High resolution amorphous silicon radiation detectors

• US 5,117,114 A
• Filed: 12/11/1989
• Issued: 05/26/1992
• Est. Priority Date: 12/11/1989
• Status: Expired due to Term

• Current Assignee: Regents of the University of California (University of California), Xerox Corporation (Xerox Holdings Corp.)
• Original Assignee: Regents of the University of California (University of California)
• Inventors: Street, Robert A., Perez-Mendez, Victor, Kaplan, Selig N.
• Primary Examiner(s): FIELDS, CAROLYN
• Application Number:
  US07/448,240
• Time in Patent Office: 897 Days
• Field of Search: 250/370.11, 250/370.09, 250/370.14, 357/2
• US Class Current: 250/370.11
• CPC Class Codes: H01L 31/02322 comprising luminescent members, e.g. fluorescent sheets upon the device
• CPC Class Codes: H01L 31/02325 the optical elements not being integrated nor being directly associated with the device
• CPC Class Codes: H01L 31/02327 the optical elements being integrated or being directly associated to the device, e.g. back reflectors optical coatings H01L31/0216
• CPC Class Codes: H01L 31/1055 the devices comprising amorphous materials of Group IV of the Periodic Table
• CPC Class Codes: H01L 31/117 of the bulk effect radiation detector type, e.g. Ge-Li compensated PIN gamma-ray detectors
• CPC Class Codes: Y10S 257/926 Elongated lead extending axially through another elongated lead

Abstract

A radiation detector employing amorphous Si:H cells in an array with each detector cell having at least three contiguous layers (n type, intrinsic, p type), positioned between two electrodes to which a bias voltage is applied. An energy conversion layer atop the silicon cells intercepts incident radiation and converts radiation energy to light energy of a wavelength to which the silicon cells are responsive. A read-out device, positioned proximate to each detector element in an array allows each such element to be interrogated independently to determine whether radiation has been detected in that cell. The energy conversion material may be a layer of luminescent material having a columnar structure. In one embodiment a column of luminescent material detects the passage therethrough of radiation to be detected and directs a light beam signal to an adjacent a-Si:H film so that detection may be confined to one or more such cells in the array. One or both electrodes may have a comb structure, and the teeth of each electrode comb may be interdigitated for capacitance reduction. The amorphous Si:H film may be replaced by an amorphous Si:Ge:H film in which up to 40 percent of the amorphous material is Ge. Two dimensional arrays may be used in X-ray imaging, CT scanning, crystallography, high energy physics beam tracking, nuclear medicine cameras and autoradiography.

Claims

1. Detector elements in an array of such elements for high energy particles or photons that move through the detector, with each detector element comprising:

first and second electrodes lying in approximately parallel planes and being spaced apart from each other;

an amorphous film including a mixture of at least 60 percent Si;

H and at most 40 percent Ge;

H, deposited approximately in a plane positioned between and adjacent to the first and second electrodes, the film having at least three contiguous regions, a first region of first electrical conductivity type adjacent to the first electrode, a second region of second electrical conductivity type opposite to the first conductivity type adjacent to the second electrode, and an intrinsic region positioned between the first and second regions where the first and second regions have smaller thickness than the thickness of the intrinsic region;

bias means, electrically connected to the first and second electrodes, for impressing an electrical field between the first and second electrodes; and

readout means, positioned adjacent to the first and second electrodes and electrically connected thereto, for selectively reading the voltage or current developed across the amorphous film.

2. An assembly of detector elements, each constructed according to claim 1 for detecting individual photons of photon energy at least 6 keV, the detector comprising:

a curvilinear array of detector elements, wherein each of said amorphous films is formed as a strip of thickness at least 30 μ

m.

3. The assembly of claim 2 wherein said first and second electrodes are each formed as a comb having two or more teeth, the combs being interdigitated when viewed in a direction perpendicular to said planes in which said electrodes lie.

4. The assembly of detector elements, each constructed according to claim 1, for detecting individual photons of photon energy at least 6 keV, the detector comprising:

an approximately planar rectangular array of detector elements, wherein each of said amorphous films has a thickness of at least 30 μ

m.

5. The detector assembly of claim 4, wherein said first and second electrodes are each formed as a comb having two or more teeth, the two combs being interdigitated when viewed in a direction perpendicular to said planes in which said electrodes lie.

6. Detector elements according to claim 1, wherein said array of detector elements is a two-dimensional array, with each detector element being addressable by two signals that specify two-dimensional coordinates of a detector element.

7. Detector elements according to claim 1, having a layer of luminescent material drawn from the class of phosphors that emit visible wavelength radiation and that consists of CaWO₄, BaSrSO₄, GdO₂ S:

Th, LaOBr;

Tb, BaPbSO₄, Y₂ O₂ S;

Tb, BaFCl;

Eu, (ZnCd)S;

Ag, CsI, CsI;

Na, CsI;

Tl and NaI;

Tl.

8. Detector elements according to claim 7, wherein said luminescent material has a columnar structure with a plurality of columns, each column having a longitudinal axis that is oriented approximately perpendicular to the plane of said amorphous film and having a diameter, measured transverse to its longitudinal axis, in the range of 10-100 μ

m.

9. Detector elements according to claim 8, wherein said columnar structure is formed as a plurality of fiber optic columns that are impregnated with a fluorescent material.

10. Particle detector elements in an array of such elements, for detecting the presence of high energy particles that move through the detector element array, with each detector element comprising:

first and second electrodes lying in approximately parallel planes spaced apart from each other;

an amorphous Si;

H film deposited adjacent to each of the first and second electrodes, the film having at least seven contiguous regions, a first highly doped region of first conductivity type positioned adjacent to the first electrode, a second highly doped region of second conductivity type opposite to the first conductivity type and positioned adjacent to the second electrode, a third region of first conductivity type positioned between and spaced apart from the first and second regions, a fourth region of second conductivity type positioned between and spaced apart from the second and third regions, a fifth intrinsic conductivity region positioned between the first and third regions, a sixth intrinsic conductivity region positioned between the second and fourth regions, and a seventh intrinsic conductivity region positioned between the third and fourth regions, where the intrinsic regions have a low charged particle trap density and the first, second, third and fourth regions have smaller thicknesses than the thicknesses of the intrinsic regions;

bias means, electrically connected to the first and second electrodes, for impressing an electrical field between these two electrodes;

a layer of luminescent material, positioned adjacent to the Si;

H film, the luminescent material having a characteristic wavelength of light emission from an excited state that is no more than 0.8 μ

m, and the luminescent material layer having a plurality of columns with longitudinal axes of the columns being oriented approximately perpendicular to an adjacent surface of the Si;

H film; and

readout means, positioned adjacent to the first and second electrodes and electrically connected to these two electrodes, for selectively reading the voltage or current developed across the Si;

H film in response to passage of high energy particles through the detector elements.

11. Detector elements according to claim 10, wherein said array of detector elements is a two-dimensional array, with each detector element being addressable by two signals that specify two-dimensional coordinates of a detector element.

12. Detector elements according to claim 10, wherein said luminescent material has a columnar structure with a plurality of columns, each column having a longitudinal axis that is oriented approximately perpendicular to the plane of said adjacent amorphous film and having a diameter, measured transverse to its longitudinal axis, the range of 10-100 μ

m.

13. Detector elements according to claim 12, wherein said columnar structure is formed as a plurality of fiber optic columns that are impregnated with a fluorescent material.

14. Detector elements according to claim 10, wherein said luminescent material is drawn from the class of phosphors that emit visible wavelength radiation and that consists of CaWO₄, BaSrSO₄, GdO₂ S:

Th, LaOBr;

Tb, BaPbSO₄, Y₂ O₂ S;

Tb, BaFCl;

Eu, (ZnCd)S;

Ag, CsI, CsI;

Na, CsI;

Tl and NaI;

Tl.

15. The apparatus of claim 10, wherein each of said first and second electrodes is formed as a comb having two or more teeth and the two combs are interdigitated, when viewed in a direction perpendicular to the planes in which said first electrode and said second electrode lie.