Electro-optical instrument with self-contained photometer

• US 5,113,082 A
• Filed: 09/11/1990
• Issued: 05/12/1992
• Est. Priority Date: 09/11/1990
• Status: Expired due to Fees

• Current Assignee: Golberstein, Moshe
• Original Assignee: Golberstein, Moshe
• Inventors: Golberstein, Moshe
• Primary Examiner(s): Nelms, David C.
• Assistant Examiner(s): Allen, Stephone B.
• Application Number:
  US07/580,824
• Time in Patent Office: 609 Days
• Field of Search: 250/571, 250/572, 250/560, 250/561, 356/371, 356/375, 356/376, 356/446, 356/445
• US Class Current: 250/559.4
• CPC Class Codes: G01B 11/026 by measuring distance between sensor and object G01B11/0608 takes precedence
• CPC Class Codes: G01B 11/303 using photoelectric detection means
• CPC Class Codes: G01J 2001/1652 one detector being transparent before the other one
• CPC Class Codes: G01N 21/55 Specular reflectivity

Abstract

An optical instrument for measuring characteristics of a specimen comprises a light source and an axial reflective member spaced from the light source to define an optical axis for the instrument along a line between the light source and the reflective member. A non-axial reflector is positioned laterally of the reflective member and laterally of the optical axis to receive a beam reflected from the axial reflective member. The non-axial reflector is oriented to reflect the beam onto the specimen. The instrument also contains a segmented photosensor and a second non-axial reflector to receive the beam reflected from the specimen and reflect it onto the segmented photosensor. The photosensor is positioned in the instrument to receive the beam from the second non-axial reflector. A conductor connected to each segment of the photosensor is provided for carrying current to signal conditioning hardware used to compare the current from the segments of the photosensor to provide information concerning the specimen.

Claims

1. An optical instrument for measuring characteristics of a specimen comprising, a light source, an axial reflective member spaced from the light source to define an optical axis for the instrument along a line between the light source and the reflective member, a non-axial reflector positioned laterally of the reflective member and laterally of the optical axis to receive a beam reflected from the axial reflective member, said non-axial reflector being oriented to reflect the beam onto the specimen, a photosensor, a second non-axial reflector to receive the beam reflected from the specimen and reflect it onto the photosensor, said photosensor being positioned in the instrument to receive the beam from the second non-axial reflector, and means for carrying signals from the photosensor to signal conditioning hardware means to provide information concerning the specimen responsive to said signals from said photosensor.

2. The instrument of claim 1 wherein the beam reflected from the second non-axial reflector is reflected thereby toward the optical axis of the instrument, an additional axial reflector means is provided to receive the beam from the second non-axial reflector and reflect said beam along the optical axis of the instrument onto said photosensor.

3. The optical instrument of claim 1 wherein the photosensor is segmented and the means for carrying signals from the photosensor to signal conditioning hardware comprises a conductor connected to each segment of the photosensor for carrying current to the signal conditioning hardware means and for completing an electrical circuit through the photosensor means and said signal conditioning hardware means is adapted to compare signals from the segments of the photosensor to provide information concerning the position of the specimen.

4. The optical instrument of claim 1 wherein the photosensor means is a photosensor assembly having upper and lower photosensors with a central aperture and the measured characteristic of the specimen is the reflectance of the specimen measured as a function of the difference between the signals obtained from the upper photosensor which receives light directly from the light source and the signals from the lower photosensor which receives light reflected from the specimen onto the lower photosensor.

5. The optical instrument of claim 1 wherein the measured characteristics comprise the difference between a standoff distance defined by the distance between a) the intersection of the optical axis and the beam from the second non-axial reflector and b) the specimen as a function of the displacement of the beam across the surface of the photosensor so as to produce changes in the optical power received by the segments of the photosensor.

6. The optical instrument of claim 1 wherein the axial reflective member is a beam splitter and said instrument includes a pair of said photosensors, said photosensors are each provided with a central aperture aligned on the optical axis of the instrument on opposite sides of the beam splitter to receive interfering beams traveling away from the beam splitter in opposite directions along the optical axis of the instrument.

7. The instrument of claim 1 wherein the photosensor is positioned between the axial reflective member and the specimen and said photosensor includes a pair of upper and lower back-to-back photosensors having aligned apertures and the difference in the optical power received by the upper and lower photosensors is compared to indicate the reflectance of the specimen as a function of the optical power reflected directly form the specimen along the optical axis onto the lower photosensor of the pair of compared to the optical power from the light source striking the upper photosensor of said pair.

8. The optical instrument of claim 1 wherein an additional light source is provided, an additional axial reflective means is provided in a position to reflect light from the additional light source through said aperture in said photosensor onto said surface of said specimen, and means to operate said light sources alternately or at desired sequences to obtain reflectance measurements at distances other than standoff distances.

9. The optical instrument of claim 1 wherein there are two laterally aligned non-axial reflectors on opposite sides of the axial reflective member.

10. The optical instrument of claim 9 wherein the non-axial reflectors are adjustable to vary the angular relationship of each to establish variations in a standoff distance for said instrument.

11. The optical instrument of claim 1 wherein the axial reflective member is a double-sided mirror and the photosensor is positioned between the double-sided mirror and the specimen.

12. The optical instrument of claim 11 wherein he mirror is shiftable to a position to which reflective material thereon is displaced out of the optical axis of the instrument, allowing light from the source to pass the mirror.

13. The optical instrument of claim 11 wherein the double-sided mirror is movable mounted and adapted to be displaced toward one side to allow light to travel directly from the light source to the specimen when desired.

14. An optical instrument for measuring characteristics of a surface of a specimen comprising, a source of light, said instrument directing a beam of light from the source obliquely at a selected angle β

to an optical axis positioned normal to the surface of the specimen, said specimen reflecting the light beam from the surface to provide a reflected beam having the same angle β

to the optical axis, a first reflective means for deflecting the reflected beam centrally toward the optical axis, a second reflective means for deflecting the centrally directed beam along said optical axis toward the specimen, photosensor means positioned to receive light from the beam after being reflected from the specimen to measure characteristics of the specimen, the beam from the second reflective means being positioned normal to the surface of the specimen to define the location of said optical axis of the instrument, the oblique beam directed from the source toward the specimen intersecting said optical axis and intersecting said surface of the specimen at a selected point when the instrument is at a selected standoff distance from the instrument, but when the specimen is moved toward or away from the instrument on said optical axis in either direction or is tilted, the beam reflected from the specimen is displaced thereby, and a photosensor positioned to detect the displaced beam when the surface of the specimen is moved to a position other than the standoff distance from the instrument or tilted with respect to a line normal to the surface of the specimen.

15. The optical instrument of claim 14 including an additional light source for illuminating the specimen along said optical axis and photosensor means receiving a beam of light reflected from the specimen and originating from the additional light source for determining reflective characteristics of the specimen.

16. The optical instrument of claim 14 wherein the instrument has a pair of aligned back-to-back segmented photosensors optically positioned between one of said reflective means and the surface of the specimen.

17. The optical instrument of claim 16 wherein the back-to-back photosensors are apertured and the aperture is positioned at the optical axis of the instrument.

18. The optical instrument of claim 14 wherein said photosensor means is optically positioned between the light source and the surface of the specimen being illuminated.

19. The optical instrument of claim 18 wherein the photosensor means comprises a pair of segmented photosensors in back-to-back relationship.

20. The optical instrument of claim 19 wherein the back-to-back photosensor means are apertured and the aperture is positioned so that the beam from the light source passes therethrough.

21. An optical instrument for measuring the characteristics of a specimen having a light reflective surface comprising, a light source, said instrument having an optical axis positioned normal to the reflective surface of the specimen, the instrument directing a beam for the light source onto the specimen at an oblique angle β

relative to said optical axis, the optical axis and the oblique beam of light from the light source intersecting at a point which defines a standoff distance from the instrument, photosensor array means positioned to receive said beam of light after being reflected from the specimen at an inclined angle β

to the optical axis when said received beam is in a first position, said specimen and instrument being movable relative to one another along the optical axis, the photosensor array means being constructed and arranged to detect movement of the reflected beam from its first position responsive to changes in the standoff distance that alters the point at which the reflected beam strikes the photosensor array means, said photosensor array mans thereby sensing changes in the location of the beam impinging thereon whereby the deviation between the position of the specimen and the standoff distance can be determined from the displacement of the beam on the photosensor array means.

22. The optical instrument of claim 21 wherein said photosensor array is constructed to measure the optical power of the light from the light source that has been reflected from the specimen onto the photosensor array to thereby determine the reflectivity of the specimen.

23. The optical instrument of claim 21 wherein said photosensor array means includes a pair of back-to-back apertured photosensors including one photosensor positioned to receive said reflected inclined beam and one positioned to receive a beam reflected from the specimen along the optical axis, and a photosensor including a pair of apertured back-to-back photosensors optically positioned between said light source and the specimen for comparing light from the source with a beam reflected from the specimen.

24. The optical instrument of claim 23 wherein a second light source is provided, said pair of photosensors is constructed to measure the optical power of the light projected from said light sources and to measure the corresponding optical power that has been reflected from the specimen onto said pair of photosensors to thereby determine the reflectivity of the specimen at two angles of illumination, namely, normal and oblique illumination.

25. An optical instrument to be used for projecting a beam of light onto a specimen and for evaluating the specimen, said instrument comprising,

a source of light,

said instrument directing a beam of light from the source of light obliquely onto the specimen, said specimen reflecting the light beam from the surface thereof to provide an oblique reflected beam, said instrument having an optical axis normal to the specimen,

means for deflecting said reflected beam toward the specimen along the optical axis,

photosensor means positioned to intercept one of said beams and being located to receive said beam of light reflected from said specimen for detecting a characteristic of the light received from the specimen, and

the photosensor means has means permitting two-way transmission of light past itself proceeding both toward and away from said photosensor in opposite directions when the light source is energized.

26. The optical instrument of claim 25 wherein said photosensor means comprises a pair of apertured back-to-back photosensors.

27. The optical instrument for measuring characteristics of a surface of a specimen comprising,

a light source for illuminating a specimen adapted to reflect at least some of the light incident thereto,

said instrument including means for directing an outbound beam of light proceeding from the source to the specimen and striking the specimen at a predetermined oblique angle incident thereto, said outbound beam being reflected from the specimen to provide an oblique reflected outbound beam proceeding away from the specimen at the same angle of reflection as the oblique beam incident to the specimen,

means for directing the reflected outbound beam back toward the specimen so as to strike the specimen along an optical axis normal to the surface of the specimen and the beam normal thereto then being reflected from the specimen as a returning beam that travels back toward the light source in the opposite direction from the outbound beam, and

a photosensor means interposed in the path of the outbound and returning beams for sensing a characteristic of light incident thereto.

28. The optical instrument of claim 27 wherein the photosensor means is segmented so as to include a plurality of separate sensing elements.

29. The apparatus of claim 27 wherein the photosensor means comprises a pair of apertured back-to-back photosensors, each adapted to sense a characteristic of light striking an exposed surface thereof.