Method and apparatus for determining the position and diameter of the focal point of a laser beam

• US 5,118,922 A
• Filed: 10/04/1990
• Issued: 06/02/1992
• Est. Priority Date: 10/04/1989
• Status: Expired due to Fees

• Current Assignee: Dorries Scharmann GmbH
• Original Assignee: Dorries Scharmann GmbH
• Inventors: Rothe, Rudiger
• Primary Examiner(s): Nelms, David C.
• Assistant Examiner(s): Messinger, Michael
• Application Number:
  US07/592,771
• Time in Patent Office: 607 Days
• Field of Search: 250/206.1, 250/206.2, 250/208.2, 250/208.6, 250/216, 250/201.2, 250/201.4, 356/141, 356/152, 350/628, 219/121.78, 219/121.79, 219/121.81, 219/121.6, 219/121.81, 359/867
• US Class Current: 250/201.2
• CPC Class Codes: B23K 26/02 Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
• CPC Class Codes: G01J 1/4257 applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam monitoring arrangements for lasers in general H01S3/0014

Abstract

The present invention is a process and apparatus for determining the position and diameter of the focal point of a laser beam, specifically for use in material processing with a heavy-duty laser beam. In a process for determining the position and diameter of the focal point of a laser beam, specifically a heavy-duty laser beam, a rotationally symmetric reflector which reproduces a laser beam on a focal line is introduced in the path of rays of a focused laser beam. Reflected on the reflector, the laser beam is captured by way of at least one sensor which is fixedly coordinated with the reflector in the focal line, while the focal plane, the lateral position of the focal point and the diameter of the focal point are then determined by way of measured values captured in the sensor, with the sensor being shifted relative to the focusing optics of the laser beam or relative to the reflector. The output intensity of the laser is reduced to a point where the laser can be safely and unequivocally measured with the aid of sensors.

Claims

1. A process for determining the position and diameter of the focal point of a laser beam, specifically a heavy-duty laser beam, comprising the steps of:

a) introducing into the path of rays of a focused laser beam rotationally symmetric reflector which reproduces the laser beam on a focal line;

b) capturing the laser beam reflected on the reflector by way of at least one sensor which is fixedly coordinated with the reflector in the focal line;

c) determining a focal plane by way of a measured value captured in the sensor, in that the reflector along with the sensor is shifted in the direction of the laser beam, relative to the laser beam'"'"'s focusing optics;

d) determining the position of the focal point in the focal plane by way of the measured value captured in the sensor, and the reflector along with the sensor is shifted perpendicularly to the direction of the laser beam, relative to the laser beam'"'"'s focusing optics; and

e) determining the diameter of the focal point via the measured value captured in the sensor when the sensor is shifted relative to the reflector.

2. The process of claim 1 further comprising the step of introducing the reflector behind the focal plane from a diverging side of the laser beam, relative to the beam direction.

3. The process of claim 1 further comprising the step of introducing the reflector before the focal plane on a converging side of the laser beam, relative to the beam direction.

4. A device for determining the position and diameter of the focal point of a laser beam, specifically a heavy-duty laser beam, comprising:

a) a highly reflective rotationally symmetric reflector whose reflection surface, impinged by the laser beam, is so fashioned that the laser beam will be reproduced in a complementary ring-shaped focal line, and

b) a plurality of sensors disposed axially symmetric to the reflector, by means of which a focal plane and a focal point diameter can be determined.

5. The device of claim 4, wherein the reflector is disposed on a the diverging side of the laser beam, characterized in that the reflection surface has the shape of a rotational ellipsoid or a rotational hyperboloid, and in that axially symmetric to the reflector a ring-shaped reversing mirror is provided which in the focal line of the reflector features a number of detection bores which correspond to the number of sensors and in which sensors are inserted, said ring-shaped reversing mirror deflects a disc-shaped laser beam coming from the reflector to a thermal absorber.

6. The device of claim 4, wherein the reflector is disposed on a converging side of the laser beam, characterized in that the reflection surface has the shape of a cylinder or cone and in that, axially symmetric to the reflector, a ring-shaped thermal absorber is arranged which in the focal line of the reflector features a number of detection bores with inserted sensors that correspond to the number of sensors.

7. The device of claim 4 wherein the reflector is water-cooled.

8. The device of claim 5 wherein the reversing mirror and the absorber are water-cooled.

9. The device of claim 6 wherein the absorber is water-cooled.

10. A process for determining the position and diameter of the focal point of a high intensity laser beam, comprising the steps of:

positioning a rotationally symmetric reflector in the path of a focused laser beam to reproduce the laser beam on a focal line;

measuring the intensity value of the laser beam reflected on the reflector by means of at least one sensor which is fixedly positioned adjacent the reflector and located on the focal line;

determining the location of the focal plane according to the measured value of a sensor, by coaxially shifting the reflector in the direction of the laser beam and relative to the laser beam'"'"'s focusing optics;

determining the lateral position of the focal point according to the measured value of the sensor, by shifting the reflector with respect to the sensor in the direction of the laser beam and relative to the focusing optics of the laser beam; and

determining the diameter of the focal point according to the measured value of the sensor, by shifting the sensor relative to the reflector.

11. The process of claim 10 wherein the positioning step includes moving the reflector from axially beyond the focal plane at a diverging side of the laser beam.

12. The process of claim 10 wherein the positioning step includes moving the reflector axially ahead of the focal plane on a converging side of the laser beam.

13. An apparatus for determining the position and diameter of the focal point of a high intensity laser beam, comprising:

means for reproducing the laser beam in a complementary ring-shaped focal line, said reproducing means including a highly reflective rotationally symmetric reflector having a reflective surface; and

sensor means for determining a focal plane and a focal point diameter, said sensor means being axially symmetric to the reflector.

14. The apparatus of claim 13, wherein said sensor means includes four sensors.

15. The apparatus of claim 13, wherein said reflector is disposed on a diverging side of the laser beam, and said reflective surface has a shape of a rotational ellipsoid, said apparatus further comprising a thermal absorber and a ring-shaped reversing mirror disposed axially symmetric to said reflector and facing said thermal absorber, said reversing mirror including at least one detection bore for housing said sensor means disposed along the focal line of said reflector, whereby said reversing mirror deflects a disc-shaped laser beam coming from said reflector onto said thermal absorber.

16. The apparatus of claim 13, wherein said reflector is disposed on a diverging side of the laser beam, and said reflective surface has a shape of a rotational hyperboloid, said apparatus further comprising a thermal absorber and a ring-shaped reversing mirror disposed axially symmetric to said reflector and facing said thermal absorber, said reversing mirror including at least one detection bore for housing said sensor means disposed along the focal line of said reflector, whereby said reversing mirror deflects a disc-shaped laser beam coming from said reflector onto said thermal absorber.

17. The apparatus of claim 13, wherein said reflector is disposed on a converging side of the laser beam, and said reflective surface has the shape of a cylinder, said apparatus further comprising a ring-shaped thermal absorber disposed axially symmetric to said reflector, said thermal absorber including at least one detection bore for receiving said sensor means, said detection bore being disposed along the focal line of said reflector.

18. The apparatus of claim 13, wherein said reflector is disposed on a converging side of the laser beam, and said reflective surface has the shape of a cone, said apparatus further comprising a ring-shaped thermal absorber disposed axially symmetric to said reflector, said thermal absorber including at least one detection bore for receiving said sensor means, said detection bore being disposed along the focal line of said reflector.

19. The apparatus of claim 13 wherein said reflector is water-cooled.

20. The apparatus of claim 15 wherein said reversing mirror and said absorber are water-cooled.

21. The apparatus of claim 16 wherein said reversing mirror and said absorber are water-cooled.

22. The apparatus of claim 17 wherein said absorber is water-cooled.

23. The apparatus of claim 18 wherein said absorber is water-cooled.