Vertical cavity surface emmitting lasers with transparent electrodes
First Claim
1. A semiconductor vertical cavity surface emitting laser comprising a semiconductor body which comprises a plurality of layers selected from Group III-V and II-VI compound semiconductors having nominal formula GaAs, InP, InGaAs, InGaPAs, AlAs, AlGaAs, and AlGaInAs, said plurality of layers includingan active region which generates optical radiation,a bottom multilayer mirror which reflects said radiation,a top multilayer mirror which partially reflects and partially transmits said radiation in a direction perpendicular to said active region, said top mirror including an ion-implanted region arranged peripherally of the layers of said top mirror and defining a window for confining passage of current and of lasing emission to an area defined by said window,a dielectric layer upon said top mirror, said dielectric layer having a window aligned with said window in said ion-implanted region,a metallic barrier layer upon said dielectric layer and contacting that surface of said top mirror layer which is exposed in said window of said dielectric mirror layer,a layer of an optically transparent semiconductor material on said metal barrier layer forming a top electrode of the laser, said optically transparent layer having conductivity ranging from 1×
- 103 to 1×
105 Ω
-1 cm-1, light transmissivity of at least 80 percent and absorption of less than 10 percent, anda bottom electrode for applying in unity with said top electrode an excitation current in direction substantially perpendicular to said active region and substantially parallel to the direction of propagation of optical radiation.
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Accused Products
Abstract
Optically transparent and electrically conductive cadmium tin oxide or indium tin oxide is employed in vertical cavity surface emitting lasers for vertical current injection. Continuous wave lasing at room temperature is achieved in GaAs/AlGaAs quantum well lasers. Devices with a 10 μm optical window which also serves as a vertical current injection inlet give lasing threshold currents as low as 3.8 mA. The differential series resistance is (350-450) Ω with a diode voltage of (5.1-5.6) V at the lasing threshold. Far field pattern of the laser emission is Gaussian-like with a full width at half maximum of 7°.
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Citations
19 Claims
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1. A semiconductor vertical cavity surface emitting laser comprising a semiconductor body which comprises a plurality of layers selected from Group III-V and II-VI compound semiconductors having nominal formula GaAs, InP, InGaAs, InGaPAs, AlAs, AlGaAs, and AlGaInAs, said plurality of layers including
an active region which generates optical radiation, a bottom multilayer mirror which reflects said radiation, a top multilayer mirror which partially reflects and partially transmits said radiation in a direction perpendicular to said active region, said top mirror including an ion-implanted region arranged peripherally of the layers of said top mirror and defining a window for confining passage of current and of lasing emission to an area defined by said window, a dielectric layer upon said top mirror, said dielectric layer having a window aligned with said window in said ion-implanted region, a metallic barrier layer upon said dielectric layer and contacting that surface of said top mirror layer which is exposed in said window of said dielectric mirror layer, a layer of an optically transparent semiconductor material on said metal barrier layer forming a top electrode of the laser, said optically transparent layer having conductivity ranging from 1× - 103 to 1×
105 Ω
-1 cm-1, light transmissivity of at least 80 percent and absorption of less than 10 percent, anda bottom electrode for applying in unity with said top electrode an excitation current in direction substantially perpendicular to said active region and substantially parallel to the direction of propagation of optical radiation. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
- 103 to 1×
Specification