Two-step positioning device using Lorentz forces and a static gas bearing
First Claim
1. A positioning device comprising a carriage displaceable in at least two coordinate directions with respect to a base and intended for displacement of a table which is displaceable with respect to the carriage in said two coordinate directions, characterized in that, in operation, the table is coupled to the carriage solely by Lorentz forces of magnet systems and coil systems and occupies, viewed in a third coordinate direction transverse to said two coordinate directions, a position with respect to the carriage which is determined by a static gas bearing acting between the base and the table.
2 Assignments
0 Petitions
Accused Products
Abstract
A positioning device includes a table (101, 213) guided by a carriage (15, 199), the carriage (15, 199) being displaceable in two coordinate directions (X, Y) with respect to the base (3) and the table (101, 213) being displaceable with respect to the carriage (15, 199) in the same coordinate directions (X, Y) solely by Lorentz forces, while in a third coordinate direction (Z) the position of the table (101, 213) is determined by a static gas bearing. The two-step positioning device is particularly suitable for use in opto-lithographic devices.
88 Citations
4 Claims
- 1. A positioning device comprising a carriage displaceable in at least two coordinate directions with respect to a base and intended for displacement of a table which is displaceable with respect to the carriage in said two coordinate directions, characterized in that, in operation, the table is coupled to the carriage solely by Lorentz forces of magnet systems and coil systems and occupies, viewed in a third coordinate direction transverse to said two coordinate directions, a position with respect to the carriage which is determined by a static gas bearing acting between the base and the table.
Specification