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Butterfly valve having improved sealing characteristics

  • US 5,118,078 A
  • Filed: 05/16/1991
  • Issued: 06/02/1992
  • Est. Priority Date: 05/16/1991
  • Status: Expired due to Term
First Claim
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1. A fully sealing butterfly valve adapted for application in high vacuum systems used in semiconductor processing, comprising:

  • a valve body adapted for in-line coupling in a conduit section comprising a central bore to pass fluid flowing along the longitudinal axis of said valve;

    an annular seal having an inner diameter sized smaller that said central valve diameter and being disposed on a distal side said valve body;

    a rotatable actuator shaft spanning across said central bore at a slightly off-center position from said bore diameter on a proximal side of said seal, said shaft comprising a key notch disposed at a position along said shaft generally bisecting said shaft length portion spanning across said bore, said shaft extending beyond an exterior of said valve body to enable controlled actuation;

    a throttle assembly comprising,a throttle plate comprising a circular disk having an overall diameter sized slightly less than the diameter of said central bore and greater that said annular seal inner diameter, said throttle plate having a center pin having a rounded proximal end and a plurality of spring posts extending from a proximal side of said plate, said center pin positioned generally at the center of said throttle plate and each spring post positioned about an equal distance from one another with the distance between said center pin and each post being about equal;

    a circular spring plate coupled with said throttle plate comprising a plurality of apertures extending through said spring plate and correspondingly positioned with said spring posts positions, a distal shaft groove positioned from the diameter of said spring plate by a corresponding degree of offset to that of said shaft off-center position, and adapted to engage a portion of said shaft surface, and a generally elongated oval central aperture extending through said spring plate at about the center of said spring plate;

    a circular retainer plate comprising a proximal shaft groove positioned from the diameter of said retainer plate by a corresponding degree of offset to that of said shaft off-center position, and adapted to engage a portion of said shaft surface, said retainer plate connecting to said spring plate with said actuator shaft positioned between the two plates;

    an indexing block comprising a generally rectangular shape adapted for a clearance fit into said shaft notch and having an aperture positioned on a distal side of said block sized to receive said center pin to key said shaft to said throttle plate, said indexing block comprising an interior, generally rectangular cavity extending into said block from a proximal side; and

    a generally rectangular transfer block adapted to fit within said indexing block interior cavity, said transfer block comprising a hemispherical dimple sized to engage said center pin rounded end; and

    a stop mechanism to prevent further rotation of said throttle plate when in a close position generally perpendicular to the axis of flow,wherein the rotation of said shaft directly translates to said throttle plate until said close position, at which point further rotation of said shaft forces said center pin axially in the distal direction via said transfer block to axially displace said throttle plate against said seal to a fully seated position.

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