Symmetric vertical MOS transistor with improved high voltage operation

• US 5,124,764 A
• Filed: 01/03/1991
• Issued: 06/23/1992
• Est. Priority Date: 10/21/1986
• Status: Expired due to Term

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: Mori, Kiyoshi
• Primary Examiner(s): LARKINS, WILLIAM
• Application Number:
  US07/635,423
• Time in Patent Office: 537 Days
• Field of Search: 357/23.4, 357/23.8, 357/68, 357/55, 357/23.1, 357/89
• US Class Current: 257/334
• CPC Class Codes: H01L 29/7827 Vertical transistors H01L29/7802, H01L29/78642 take precedence

Abstract

An MOS transistor having a vertical channel disposed along the sides of a trench is disclosed. The transistor is formed in an epitaxial layer on a substrate, with the channel region formed within the epitaxial layer by way of ion implantation and diffusion; the ion implantation is done in such a manner that the epitaxial layer is divided into a portion above the channel region (source region) and a portion below the channel region (drain region). A trench is etched to extend through the epitaxial region into the substrate, gate oxide is grown along the sides of the trench, and a polysilicon gate electrode is deposited adjacent the gate oxide along the walls of the trench. The epitaxial layer allows the drain and source regions of the transistor to have substantially equal carrier concentrations, said concentrations being relatively low. As a result, the transistor operates the same regardless of whether the upper portion of the epitaxial layer serves as the drain or as the source, for digital logic applications. In addition, the relatively light doping of the source and drain regions provides for a high diode breakdown voltage, and prevents punch-through of the channel region at high bias voltages.

Claims

1. A semiconductor insulated-gate field effect transistor, comprising:

A. a substrate of semiconductor material having a surface and being of a first conductivity-type;

B. a layer of semiconductor material formed on said surface of said substrate, said layer having a top face, and said layer formed to have a dopant of a second conductivity-type opposite said first conductivity-type of substantially uniform concentration throughout said layer;

C. a lower region formed in said layer and disposed within said layer substantially from said substrate surface upwardly to below said layer top face, said lower region having a peripheral boundary lateral of said layer and having a portion extending upwardly to said top face;

D. a middle channel region formed of part of said layer, said part containing a greater concentration of dopant of first conductivity type than the concentration of dopant of second conductivity type in said layer so as to cause said middle channel region to be of said first conductivity-type, said middle channel region disposed within said layer substantially from above a portion of said lower region upwardly to below said layer top face, said middle channel region having a first portion extending beyond said peripheral boundary of said lower region and extending downwardly to contact said substrate, and having a second portion extending upwardly to said top face;

E. an upper region formed in said layer and disposed within said layer from said middle channel region upwardly to about said top face, said upper region having a peripheral boundary lateral of said layer and said peripheral boundary being separated from said lower region by said middle channel region second portion;

F. a trench having sides formed through said layer through said lower, middle and upper regions and extending into said substrate;

G. an insulating layer of insulating material disposed along said trench and contacting said lower, middle and upper regions along the sides of said trench;

H. a conductive layer of conductive material formed on said insulating layer along the sides of said trench opposite said lower, middle and upper regions;

I. a first electrode connected to said lower region;

J. a second electrode connected to said upper region; and

K. a gate electrode connected to said conductive layer.

2. The transistor of claim 1 in which said lower and upper regions have impurity concentrations significantly lower than an impurity concentration of said middle region.

3. The transistor of claim 2 in which said lower and upper regions have impurity concentrations of about 3E15 electrons/cubic cm and said middle region having an impurity concentration of about 4E16 holes/cubic cm.

4. The transistor of claim 1 in which said layer of semiconductor material is an epitaxial layer.

5. The transistor of claim 1 in which said middle channel region is an implanted region within said layer of semiconductor material.

6. The transistor of claim 1 in which said layer of semiconductor material is no greater than about 1.2 microns thick.

7. The transistor of claim 6 in which said middle channel region between said lower and upper regions has a channel length of about 0.4 microns.

8. The transistor of claim 1 in which one of said upper and lower regions is a source and the other is a drain.

9. The transistor of claim 1 in which said upper region is a source and said lower region is a drain.

10. A semiconductor insulated-gate field effect transistor comprising:

A. a substrate of semicondutor material having a surface and being of a first conductivity-type;

B. a layer of semiconductor material formed on said surface of said substrate, said layer having a top face, and said layer formed to have a dopant of a second conductivity-type opposite of said first conductivity-type of substantially uniform concentration throughout said layer;

C. a middle channel region formed of part of said layer of semiconductor material, said part containing a greater concentration of dopant of first conductivity type than the concentration of dopant of second conductivity type in said layer so as to cause said middle channel region to be said first conductivity-type, said middle region having a channel portion below said top face and above said surface and having end portions extending downwardly to said substrate and upwardly to said top face, said middle channel region defining a lower region in said layer below said middle channel region, defining an upper region in said layer above said middle channel region, and separating said lower and upper regions from one another;

D. a trench having sides formed through said layer through said lower, middle and upper regions and extending into said substrate;

E. an insulating layer of insulating material disposed along said trench and contacting said lower, middle and upper regions along the sides of said trench;

F. a conductive layer of conductive material formed on said insulating layer along the sides of said trench opposite said lower, middle and upper regions;

G. a first electrode connected to said lower region;

H. a second electrode connected to said upper region; and

I. a gate electrode connected to said conductive layer.

11. The transistor of claim 10 in which said lower and upper regions have impurity concentrations significantly lower than an impurity concentration of said middle region.

12. The transistor of claim 11 in which said lower and upper regions have impurity concentrations of about 3E15 electrons/cubic cm and said middle region having an impurity concentration of about 4E16 holes/cubic cm.

13. The transistor of claim 10 in which said layer of semiconductor material is an epitaxial layer.

14. The transistor of claim 10 in which said middle channel region is an implanted region within said layer of semiconductor material.

15. The transistor of claim 10 in which said layer of semiconductor material is no greater than about 1.2 microns thick.

16. The transistor of claim 15 in which said middle channel region between said lower and upper regions has a channel length of about 0.4 microns.

17. The transistor of claim 10 in which one of said upper and lower regions is a source and the other is a drain.

18. The transistor of claim 10 in which said upper region is a source and said lower region is a drain.