Static control overlayers on opto-electronic devices

• US 5,118,924 A
• Filed: 10/01/1990
• Issued: 06/02/1992
• Est. Priority Date: 10/01/1990
• Status: Expired due to Fees

• Current Assignee: Eastman Kodak Company
• Original Assignee: Eastman Kodak Company
• Inventors: Jackson, Todd, Mehra, Madhav
• Primary Examiner(s): Nelms, David C.
• Application Number:
  US07/591,206
• Time in Patent Office: 610 Days
• Field of Search: 357/30 Q, 357/30 L, 350/165, 250/211 R, 250/211 J
• US Class Current: 257/659
• CPC Class Codes: H01L 31/022466 made of transparent conductive layers, e.g. TCO, ITO layers
• CPC Class Codes: H01L 31/022475 composed of indium tin oxide [ITO]
• CPC Class Codes: H01L 31/02327 the optical elements being integrated or being directly associated to the device, e.g. back reflectors optical coatings H01L31/0216

Abstract

In the method of this invention, lens arrays for light sensitive devices are made which have lenses that are substantially transparent over the wavelength range from 400 nm to 1000 nm comprising the steps of:

a) providing a spacer and planarization layer on the device over each sensing element;

b) applying a layer of photoresist material;

c) patterning and flowing the photoresist material to form a desired lens array on the spacer and planarization layer by applying heat; and

d) conformally coating the so formed lenses with a layer of a transparent conductor material.

Claims

1. A structure for preventing static charge from accumulating on the surface of an opto-electronic device such as a charge coupled image sensor comprising:

a) a layer of grounded transparent conductor material which prevents generation of and damage caused by static charge, the conductor material being disposed upon a lens which passes light to or from the opto-electronic device.

2. The structure of claim 1 wherein the transparent conductor material is indium tin oxide, antimony tin oxide or tin oxide.

3. In a method of forming an integral lens array on a light sensitive device defining a plurality of sensing elements, the lens array having a separate lens for each image sensing element, said lenses being substantially transparent over the wavelength range form 400 nm to 1000 nm comprising the steps of:

a) providing a spacer and planarization layer on the device over each sensing element;

b) applying a layer of photoresist material upon the spacer and planarization layer;

c) patterning and flowing the photoresist material to form a desired lens array on the spacer and planarization layer by applying heat;

d) conformally coating the so formed lens with a layer of transparent conductor oxide material; and

e) grounding said coating to form a material which prevents generation of, and damage caused by, static charge.

4. The method of claim 3 wherein such transparent conductor material is indium-tin oxide, antimony tin-oxide or tin oxide.