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Accelerometer with central mass in support

  • US 5,121,180 A
  • Filed: 06/21/1991
  • Issued: 06/09/1992
  • Est. Priority Date: 06/21/1991
  • Status: Expired due to Fees
First Claim
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1. An accelerometer comprising:

  • a member of silicon semiconducting material having a central mass having a support disposed in a plane around the mass, having two spaced-apart portions of each of four rectilinearly disposed sides of the mass connected to the support by intervening beams, and having all other portions of the mass spaced from the support to resiliently mount the mass on the support for movement along an axis perpendicular to the plane of the support in response to acceleration force in the direction of the axis while opposing rotational movement of the mass and movement of the mass along other axes in response to other acceleration forces; and

    piezoresistive sensor means responsive to strain in selected beams during movement of the mass to provide an electrical output signal corresponding to acceleration force moving the mass along the axis perpendicular to the plane of the support.

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