Acoustic wave device using plate modes with surface-parallel displacement

• US 5,117,146 A
• Filed: 06/21/1991
• Issued: 05/26/1992
• Est. Priority Date: 04/29/1988
• Status: Expired due to Term

• Current Assignee: Sandia Corporation (Martin Marietta Corporation)
• Original Assignee: United States Department of Energy
• Inventors: Martin, Stephen J., Ricco, Antonio J.
• Primary Examiner(s): Budd, Mark O.
• Application Number:
  US07/719,654
• Time in Patent Office: 340 Days
• Field of Search: 310/311, 310/312, 310/313, 333/150-155, 333/193-196, 73/596, 73/597, 73/599, 73/23.2, 73/23.28, 73/23.33, 73/23.36, 73/23.37, 73/23.4, 73/24.01, 73/24.04, 73/24.05, 73/24.06, 73/25.04 , 73/25.05, 73/28.01, 73/30.01, 73/30.04, 73/53, 375/117, 375/119
• US Class Current: 310/313.00R
• CPC Class Codes: G01N 2291/014 Resonance or resonant frequency
• CPC Class Codes: G01N 2291/0255 (Bio)chemical reactions, e.g. on biosensors
• CPC Class Codes: G01N 2291/0256 Adsorption, desorption, surface mass change, e.g. on biosensors
• CPC Class Codes: G01N 2291/02809 Concentration of a compound, e.g. measured by a surface mass change
• CPC Class Codes: G01N 2291/0427 Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever
• CPC Class Codes: G01N 29/022 Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices microdevices per se B81B

Abstract

Solid-state acoustic sensors for monitoring conditions at a surface immersed in a liquid and for monitoring concentrations of species in a liquid and for monitoring electrical properties of a liquid are formed by placing interdigital input and output transducers on a piezoelectric substrate and propagating acoustic plate modes therebetween. The deposition or removal of material on or from, respectively, a thin film in contact with the surface, or changes in the mechanical properties of a thin film in contact with the surface, or changes in the electrical characteristics of the solution, create perturbations in the velocity and attenuation of the acoustic plate modes as a function of these properties or changes in them.

Claims

1. A solid-state acoustic plate mode sensor comprising:

(a) a piezoelectric substrate having a pair of opposed surfaces;

(b) input transducer means affixed to said substrate for propagating acoustic plate modes through said substrate;

(c) output transducer means affixed to said substrate for receiving acoustic plate modes propagated through said substrate from said input transducer means;

(d) means for maintaining a liquid in contact over a predetermined portion of either or both surfaces of said substrate, said liquid creating perturbations in the velocity of said acoustic plate modes reflecting internally from said predetermined portion of said surface;

(e) means for applying a rf signal to said input transducer;

(f) means for receiving an rf signal from said output transducer; and

(g) means for determining said velocity perturbations from said rf signals; and

(h) means for monitoring and quantifying the concentration of a chemical species in said liquid resulting from sorption of said species onto or desorption from said surface.

2. The solid-state acoustic plate mode sensor of claim 1, wherein said input and output transducer means each comprise a pair of interdigital combs coplanar with one surface of said substrate.

3. The solid-state acoustic plate mode sensor of claim 1, wherein said means for maintaining a liquid comprises a liquid receiving cell having a liquid containing wall extending from a substrate surface.

4. The solid-state acoustic plate mode sensor of claim 1, wherein said predetermined portion of said surface is in intimate contact and covered by a thin film in contact with said liquid, said liquid causing changes on the surface of said film, said changes causing in-plane displacements at the film-liquid interface and perturbations in said acoustic plate modes in said substrate.

5. The solid-state acoustic plate mode sensor of claim 4, wherein said liquid is an electrolyte and said thin film is an electrode receiving material by electrodeposition:

said perturbation in velocity of said acoustic plate modes being a function of variations in mass and mechanical properties of the material received by said electrode.

6. The solid-state acoustic plate mode sensor of claim 4, wherein said liquid is an electrolyte and said thin film is an electrode surrendering material by electrodissolution;

said perturbation in velocity of said acoustic plate modes being a function of variations in mass and mechanical properties of the material surrendered by said electrode.

7. The solid-state acoustic plate mode sensor of claim 4, wherein said liquid is an electrolyte and said thin film is a metal film changing material by corrosion;

said perturbation in velocity of said acoustic plate modes being a function of variations in mass and mechanical properties of the change in amount of material on said thin film.

8. The solid-state acoustic plate mode sensor of claim 4, wherein said liquid is a solution containing dissolved species and said thin film is a surface-immobilized reagent designed to ligate said solution species;

said perturbation in velocity of said acoustic plate modes being a function of variations in concentration and identity of the solution species, such variations being reflected in the mass bound by said thin film on the device surface.

9. A solid state acoustic plate mode sensor comprising:

(a) a piezoelectric substrate of thickness b having opposed parallel surfaces;

(b) input interdigital transducer means having two combs, each of said comb having N fingers and a periodicity d, said transducer means affixed to and coplanar with one surface of said substrate, for propagating acoustic plate modes whose frequency spectrum can be approximated by;

space="preserve" listing-type="equation">f.sub.n =(v.sub.o /2π

)[(2π

/d).sup.2 +(nπ

/b).sup.2 ]1/2

where v_o is the velocity of said acoustic plate mode in an unbounded piezoelectric solid, n is an integer, and where N>

4(b/d)², said acoustic plate modes propagated through the thickness of said substrate and reflected from each of said parallel surfaces;

(c) output interdigital transducer means having two combs, each of said comb having N fingers and a periodicity d, said transducer means affixed to and coplanar with one surface of said substrate, for receiving said acoustic plate modes propagated through the thickness of said substrate;

(d) means for maintaining a liquid in contact over a predetermined portion of either or both surfaces of said substrate, said liquid creating perturbations in the velocity of said acoustic plate modes internally reflecting from said predetermined portion of said surface; and

(e) means for applying a rf signal to said input transducer;

(f) means for receiving an rf signal from said output transducer; and

(g) means for determining said velocity perturbations of said acoustic plate modes from said rf signals; and

(b) means for monitoring and quantifying the concentration of a chemical species in said liquid resulting from sorption or desorption of said species onto or from said surface.

10. The solid-state acoustic plate mode sensor of claim 9, wherein said means for maintaining a liquid comprises a liquid receiving cell having a liquid containing wall extending from a substrate surface.

11. The solid-state acoustic plate mode sensor of claim 9, wherein said predetermined portion of said surface is covered by a thin film in contact with said liquid, said liquid causing changes on the surface of said film, said changes causing the perturbations in said acoustic plate modes in said substrate.

12. The solid-state acoustic plate mode sensor of claim 9, wherein said liquid is an electrolyte and said thin film is an electrode receiving material by electrodeposition;

said perturbation in velocity of said acoustic plate modes being a function of variations in mass and mechanical properties of the material received by said electrode.

13. The solid-state acoustic plate mode sensor of claim 11, wherein said liquid is an electrolyte and said thin film is an electrode surrendering material by electrodissolution, said perturbation in velocity of said acoustic plate modes being a function of variations in mass and mechanical properties of the material surrendered by said electrode.

14. The solid-state acoustic plate mode sensor of claim 11, wherein said liquid is an electrolyte and said thin film is a metal film changing material by corrosion, said perturbation in velocity of said acoustic plate modes being a function of variations in mass and mechanical properties of the change in amount of material on said thin film.

15. The solid-state acoustic plate mode sensor of claim 11, wherein said liquid is a solution containing dissolved species and said thin film is a surface-immobilized reagent designed to ligate said solution species, said perturbation in velocity of said acoustic plate modes being a function of variations in concentration and identity of the solution species, such variations being reflected in the mass bound by said thin film on the device surface.