Method of fabricating a photonics module comprising a spherical lens

• US 5,124,281 A
• Filed: 08/27/1990
• Issued: 06/23/1992
• Est. Priority Date: 08/27/1990
• Status: Expired due to Term

• Current Assignee: American Telephone & Telegraph Company (AT&T, Inc.)
• Original Assignee: AT&T, Inc.
• Inventors: Blonder, Greg E., Ackerman, David A., MacDonald, William M.
• Primary Examiner(s): Hearn, Brian E.
• Assistant Examiner(s): Fleck, Linda J.
• Application Number:
  US07/572,592
• Time in Patent Office: 666 Days
• Field of Search: 437/209, 357/74
• US Class Current: 438/27
• CPC Class Codes: G02B 6/4204 the coupling comprising intermediate optical elements, e.g. lenses, holograms encapsulated active devices H01S5/02208, H01L33/52
• CPC Class Codes: G02B 6/423 using guiding surfaces for the alignment
• CPC Class Codes: G02B 6/4232 using the surface tension of fluid solder to align the elements, e.g. solder bump techniques flip-chip mounting techniques in assembly of semiconductor devices H01L24/81
• CPC Class Codes: G02B 6/4234 Passive alignment along the optical axis and active alignment perpendicular to the optical axis
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
• CPC Class Codes: H01L 2924/01014 Silicon [Si]
• CPC Class Codes: H01S 5/02251 using optical fibres
• CPC Class Codes: H01S 5/02326 Arrangements for relative positioning of laser diodes and optical components, e.g. grooves in the mount to fix optical fibres or lenses
• CPC Class Codes: H01S 5/0683 by monitoring the optical output parameters

Abstract

A laser (15) is mounted on a planar surface of a monocrystalline silicon mounting member (12). A spherical lens (20) is mounted in a monocrystalline silicon cover member (13) which, when abutted and registered to the mounting member (12), aligns the spherical lens with the laser so that the output light can be projected along a precise predetermined path. The spherical lens (20) is mounted in a first V-shaped groove (31) which is made in the cover member by masking and etching. A second V-shaped groove intersects the first groove and defines a V-shaped edge in one side of the first groove. The spherical lens is then seated in the first V-shaped groove such that it bears against two points of the V-shaped edge and against one side wall (35) of the first V-shaped groove. A second lens (19) is mounted in the cover member in the same manner as the first lens and directs laser light from a rear facet of the laser to a mirror 30 and hence to a photodetector (21) mounted in the cover member.

Claims

1. A method for making an optical device comprising the steps of:

making in a first surface of a first member a first V-shaped groove having first and second side walls;

making in the first surface a second V-shaped groove which intersects the first groove and defines a first V-shaped edge in the first side wall of the first groove;

the first member being made of crystalline material and the first and second grooves being made by masking and anisotropic etching so as to have side walls defined by crystallographic planes;

seating a spherical lens in the first groove such that it bears against two points of the first V-shaped edge and against one point of the second side wall of the first V-shaped groove;

and permanently bonding the seated spherical lens to the first member, whereby the spherical lens is bonded at a location determined by the geometry of the first and second V-shaped grooves.

2. The method of claim 1 wherein:

the first member is made of crystalline material and the first and second grooves are made by masking and anisotropic etching.

3. The method of claim 2 further comprising the steps of:

mounting a photonic device on a second member so as to be in a predetermined relationship with a first surface of the second member;

abutting the first member against the second member and sealing together the first and second members, such that the spherical lens is in predetermined registration with the photonic device.

4. The method of claim 3 further comprising the step of:

making a cavity in the first member for receiving the photonic device.

5. The method of claim 4 wherein:

the first surface of the first member is abutted against the first surface of the second member to align the lens with the photonic device.

6. The method of claim 5 wherein:

the photonic device is a laser.

7. The method of claim 6 further comprising the steps of:

defining in the second member a reflecting surface;

and mounting on the first member a photodetector adapted to receive laser light reflected from the reflecting surface.

8. The method of claim 3 wherein:

the first member includes on a first surface at least one first bonding pad and the second member includes at least one second bonding pad;

and further comprising the step of texturing the first or second bonding pad, or both, the texturing having a feature size of between 0.1 and ten microns;

and wherein the abutting and sealing steps comprise the step of pressing together the first and second bonding pads with a sufficient force to cause them to bond.

9. The method of claim 8 wherein:

the step of texturing comprises the step of masking and anisotropically etching monocrystalline material to form triangular projections having side walls defined by crystallographic planes.

10. A method for making an optical device comprising the steps of:

mounting a lens on a first member such that the center of the lens is displaced a first predetermined distance from a first surface of the first member;

mounting a semiconductor laser having a light-emitting junction on a second member such that the junction is displaced a second predetermined distance from a first surface of the second member;

making at least one first bonding pad on the first surface of the first member and at least one second bonding pad on the first surface of the second member, the first surface of the first member, the first surface of the second member and the light-emitting junction of the laser all being parallel;

texturing the first or second bonding pads, or both, the texturing having a feature size of between 0.1 and ten microns;

and pressing together the first and second bonding pads with sufficient force to cause them to bond;

the locations of the lens and laser and the first and second predetermined distances being such as to permit alignment of the laser junction with the center of the lens.

11. The method of claim 10 wherein:

the first and second members are made of crystalline material;

and the texturing step comprises the step of photolithographic masking and etching, the etching being anisotropic and predominantly along crystal planes of the first or second member.

12. A method for making a photonics module comprising the steps of:

mounting a semiconductor laser having a light-emitting junction on a mounting member such that the junction is displaced a predetermined distance from a first surface of the mounting member;

mounting a spherical lens in a cover member such that the center of the lens is displaced a predetermined distance from a first surface of the cover member;

the lens mounting step comprising the steps of making in the first surface of the cover member a first V-shaped groove having first and second side walls, making in the first surface of the cover member a second V-shaped groove which intersects the first groove and defines a first V-shaped edge in the first side wall of the first groove, seating a spherical lens in the first groove such that it bears against two points of the first V-shaped edge and against one point of the second side wall of the first V-shaped groove, and permanently bonding the seated spherical lens to the first member;

making at least one first bonding pad on the first surface of the mounting member and at least one second bonding pad on the first surface of the cover member;

texturing the first or second bonding pads, or both, the texturing having a feature size of between 0.1 and ten microns;

and pressing together the first and second bonding pads with sufficient force to cause them to bond and to align the spherical lens with the junction of the laser.

13. The method of claim 12 further comprising the steps of:

defining in the mounting member a reflecting surface;

making in the cover member a first cavity adapted to receive the laser;

making in the cover member a second cavity and mounting within the second cavity a photodetector adapted to receive laser light reflected from the reflecting surface;

making in the first surface of the cover member a third V-shaped groove having first and second side walls;

making in the first surface of the cover member a fourth V-shaped groove which intersects the first groove and defines a second V-shaped edge in the first side wall of the third groove;

seating a second spherical lens in the third groove such that it bears against two points of the second V-shaped edge and against the second side wall of the third V-shaped groove;

permanently bonding the second spherical lens to the first member;

and abutting together the first surfaces of the cover member and the mounting member and sealing together the cover member and mounting member.

14. The method of claim 13 wherein:

the mounting member and the cover member are of a crystalline material;

the first surfaces of the cover member and the mounting member are defined by first crystallographic planes, and the side walls of the V-shaped grooves and the reflecting surface are defined by second crystallographic planes.

15. A method for making a photonics module comprising the steps of:

mounting a semiconductor laser having an emitting junction on a mounting member such that the emitting junction is displaced a predetermined distance from a first surface of the mounting member;

making in a second surface of a monocrystalline cover member a first cavity comprising the steps of masking and anisotropically etching the second surface such as to form the cavity with sloping sidewalls;

seating a spherical lens in the cavity such that it bears against opposite sidewalls thereof and has a center that is displaced a predetermined distance from the second surface of the cover member;

the direction of light emission from the laser-emitting junction and the first surface of the mounting member and the second surface of the cover member are all parallel;

and abutting the first surface of the mounting member against the second surface of the cover member such that the spherical lens is in predetermined registration with the emitting junction of the laser.

16. The method of claim 15 wherein:

the mounting member is of monocrystalline material; and

further comprising the steps of;

making in the mounting member a second cavity comprising the steps of masking and anisotropically etching the mounting member such that the second cavity has sloping sidewalls;

and mounting on the cover plate a photodetector adapted to receive laser light reflected from one of the sidewalls of the second cavity.

17. The method of claim 16 further comprising the steps of:

making in the second surface of the cover member a third cavity comprising the steps of masking and anisotropically etching the second surface such as to form a cavity with sloping sidewalls;

seating a second spherical lens in the third cavity such that it bears against opposite sidewalls thereof and has a center that is displaced a predetermined distance from the second surface of the cover member;

and after abutment of the cover member to the mounting member, the second lens is appropriately positioned to direct light from the laser against the reflecting surface of the second cavity.

18. The method of claim 17 further comprising the steps of:

metallizing the reflective surface of the second cavity to increase its reflectivity.

19. The method of claim 18 further comprising:

making in the cover member a fourth cavity for receiving the laser when the cover member and the mounting member are abutted.

20. The method of claim 19 wherein:

the first cavity and the third cavity are both made by etching intersecting V-shaped grooves in the cover member;

and both the first and second spherical lenses are seated at the intersection of V-shaped grooves.

21. A method for making an optical device comprising the steps of:

making in a first surface of a first member first, second, third, and fourth V-shaped grooves each having first and second side walls;

the second V-shaped groove intersecting the first groove and defining a first V-shaped edge in the first side wall of the first groove;

the fourth V-shaped groove intersecting the third groove and defining a second V-shaped edge in the first side wall of the third groove;

the first member being made of crystalline material, and the first, second, third, and fourth grooves are made by masking and anisotropic etching;

seating a first spherical lens in the first groove such that it bears against two points of the first V-shaped edge and against one point of the second wall of the first V-shaped groove;

seating a second spherical lens in the third groove such that it bears against two points of the second V-shaped edge and against the second side wall of the third V-shaped groove;

permanently bonding the first and second spherical lenses to the first member, whereby the first spherical lens is bonded at a location determined by the geometry of the first and second V-shaped grooves, and the second spherical lens is bonded at a location determined by the geometry of the third and fourth V-shaped grooves;

mounting a laser on a second member so as to be in a predetermined relationship with a first surface of the second member;

making a cavity in the first member for receiving the laser;

defining in the second member a reflecting surface;

mounting on the first member a photodetector adapted to receive light reflected from the reflecting surface;

and abutting the first surface of the first member against the first surface of the second member to align the first and second lenses with the laser.

22. The method of claim 21 wherein:

the second lens is positioned with respect to the laser such as to direct laser light to the photodetector by way of the reflecting surface.

23. The method of claim 22 wherein:

the first and second members are monocrystalline silicon;

the first and second surfaces are <

100>

surfaces, and the side walls of the V-shaped grooves and the reflecting surface are <

111>

surfaces.