Valve

• US 5,120,019 A
• Filed: 05/16/1991
• Issued: 06/09/1992
• Est. Priority Date: 08/03/1989
• Status: Expired due to Term

• Current Assignee: Brooks Automation Incorporated (Azenta, Inc.)
• Original Assignee: Brooks Automation Incorporated (Azenta, Inc.)
• Inventors: Davis, James C. Jr.
• Primary Examiner(s): Fox, John C.
• Application Number:
  US07/701,512
• Time in Patent Office: 390 Days
• Field of Search: 251/193, 251/203, 251/204
• US Class Current: 251/193
• CPC Class Codes: F16K 3/184 by means of cams
• CPC Class Codes: F16K 51/02 specially adapted for high-vacuum installations

Abstract

Valve mechanism for high-vacuum clean environments, wherein a slot aperture is closed by a gage having a lever. Motion of the gate which covers and uncovers the slot is imparted to the gate by longitudinal movement of the lever. Motion of the gate which seals and unseals the slot is imparted by pivoting movement of the level about a fulcrum near the center of the lever. The pivoting movement is imparted at a time different from that at which the longitudinal movement is imparted, and the pivoting movement may be imparted by means separate from that which imparts the longitudinal movement.

Claims

1. A gate valve, comprising in combination a face plate adapted to form a boundary of a vacuum region and having an aperture to be sealed, a mountings plate supported substantially perpendicular to said face plate and having at least one access aperture closed by a flexible seal, a hinge block pivotally mounted on said mounting plate outside said vacuum region about a hinge axis in the vicinity of said access aperture, said hinge block including a bearing adapted to receive a rod therethrough so as to provide a fulcrum for pivot motion of said rod while permitting sliding motion of said rod within said bearing, a rod having a yoke mounted at one extremity thereof and laterally confined within said bearing and passing sealingly through said flexible seal, a gate member supported on said rod at the opposite extremity thereof in cooperative relationship with said aperture, means for imparting longitudinal movement to said yoke so as to move said gate member between a position covering said aperture and a position not covering said aperture, and means for imparting lateral movement to said yoke after said gate member is in said position covering said aperture so as to pivot said rod together with said hinge block about said hinge axis so as to move said gate member between a position sealing said aperture and a position not sealing said aperture.

2. Apparatus in accordance with claim 1, wherein said means for imparting longitudinal movement comprises a cam plate connected to said yoke by springs and means for driving said cam plate, and wherein said means for imparting lateral movement comprises a fixed backing mounted on said mounting plate and cam means on said cam plate, said yoke including a cam-means follower which is pushed by said cam means laterally as the cam means travels past said cam-means follower between said cam-means follower and said fixed backing.

3. Apparatus in accordance with claim 2 wherein said cam means is a cam and said cam-means follower is a cam follower.

4. Apparatus in accordance with claim 2 wherein said cam means is a wedge and said cam-means follower is a roller.

5. Apparatus in accordance with claim 4 wherein said wedge includes a recess adapted to receive and restrain said roller when said gate member is in a position sealing said aperture.

6. Apparatus in accordance with claim 5 including a shock absorber operatively mounted between said cam plate and said yoke to absorb shock caused by rapid longitudinal movement of said cam plate upon its release from said restraint.

7. Apparatus in accordance with claim 1, wherein said hinge block includes at least two bearings and wherein said valve includes at least two rods.

8. Apparatus in accordance with claim 1, wherein the conformality of said rod when said aperture is sealed is sufficient for flat contact between said gate and said face plate.

9. Apparatus in accordance with claim 4 wherein said rod has a tensile strength of 200 to 300 kpsi and an elasticity of 30×

10⁶ psi.