Electronic component and a method for manufacturing the same
First Claim
1. An electronic component comprising a dielectric layer, a metal oxide semiconductor layer as a photosensitive material formed on the dielectric layer, and a first and a second electrodes interposing the dielectric layer and the metal oxide semiconductor layer.
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Accused Products
Abstract
An electronic component such as a capacitor having a pair of electrodes interposing a dielectric layer and a photosensitive metal oxide semiconductor layer therebetween. The electronic component is formed by immersing the layered body of one electrode, the dielectric, and the metal oxide layer in an electroless plating catalytic solution to have the catalyst deposited on the metal oxide layer and then by forming an electrode on the catalyst layer. The catalyst can be deposited in a pattern by irradiating the metal oxide layer with light during immersing the body in the catalytic solution.
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Citations
28 Claims
- 1. An electronic component comprising a dielectric layer, a metal oxide semiconductor layer as a photosensitive material formed on the dielectric layer, and a first and a second electrodes interposing the dielectric layer and the metal oxide semiconductor layer.
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17. A method for manufacturing an electronic component comprising the steps of:
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forming a dielectric layer and a metal oxide semiconductor layer as a photosensitive material on an electrode substrate in this order; immersing the layered substrate in an electroless plating catalytic solution so as to deposit the electroless plating catalyst on the metal oxide semiconductor layer; and forming an electrode on the deposited catalyst. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25)
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26. A method for manufacturing an electronic component comprising the steps of:
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forming a dielectric layer and a metal oxide semiconductor layer as a photosensitive material on an electrode substrate in this order; and immersing the layered substrate in an electroless plating solution containing a monomer under irradiation of light having energy greater than the band gap of the metal oxide semiconductor layer through a mask having a pattern so as to deposit a conductive polymer on a predetermined portion of the metal oxide semiconductor layer. - View Dependent Claims (27, 28)
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Specification