Transferrable, self-supporting pellicle for elastomer light valve displays and method for making the same

• US 5,124,834 A
• Filed: 11/16/1989
• Issued: 06/23/1992
• Est. Priority Date: 11/16/1989
• Status: Expired due to Fees

• Current Assignee: Lockheed Martin Corporation (Martin Marietta Corporation)
• Original Assignee: General Electric Company
• Inventors: Lubowski, Stanley J., Cusano, Dominic A.
• Primary Examiner(s): LaRoche, Eugene R.
• Assistant Examiner(s): Lester, Evelyn A.
• Application Number:
  US07/437,422
• Time in Patent Office: 950 Days
• Field of Search: 350/362, 350/361, 350/360, 358/233, 358/232, 358/234, 359/290, 359/291, 359/292, 359/296
• US Class Current: 359/291
• CPC Class Codes: G02B 26/004 based on a displacement or a deformation of a fluid
• CPC Class Codes: G02B 26/0816 by means of one or more reflecting elements
• CPC Class Codes: H04N 9/3141 Constructional details thereof details not peculiar to the presence of an electronic spatial light modulator G03B21/14

Abstract

An elastomeric light valve has a substrate with a principal surface on which is formed a multiplicity of pixels; each pixel includes a first set of pixel electrodes interdigitated with a second set of pixel electrodes. A silicone elastomer gel is disposed over both the principal substrate surface and the two sets of pixel electrodes. At least one silicone/polycarbonate self-supporting pellicle is disposed substantially completely over the gel layer; the pellicle and elastomer gel layer are heat cured to improve the response of the layers to electrostatic forces induced in the light valve by control voltages applied during operation of the light valve. A layer of gold is disposed over the at least one pellicle and a layer of silver is disposed over the gold layer to provide an exposed specular surface which is easily deformed and resilient to transverse stresses. Address-lines are provided for applying control voltages to the first and second sets of pixel electrodes responsive to a video signal; a bias voltage is applied to the gold and silver layers to provide optimum light valve sensitivity at lower control voltages.

Claims

1. An elastomeric light valve, comprising:

a substrate having a surface;

a multiplicity of pixels formed on said substrate surface, each pixel comprising interdigitated first and second sets of pixel electrodes;

a layer of silicone elastomer gel disposed over said substrate surface and said first and second sets of pixel electrodes;

at least one self-supporting pellicle disposed substantially completely over said gel layer and formed of a silicone/polycarbonate material;

a conductive layer disposed substantially completely over and adhering to said at least one pellicle, a surface of said conductive layer closest to said substrate being chemically compatible with said at least one pellicle, and a surface of said conductive layer farthest from said substrate being a specular exposed surface;

means for selectively applying control voltages to said first and second sets of pixel electrodes; and

means for selectively applying a bias voltage to said conductive layer to improve the light valve deformability.

2. The light valve of claim 1, wherein the elastomer gel layer has a thickness between about 10-20 microns.

3. The light valve of claim 1, wherein the at least one pellicle has a total thickness between about 200-400 angstroms.

4. The light valve of claim 1, wherein said conductive layer comprises a first sublayer of gold disposed on the at least one pellicle and a second sublayer of silver disposed on said first sublayer of gold.

5. The light valve of claim 4, wherein said first sublayer of gold is about 200 angstroms thick and said second sublayer of silver is about 400 angstroms thick.

6. The light valve of claim 1, comprising, said at least one pellicle and said elastomer gel layer being heat cured to improve deformability of the light valve because of electrostatic forces.

7. The light valve of claim 1, further comprising a thin layer of insulation material disposed between said gel layer and said first and second sets of pixel electrodes.

8. An elastomeric light valve, comprising:

a substrate having a surface;

a multiplicity of pixels formed on said substrate surface, each pixel comprising interdigitated first and second sets of pixel electrodes;

a layer of silicone elastomer gel disposed over said substrate surface and said first and second sets of pixel electrodes;

at least two self-supporting pellicles disposed substantially completely over said elastomer gel layer, each of said pellicles having a thickness between about 200-400 angstroms and formed of a silicone/polycarbonate material;

a conductive layer disposed substantially completely over and adhering to an upper one of said pellicles, a surface of said conductive layer closest to said substrate being chemically compatible with said upper one of said pellicles, and a surface of said conductive layer farthest from said substrate being a specular exposed surface;

means for selectively applying control voltages to said first and second sets of pixel electrodes; and

means for selectively applying a bias voltage to said conductive layer to improve the light valve deformability.

9. An elastomeric light valve, comprising:

a substrate having a surface;

a multiplicity of pixels formed on said substrate surface, each pixel comprising interdigitated first and second sets of pixel electrodes;

a layer of silicone elastomer gel disposed over said substrate surface and said first and second sets of pixel electrodes;

at least one self-supporting pellicle disposed substantially completely over said gel layer, said at least one pellicle having a defect-free macromolecular structure with oppositely facing smooth surfaces formed by heat curing said at least one pellicle;

a conductive layer disposed substantially completely over and adhering to said at least one pellicle, a surface of said conductive layer closest to said substrate being chemically compatible with said at least one pellicle, and a surface of said conductive layer farthest from said substrate being a specular exposed surface;

means for selectively applying control voltages to said first and second sets of pixel electrodes; and

means for selectively applying a bias voltage to said conductive layer to improve the light valve deformability.

10. A elastomeric light valve, comprising:

a substrate having a surface;

a layer of metallization disposed on said substrate surface;

a layer of insulation material disposed on said metallization layer;

a multiplicity of pixels formed on said layer of insulation material, each pixel comprising interdigitated first and second sets of pixel electrodes;

a layer of silicone elastomer gel disposed over said substrate surface and said first and second sets of pixel electrodes;

at least one self-supporting pellicle disposed substantially completely over said gel layer;

a conductive layer disposed substantially completely over and adhering to said at least one pellicle, a surface of said conductive layer closest to said substrate being chemically compatible with said at least one pellicle, and a surface of said conductive layer farthest from said substrate being a specular exposed surface;

means for selectively applying control voltages to said conductive layer to improve the light valve deformability.

11. A method of making a light valve, comprising the steps of:

(a) providing a substrate with a surface;

(b) depositing a first layer of metallization on the substrate surface;

(c) etching the first metallization layer to form a multiplicity of pixels, each pixel comprising interdigitated first and second sets of pixel electrodes;

(d) depositing a silicone elastomer gel layer over the substrate surface and the first and second sets of pixel electrodes;

(e) depositing at least one self-supporting pellicle over the elastomer gel layer;

(f) heat curing the elastomer gel layer and the at least one pellicle to improve deformability of the light valve when an electrostatic force is applied thereto; and

(g) depositing at least one conductive layer substantially completely over and adhering to the at least one pellicle, a layer closest to the substrate being chemically compatible with the at least one pellicle, and a layer furthest from the substrate having a specular exposed surface.

12. The method of claim 11, wherein step (e) includes the steps of:

(1) forming a mixture of dimethyl siloxane and bisphenol-A polycarbonate in selected proportions;

(2) dispersing the mixture of step (1) in trichloropropane solvent to form a solution;

(3) depositing a drop of the step (2) solution onto a distilled water surface;

(4) allowing the trichloropropane solvent to evaporate to form a film on the distilled water surface;

(5) removing the film from the distilled water;

(6) heat curing the film at a selected temperature for a selected duration; and

(7) placing the cured film on the gel layer.

13. The method of claim 12, wherein step (1) comprises mixing about 57% by weight dimethyl siloxane with about 43% by weight bisphenol-A polycarbonate.

14. The method of claim 13, wherein step (2) comprises the step of diluting the mixture of step (1) to about 5% by weight in trichloropropane solvent.

15. The method of claim 12, wherein step (6) is accomplished at a temperature of about 70°

C. for between about 2 and about 5 minutes.

16. The method of claim 11, wherein step (f) is accomplished at a temperature between about 38°

C. and about 65°

C. for about 2 hours.

17. The method of claim 11, wherein the elastomer gel layer is about 10 to 20 microns thick.

18. The method of claim 11, wherein the at least one pellicle is about 200 to 400 angstroms thick.

19. The method of claim 11, wherein step (g) comprises the steps of:

depositing a first layer of gold over the at least one pellicle; and

depositing a second layer of silver over the gold layer.

20. The method of claim 19, wherein the gold layer is about 200 angstroms thick and the silver layer is about 400 angstroms thick.

21. The method of claim 11, wherein step (g) comprises the step of depositing a layer of silver over the at least one pellicle.