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High resolution piggyback linear motor design for placement systems and the like

  • US 5,126,648 A
  • Filed: 03/22/1990
  • Issued: 06/30/1992
  • Est. Priority Date: 03/22/1990
  • Status: Expired due to Fees
First Claim
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1. A high precision placement system comprising:

  • first mounting means including first reference surface means;

    first two-dimensional positioning means movable along said first reference surface means for positioning said first positioning means in a coarse manner relative to said first reference surface means;

    second mounting means including second reference surface means, mounted upon said first two-dimensional positioning means;

    second two-dimensional positioning means movable relative to said second reference surface means for positioning said second positioning means relative to said second reference surface means and hence relative to said first reference surface means, said second two-dimensional positioning means having a higher resolution than said first two-dimensional positioning means.

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