission wavelength of said light beam source.