Nonlinear, optical thin-films and manufacturing method thereof

• US 5,113,473 A
• Filed: 09/03/1991
• Issued: 05/12/1992
• Est. Priority Date: 11/24/1989
• Status: Expired due to Term

• Current Assignee: Matsushita Electric Industrial Company Limited (Panasonic Holdings Corporation)
• Original Assignee: Matsushita Electric Industrial Company Limited (Panasonic Holdings Corporation)
• Inventors: Yoshida, Masaru, Manabe, Yoshio, Mitsuyu, Tsuneo, Tanahashi, Ichiro
• Primary Examiner(s): Healy, Brian
• Application Number:
  US07/752,988
• Time in Patent Office: 252 Days
• Field of Search: 350/96.11, 350/96.12, 350/96.30, 350/96.34, 350/320, 307/425, 307/428, 307/430, 204/192.1, 204/192.11, 204/192.25, 204/192.26, 437/51, 437/160, 437/164, 385/14, 385/130, 385/131, 385/122, 359/328, 359/330, 359/332
• US Class Current: 385/131
• CPC Class Codes: G02F 1/355 characterised by the materials used

Abstract

Nonlinear, optical thin-films comprising a plurality of island structures of semiconductor ultra-fine particles and a plurality of continuous films of an optically transparent material, said island structures and said continuous films being applied alternately on a substrate. A method for manufacturing nonlinear, optical thin-films comprising the steps of: (a) providing a substrate; (b) depositing an island structure of semiconductor ultra-fine particles on the substrate or a continuous film; and (c) depositing the continuous film of optically transparent substance on the island structure; (d) the steps (b) and (c) of depositing an island structure and the continuous film being performed alternately.

Claims

1. Nonlinear, optical thin-films comprising a plurality of island structures of semiconductor ultra-fine particles and a plurality of continuous films of an optically transparent material, said island structures and said continuous films being applied alternately on a substrate.

2. The nonlinear, optical thin-films according to claim 1, wherein a length of semiconductor ultra-fine particles in a direction perpendicular to the substrate plane is equal to or less than that of continuous film in a direction perpendicular to the substrate plane.

3. The nonlinear, optical thin-films according to claim 1, wherein the size of said semiconductor ultra-fine particles is larger than the Bohr radius of excitons and small enough to realize the quantum size effect substantially.

4. A method for manufacturing nonlinear, optical thin-films comprising the steps of:

(a) providing a substrate;

(b) depositing an island structure of semiconductor ultra-fine particles on the substrate or a continuous film; and

(c) depositing the continuous film of optically transparent substance on the island structure;

(d) the steps (b) and (c) of depositing an island structure and the continuous film being performed alternately.

5. The method according to claim 4, wherein in the step of depositing an island structure, the size of semiconductor ultra-fine particles is controlled by substrate temperature and deposition time.

6. The method according to claim 4, wherein a length of continuous film in a direction perpendicular to the substrate plane is controlled to be equal to or larger than that of semiconductor ultra-fine particles in a direction perpendicular to the substrate plane.

7. The method according to claim 4, wherein a deposition apparatus is used for deposition in said steps of depositing an island structure and the continuous film, and the island structure is formed by ultra-fine particles grown in the deposition process.

8. The method according to claim 7, wherein said deposition apparatus is an evaporation apparatus having two evaporation sources for the semiconductor material and for the optically transparent material.

9. The method according to claim 7, wherein said deposition apparatus is a multi-target sputtering system having targets for the semiconductor material and for the optically transparent substance.