Butterfly valve having improved sealing characteristics
First Claim
1. A fully sealing butterfly valve adapted for application in high vacuum systems used in semiconductor processing, comprising:
- a valve body adapted for in-line coupling in a conduit section comprising a central bore to pass fluid flowing along the longitudinal axis of said valve;
an annular seal having an inner diameter sized smaller that said central valve diameter and being disposed on a distal side said valve body;
a rotatable actuator shaft spanning across said central bore at a slightly off-center position from said bore diameter on a proximal side of said seal, said shaft comprising a key notch disposed at a position along said shaft generally bisecting said shaft length portion spanning across said bore, said shaft extending beyond an exterior of said valve body to enable controlled actuation;
a throttle assembly comprising,a throttle plate comprising a circular disk having an overall diameter sized slightly less than the diameter of said central bore and greater that said annular seal inner diameter, said throttle plate having a center pin having a rounded proximal end and a plurality of spring posts extending from a proximal side of said plate, said center pin positioned generally at the center of said throttle plate and each spring post positioned about an equal distance from one another with the distance between said center pin and each post being about equal;
a circular spring plate coupled with said throttle plate comprising a plurality of apertures extending through said spring plate and correspondingly positioned with said spring posts positions, a distal shaft groove positioned from the diameter of said spring plate by a corresponding degree of offset to that of said shaft off-center position, and adapted to engage a portion of said shaft surface, and a generally elongated oval central aperture extending through said spring plate at about the center of said spring plate;
a circular retainer plate comprising a proximal shaft groove positioned from the diameter of said retainer plate by a corresponding degree of offset to that of said shaft off-center position, and adapted to engage a portion of said shaft surface, said retainer plate connecting to said spring plate with said actuator shaft positioned between the two plates;
an indexing block comprising a generally rectangular shape adapted for a clearance fit into said shaft notch and having an aperture positioned on a distal side of said block sized to receive said center pin to key said shaft to said throttle plate, said indexing block comprising an interior, generally rectangular cavity extending into said block from a proximal side; and
a generally rectangular transfer block adapted to fit within said indexing block interior cavity, said transfer block comprising a hemispherical dimple sized to engage said center pin rounded end; and
a stop mechanism to prevent further rotation of said throttle plate when in a close position generally perpendicular to the axis of flow,wherein the rotation of said shaft directly translates to said throttle plate until said close position, at which point further rotation of said shaft forces said center pin axially in the distal direction via said transfer block to axially displace said throttle plate against said seal to a fully seated position.
17 Assignments
0 Petitions
Accused Products
Abstract
A fully sealing butterfly valve throttles flow rates through a flow channel and completely ceases flow. A throttle plate rotates into a close position and then moves axially to seat against a seal. The axial movement directly corresponds to rotation of an actuator shaft to improve valve control for the entire range of throttle plate movement from a full open position to a seal position. Additionally, the present butterfly valve employs a self-centering throttle plate adapted to float within the valve central bore. The throttle plate adjusts its positioning about an annular seal to achieve an effective seal entirely around its circumference.
47 Citations
22 Claims
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1. A fully sealing butterfly valve adapted for application in high vacuum systems used in semiconductor processing, comprising:
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a valve body adapted for in-line coupling in a conduit section comprising a central bore to pass fluid flowing along the longitudinal axis of said valve; an annular seal having an inner diameter sized smaller that said central valve diameter and being disposed on a distal side said valve body; a rotatable actuator shaft spanning across said central bore at a slightly off-center position from said bore diameter on a proximal side of said seal, said shaft comprising a key notch disposed at a position along said shaft generally bisecting said shaft length portion spanning across said bore, said shaft extending beyond an exterior of said valve body to enable controlled actuation; a throttle assembly comprising, a throttle plate comprising a circular disk having an overall diameter sized slightly less than the diameter of said central bore and greater that said annular seal inner diameter, said throttle plate having a center pin having a rounded proximal end and a plurality of spring posts extending from a proximal side of said plate, said center pin positioned generally at the center of said throttle plate and each spring post positioned about an equal distance from one another with the distance between said center pin and each post being about equal; a circular spring plate coupled with said throttle plate comprising a plurality of apertures extending through said spring plate and correspondingly positioned with said spring posts positions, a distal shaft groove positioned from the diameter of said spring plate by a corresponding degree of offset to that of said shaft off-center position, and adapted to engage a portion of said shaft surface, and a generally elongated oval central aperture extending through said spring plate at about the center of said spring plate; a circular retainer plate comprising a proximal shaft groove positioned from the diameter of said retainer plate by a corresponding degree of offset to that of said shaft off-center position, and adapted to engage a portion of said shaft surface, said retainer plate connecting to said spring plate with said actuator shaft positioned between the two plates; an indexing block comprising a generally rectangular shape adapted for a clearance fit into said shaft notch and having an aperture positioned on a distal side of said block sized to receive said center pin to key said shaft to said throttle plate, said indexing block comprising an interior, generally rectangular cavity extending into said block from a proximal side; and a generally rectangular transfer block adapted to fit within said indexing block interior cavity, said transfer block comprising a hemispherical dimple sized to engage said center pin rounded end; and a stop mechanism to prevent further rotation of said throttle plate when in a close position generally perpendicular to the axis of flow, wherein the rotation of said shaft directly translates to said throttle plate until said close position, at which point further rotation of said shaft forces said center pin axially in the distal direction via said transfer block to axially displace said throttle plate against said seal to a fully seated position. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A butterfly valve for throttling fluid flow through a conduit, said valve coupled to a control system to regulate the flow rate by periodically adjusting the valve positioning, comprising:
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a valve body adapted for in-line coupling in a conduit section comprising a central bore to pass fluid flowing along the longitudinal axis of said valve; an annular seal having an inner diameter and disposed proximal to said valve body; a rotatable actuator shaft passing through said central bore in the radial direction and having a key notch; a circular throttle plate disposed within said central bore, rotatable from an open position to a close position, comprising an overall diameter sized larger than said seal inner diameter and a pin extended axially and positioned to generally align with a circumferential edge of said shaft; a coupling mechanism biasing said throttle plate towards said shaft to directly communicate rotation of said shaft to said throttle plate when rotating from said open position to said close position; and a transfer block disposed in said shaft key notch and coupling said shaft with said pin such that, as said shaft continues to rotate past said close position, said circumferential shaft edge forces said pin axially via said transfer block to fully seat said throttle plate against said seal, said transfer block adapted to side within said key notch to maintain contact with said pin and to directly transmit rotational displacement of said shaft to axial displacement of said throttle plate. - View Dependent Claims (17, 18, 19)
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20. A butterfly valve for throttling fluid flow through a conduit, said valve coupled to a control system to regulate the flow rate by periodically adjusting the valve position, said butterfly valve comprising:
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a valve body defining a central bore; a seal being disposed proximate to said valve body; a rotatable actuator shaft being adapted to couple to the control system controlling the rotational position of said shaft, said actuator shaft being disposed in said central bore; and a throttle plate rotatable within said central bore to a closed position, said throttle plate coupling with said actuator shaft to directly communicate rotational translation of said shaft to said throttle plate throughout the rotational travel of said throttle plate, and, in said closed position, to directly translate rotation of said shaft to axially displace said throttle plate to fully seat said plate against said actuator shaft, the rotation of said actuator shaft directly translating into axial displacement of said throttle plate via a transfer block and a pin coupling, said pin extending axially from said throttle plate in the proximal direction and being positioned to generally align with a circumferential edge of said shaft, said transfer block being disposed between a notch in said shaft and said pin, said transfer block being slidable within said notch to maintain contact with said pin as said shaft rotates past said closed position. - View Dependent Claims (21)
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22. A fully seating butterfly valve for throttling fluid flow through a conduit, comprising:
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a valve body being adapted for in-line coupling in the conduit and defining a central bore through which fluid flows along a longitudinal axis of said valve; an annular seal being disposed proximate to said valve body and having an inner diameter size smaller than said central bore; a rotatable actuator shaft passing through said central bore in a radial direction; a circular bore throttle plate being disposed within said central bore and having an overall diameter sized larger than said seal inner diameter, said throttle plate including a plurality of posts extending generally axially from said throttle plate towards said shaft and being positioned about equal distances from a central point of said throttle plate and from one another; a platter connected to said shaft having a plurality of apertures extending through said platter and being correspondingly positioned to permit said posts to extend through said platter when juxtaposing said throttle plate; a plurality of biasing members, at least one biasing member being disposed about each post and being affixed thereon in a position between a proximate end of said post and said platter, coupling together said throttle plate and said platter and permitting said throttle plate to float within said central bore about said platter when in said closed position; and a retainer plate being attached to said platter, said platter and said retainer plate comprising corresponding shaft grooves, each shaft groove being positioned to surround generally half of said shaft diameter, thereby encapsulating said shaft in said grooves when said platter and said retainer plate are attached.
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Specification