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Plasma sterilizer and method

  • US 5,115,166 A
  • Filed: 08/31/1990
  • Issued: 05/19/1992
  • Est. Priority Date: 03/08/1989
  • Status: Expired due to Term
First Claim
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1. An apparatus for plasma sterilization of articles comprising a sterilizing chamber, a plasma generator means external to the sterilizing chamber, and a plasma distribution means for distributing plasma from the plasma generator means to the sterilizing chamber;

  • the plasma generator means further comprising;

    a plasma generating chamber means for generating plasma therein; and

    Serial No.;

    576,292an electromagnetic wave generator for providing an electromagnetic field zone substantially in the plasma generating chamber means;

    the plasma generating chamber means further comprising;

    a generator tube having an inlet and an outlet, said inlet connected to receive a gas mixture and said outlet connected to the plasma distribution means, the generator tube being positioned in the electromagnetic field zone of the electromagnetic wave generator for generating plasma from the gas mixture; and

    a restriction means at the outlet for maintaining the gas pressure in the plasma generating chamber at from 0.1 to 10 torr.

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