Integrated optical arrangement having at least one optical waveguide integrated on a substrate of a semiconductor material and the method of manufacture
First Claim
1. In an integrated optical arrangement comprising at least one strip-shaped optical waveguide integrated on a substrate of semiconductor material, the improvements comprising said waveguide being a rib waveguide defined by a waveguiding layer of the substrate and a rib of semiconductor material being formed above this layer, said waveguiding layer being a material selected from a group consisting of undoped materials and n-doped materials, said arrangement including a junction between a p-doped material and a non-p-doped material being integrated in the region of the rib waveguide, either above or below the waveguiding layer, said junction being arranged at a distance from the waveguiding layer with the p-doped material of the junction being arranged on a side of the junction facing away from the waveguiding layer, said arrangement including means for contacting said junction from the outside.
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Abstract
An integrated optical arrangement having at least one optical waveguide integrated a substrate of semiconductor material, characterized by the waveguide being a rib waveguide comprising the p-doped material disposed on a substrate which contains a waveguiding layer which is either an n-doped or an undoped material, said arrangement having either a pn or a pin junction between the p-doped material of the rib and the n-doped or undoped material of the waveguiding layer. In addition, a method for forming the various layer is disclosed.
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Citations
8 Claims
- 1. In an integrated optical arrangement comprising at least one strip-shaped optical waveguide integrated on a substrate of semiconductor material, the improvements comprising said waveguide being a rib waveguide defined by a waveguiding layer of the substrate and a rib of semiconductor material being formed above this layer, said waveguiding layer being a material selected from a group consisting of undoped materials and n-doped materials, said arrangement including a junction between a p-doped material and a non-p-doped material being integrated in the region of the rib waveguide, either above or below the waveguiding layer, said junction being arranged at a distance from the waveguiding layer with the p-doped material of the junction being arranged on a side of the junction facing away from the waveguiding layer, said arrangement including means for contacting said junction from the outside.
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8. A method of forming an integrated optical arrangement having at least one strip of optical waveguide integrated on the substrate of a semiconductor material, said waveguide being a rib waveguide defined by a rib of p-doped material being disposed on a substrate of n-doped material, said substrate of n-doped material having a waveguiding layer spaced from the rib of p-doped material, and said waveguide having a junction between the p-doped material and the n-doped material, said method comprising the steps of providing a substrate of n-doped semiconductor material, forming a waveguiding layer of a material selected from a group consisting of n-doped and undoped materials on a surface of the substrate, providing a spacer layer on said waveguiding layer, said spacer layer being selected from said group of materials, providing a p-doped layer on said spacer layer, removing portions of said p-doped layer down to said spacer layer to form a rib for each waveguide, covering said rib with an electrically insulating layer, forming a contact window in said insulating layer adjacent each rib, forming electrical contacts on said insulating layer engaging said rib through said window, and applying a second electrode on a surface of the substrate opposite said ribs.
Specification