System for irradiating a surface with atomic and molecular ions using two dimensional magnetic scanning

• US 5,132,544 A
• Filed: 08/29/1990
• Issued: 07/21/1992
• Est. Priority Date: 08/29/1990
• Status: Expired due to Term

• Current Assignee: Nissin Ion Equipment Co., LTD. (Nissin Electric Company Limited)
• Original Assignee: Nissin Electric Company Limited
• Inventors: Glavish, Hilton F.
• Primary Examiner(s): Berman, Jack I.
• Application Number:
  US07/575,498
• Time in Patent Office: 692 Days
• Field of Search: 250/492.21, 250/492.2, 250/492.3, 250/398, 335/213, 335/210
• US Class Current: 250/492.2
• CPC Class Codes: G21K 1/093 by magnetic means
• CPC Class Codes: H01F 3/02 made from sheets
• CPC Class Codes: H01F 7/202 Electromagnets for high magnetic field strength for superconducting electromagnets H01F6/00; for transformers or inductances without a magnetic core H01F30/08
• CPC Class Codes: H01J 29/76 Deflecting by magnetic fields only
• CPC Class Codes: H01J 3/32 by magnetic fields only
• CPC Class Codes: H01J 37/147 Arrangements for directing or deflecting the discharge along a desired path H01J37/045 take precedence; lenses H01J37/10
• CPC Class Codes: H01J 37/1475 magnetic
• CPC Class Codes: H01J 37/3171 for ion implantation plasma immersion ion implantation H01J37/32412

Abstract

System for irradiating the surface of a substrate with atomic or molecular ions by rapid scanning of a beam in two dimensions over the surface of the substrate. A scanning system is shown for deflecting the beam in two dimensions relative to a reference axis and a magnetic ion beam transport system following the scanning system is arranged to receive the beam from the scanning system over the range of two dimensional deflections of the scanning system and constructed to impose magnetic field conditions along the beam path of characteristics selected to reorient the two-dimensionally deflected beam to a direction having a predetermined desired relationship with the axis in the two dimensions at the desired instantaneous two dimensional displacement of the beam from the axis, to produce the desired scan of the beam over the substrate. One scanning system includes sequential first and second time-variable-field magnetic scanners, the first scanner having a magnetic gap of volume smaller than that of the second scanner and constructed to scan the beam more rapidly than the second scanner. In another system, the scanners are superposed. The magnetic ion beam transport system presently preferred is a system producing a sequence of three or more quadrupole fields, implemented by a sequence of quadrupoles. Alternate structures are disclosed. The system is capable of depositing atomic or molecular ions with a desired angular and positional uniformity over a wide range of perveance including perveance above 0.02/M[amu]^1/2 (mA//keV^3/2) with a constant, adjustable spot size and small beam spread.

Claims

1. An ion implantation system for doping a substrate, by irradiating a surface of the substrate with atomic or molecular ions by rapid scanning of a beam in two dimensions over the substrate, the system including:

an end station for presenting a substrate to the ion beam,

an ion source and associated beam-forming devices for producing a beam of atomic or molecular ions,

a magnetic scanning system for deflecting the ion beam in two dimensions relative to a reference axis, said scanning system employing, for each dimension of scan, a single respective scanning magnet means formed of a yoke and pole means of magnetic material and associated energizing coils,

and a magnetic ion beam transport system following the scanning system and preceding said end station, said transport system arranged to determine the angular relationship with which ions reach and are implanted into said substrate at said end station,

said transport system arranged to receive the beam from the scanning system over the range of two dimensional deflections of said scanning system and constructed to impose static magnetic field conditions along the beam path of characteristics selected to reorient the two-dimensionally deflected beam to an implanting direction having a predetermined desired angular relationship with the axis in each of said two dimensions at the desired instantaneous two dimensional displacement of the beam from the axis, to produce the desired scan of the beam over the substrate.

2. The system of claim 1 wherein said magnetic scanning means, for at least one dimension of said scan, is constructed to scan the beam over the surface of said substrate at a frequency greater than 100 Hz.

3. The system of claim 1 wherein said magnetic ion transport system has characteristics to reorient the two-dimensionally deflected beam in each dimension in dimensionally decoupled manner.

4. The system of claim 1 wherein said scanning system includes:

a first time-variable-field magnetic scanner for scanning the beam in the first dimension, and located axially downstream therefrom,

a second time-variable-field magnetic scanner magnetically uncoupled from said first scanner for scanning the beam in the second dimension,

the scanners effective at each instant to deflect the beam from said reference axis in a decoupled manner at respective angles in the respective dimensions that are determined by the desired instantaneous displacement of the beam on the substrate.

6. The system of claim 4 or 5 wherein the second scanner is located closely adjacent said first scanner without any beam-influencing optical element interposed therebetween.

7. The system of claim 4 or 5 wherein said first scanner is constructed to operate at a scanning frequency of the order of about ten times higher than, and not a rational multiple of, the scanning frequency of said second scanner.

8. The system of claim 4 or 5 constructed to provide a ribbon-form ion beam to said scanning system, the shorter dimension of the cross section of said ribbon being aligned with the direction of the thickness of the gap of said first scanner.

9. The system of claim 1 wherein scanner coils and associated magnetic circuits effective to generate fields to deflect the beam in decoupled manner in both dimensions are located in the same general vicinity along the beam path.

10. The system of claim 9 comprising a circular iron yoke, a multiplicity of poles distributed about and extending inwardly toward the axis of said yoke, and respective, separate x and y dimension deflection coils associated with said poles.

11. The system of claim 1, 4, 5, 9 or 10 wherein said beam-forming devices form a conjugate ion optical image of said ion source and said scanner system is positioned in the region of said image to keep relatively small the magnetic gaps of said scanning system.

12. The system of claim 1, 4, 5, 9 or 10 wherein poles and yoke structure of the magnetic scanning system are comprised of insulated laminations of magnetic material of thickness less than 1 mm.

13. The system of claim 12 wherein the thickness of said laminations is of the order of 0.5 mm.

14. The system of claim 1, 4, 5, 9 or 10 wherein said ion beam transport system comprises a solenoid system.

15. The system of claim 1, 4, 5, 9 or 10 wherein said scanning system further includes a power amplifier constructed to excite magnetic coils of said scanning system with desired substantially triangular current excitation waveforms.

16. The system of claim 15 wherein said power amplifier is constructed to produce a square voltage waveform that results in a substantially linear change of current applied to said scanning system over about 80% of half of a scan cycle.

17. The system of claim 1, 4, 5, 9 or 10 wherein the scanning system is constructed to deflect the beam in one dimension at a scan frequency of the order of 1000 Hz or higher and in the other dimension at a scan frequency of the order of 50 Hz or higher.

18. The system of claim 1, 4, 5, 9 or 10 constructed to enable scanning of beams over a wide range of perveance including perveances both substantially above and substantially below 0.02/M[amu]^1/2 (mA/keV^3/2).

19. The system of claim 18 constructed to enable scanning of beams having high beam currents such as an arsenic beam of about 20 mA at low energies from 100 keV down to about 5 keV.

20. The system of claim 18 constructed to enable scanning of beams having high beam currents in the range of 10 to 20 mA at high energies of the order of 100 to 400 keV.

21. The system of claim 18 constructed to operate as an ion implanter for implantation of ions in a wafer including ions of boron, phosphorous, arsenic and antimony.

22. The system of claim 21 constructed to scan over an area having up to a 12 inch diameter.

23. The system of claim 21 constructed to produce a beam diameter of about 10 to 80 mm at the substrate.

24. The system of claim 23 constructed to complete multiple scans over a wafer up to 12 inches diameter such that an irradiation uniformity of better than 0.5% over the entire wafer is achieved in less than 10 seconds.

25. The system of claim 1, 4, 5, 9 or 10 including power amplifier means for driving a magnetic scanner of said scanning system, said power amplifier means producing a characteristic voltage ripple, the scan frequency of said scanner selected not to be a rational multiple of said characteristic voltage ripple.

26. The system of claim 1, 4, 5, 9 or 10 wherein said ion beam transport system includes a scanner system constructed to produce a raster scan.

27. The system of claim 1, 4, 5, 9 or 10 wherein said magnetic ion beam transport system includes a scanner system constructed to produce a rotating raster scan.

28. The system of claim 1, 4, 5, 9 or 10 wherein said ion beam transport system includes a scanner system constructed to produce a Lissajous motion.

5. System for depositing atomic or molecular ions with a desired uniformity by rapid scanning of a beam over a wide range of perveance including perveance above 0.02/M[amu]^1/2 (mA/keV^3/2) over the surface of a substrate, the system including:

an end station supporting the substrate,

an ion source for producing a beam of atomic or molecular ions,

beam forming devices for producing a beam of atomic or molecular ions including a momentum analyzer for removing, from the beam, ions of unwanted momentum and an accelerator for establishing the desired final velocity of the ions,

a magnetic scanning system for deflecting the beam in two dimensions relative to a reference axis;

said scanning system including;

first and second time-variable-field magnetic scanners in first and second positions along the axis of the system for successively deflecting the beam in respective dimensions, the first scanner constructed to rapidly scan the beam in the first dimension, said first scanner having a magnetic gap through which the beam passes of volume smaller than the volume of the magnetic gap of said second scanner and constructed to scan the beam more rapidly than the second scanner,

the scanners effective at each instant to deflect the beam from said reference axis in a decoupled manner at respective angles in the respective dimensions that are determined by the desired instantaneous displacement of the beam on the substrate;

each of said magnetic scanners comprised of yoke and pole means of magnetic material and associated energizing coils,

and each having a respective deflection circuit and power supply for applying time-varying current to said coil,

and a magnetic ion beam transport system following the scanners,

said transport system arranged to receive the beam from the scanners over the range of two dimensional deflections of said scanners and constructed to impose static magnetic field conditions along the beam path of characteristics selected to reorient the two-dimensionally deflected beam in a dimensionally decoupled manner, to a direction having a predetermined desired angular relationship with the axis in said two directions at the desired instantaneous two dimensional displacement of the beam from the axis, to produce the desired scan of a beam spot of finite ion-distributing size over the substrate,

said magnetic ion beam transport system constructed to provide at the substrate a beam of substantially constant beam size at said substrate in which directions of travel of the ions deviate by less than about 2°

from a desired direction over the range of scan.

29. System for irradiating a surface of a substrate with atomic or molecular ions by rapid scanning of a beam in two dimensions over the substrate, the system including:

an end station for presenting a substrate to the beam,

an ion source and associated beam-forming devices for producing a beam of atomic or molecular ions,

a magnetic scanning system for deflecting the beam in two dimensions relative to a reference axis, said system employing, for each dimension of scan, a single scanning magnet means formed of a yoke and pole means of magnetic material and associated energizing coils,

and a magnetic ion beam transport system following the scanning system,

said transport system arranged to receive the beam from the scanning system over the range of two dimensional deflections of said scanning system and constructed to impose magnetic field conditions along the beam path of characteristics selected to reorient the two-dimensionally deflected beam to a direction having a predetermined desired angular relationship with the axis in said two dimensions at the desired instantaneous two dimensional displacement of the beam from the axis, to produce the desired scan of the beam over the substrate, and wherein said scanning system includes;

a first time-variable-field magnetic scanner for scanning the beam in the first dimension, and located axially downstream therefrom,

a second time-variable-field magnetic scanner magnetically uncoupled from said first scanner for scanning the beam in the second dimension,

the scanners effective at each instant to deflect the beam from said reference axis in a decoupled manner at respective angles in the respective dimensions that are determined by the desired instantaneous displacement of the beam on the substrate,

and wherein the gap of said second scanner diverges in the axial direction in manner and direction corresponding to the divergence of the deflection envelope produced by the first scanner, while the width (direction perpendicular to the gap) of the poles of said second magnetic scanner correspondingly increases progressively in the axial direction.

30. System for irradiating a surface of a substrate with atomic or molecular ions by rapid scanning of a beam in two dimensions over the substrate, the system including:

an end station for presenting a substrate to the beam,

an ion source and associated beam-forming devices for producing a beam of atomic or molecular ions,

a magnetic scanning system for deflecting the beam in two dimensions relative to a reference axis, said system employing, for each dimensions of scan, a single scanning magnet means formed of a yoke and pole means of magnetic material and associated energizing coils,

and a magnetic ion beam transport system following the scanning system,

said transport system arranged to receive the beam from the scanning system over the range of two dimensional deflections of said scanning system and constructed to impose magnetic field conditions along the beam path of characteristics selected to reorient the two-dimensionally deflected beam to a direction having a predetermined desired angular relationship with the axis in said two dimensions at the desired instantaneous two dimensional displacement of the beam from the axis, to produce the desired scan of the beam over the substrate,

wherein scanner coils and associated magnetic circuits effective to generate fields to deflect the beam in decoupled manner in both dimensions are located in the same general vicinity along the beam path,

the magnetic scanning system comprising a circular iron yoke, a multiplicity of poles distributed about and extending inwardly toward the axis of said yoke, and respective, separate x and y dimension deflection coils associated with said poles, and

wherein the windings of the coils on the poles for the respective deflection directions vary in number according to the angular position of said poles relative to the respective deflection axis, and means to connect the respective sets of coils in series to be driven by a single, respective energization current for deflection in the respective dimension.

31. System for irradiating a surface of a substrate with atomic or molecular ions by rapid scanning of a beam in two dimensions over the substrate, the system including:

an end station for presenting a substrate to the beam,

an ion source and associated beam-forming devices for producing a beam of atomic or molecular ions,

a magnetic scanning system for deflecting the beam in two dimensions relative to a reference axis, said system employing, for each dimension of scan, a single scanning magnet means formed of a yoke and pole means of magnetic material and associated energizing coils,

and a magnetic ion beam transport system following the scanning system,

said transport system arranged to receive the beam from the scanning system over the range of two dimensional deflections of said scanning system and constructed to impose magnetic field conditions along the beam path of characteristics selected to reorient the two-dimensionally deflected beam to a direction having a predetermined desired angular relationship with the axis in said two dimensions at the desired instantaneous two dimensional displacement of the beam from the axis, to produce the desired scan of the beam over the substrate,

wherein said ion beam transport system is an electromagnet system for establishing static magnetic fields capable of effecting a linear transformation of the two-dimensionally deflected beam such that the final position and angle at which the beam impinges on the target is a linear function of the angular direction and displacement of the beam entering the ion beam transport system.

32. The system of claim 31 wherein said magnetic ion beam transport system is constructed to impose static magnetic field conditions along the beam path sufficient to produce a beam of ions such that the angular direction of each ion deviates by less than about 2°

from the desired direction over the range of scan.

33. The system of claim 31 wherein said magnetic ion transport system has adjustable parameters for adjusting the angle of said beam upon said substrate over a range of diverging, parallel and converging values.

34. The system of claim 33 wherein said magnetic ion beam transport system imposes static magnetic field conditions to produce a beam that is parallel with said reference axis in said two dimensions.

35. The system of claim 31 wherein said magnetic ion beam transport system is constructed to impose static magnetic field conditions along the beam path to produce a beam that has a substantially constant ion-distributing spot size at said substrate over the range of scan.

36. The system of claim 35 wherein said magnetic ion transport system has adjustable parameters for adjusting the size of said beam at said substrate.

37. System for irradiating a surface of a substrate with atomic or molecular ions by rapid scanning of a beam in two dimensions over the substrate, the system including:

an end station for presenting a substrate to the beam,

an ion source and associated beam-forming devices for producing a beam of atomic or molecular ions,

a magnetic scanning system for deflecting the beam in two dimensions relative to a reference axis, said system employing, for each dimension of scan, a single scanning magnet means formed of a yoke and pole means of magnetic material and associated energizing coils,

and a magnetic ion beam transport system following the scanning system,

said transport system arranged to receive the beam from the scanning system over the range of two dimensional deflections of said scanning system and constructed to impose magnetic field conditions along the beam path of characteristics selected to reorient the two-dimensionally deflected beam to a direction having a predetermined desired angular relationship with the axis in said two dimensions at the desired instantaneous two dimensional displacement of the beam from the axis, to produce the desired scan of the beam over the substrate, wherein said scanning system includes;

a first time-variable-field magnetic scanner for scanning the beam in the first dimension, and located axially downstream therefrom,

a second time-variable-field magnetic scanner magnetically uncoupled from said first scanner for scanning the beam in the second dimension,

the scanners effective at each instant to deflect the beam from said reference axis in a decoupled manner at respective angles in the respective dimensions that are determined by the desired instantaneous displacement of the beam on the substrate, and

wherein said ion beam transport system comprises multiple, axially spaced-apart static magnetic field-imposing elements constructed to enable accommodation of the different axial positions of said scanners while producing linear transformation of the deflected beam to the desired angular relationship and displacement of the beam.

38. The system of claim 37 wherein said magnetic ion beam transport system includes means to apply at least one static quadrupole field followed by second magnetic means applying static magnetic fields effective in the two dimensions of deflection.

39. The system of claim 37 wherein said magnetic ion beam transport system includes means to apply, in sequence, at least three quadrupole fields of alternating polarity.

40. The system of claim 39 wherein said magnetic ion beam transport system comprises at least three quadrupole magnets in sequence.

41. The system of claim 39 wherein said magnetic ion beam transport system comprises a bending magnet having at least three differing sections along its length constructed to produce respective quadrupole fields of alternating polarity.

42. The system of claim 39 wherein the x and y dimension object points of said quadrupole field system occur respectively at the x and y dimension magnetic scanners in the manner to satisfy telecentric conditions.

43. The system of claim 39 wherein the parameters of said quadrupole fields are adjustable to change the ion-distributing spot size of the beam spot size at the substrate which then remains substantially constant over the scan.

44. The system of claim 39 wherein the parameters of said quadrupole system are adjustable to vary the beam angle at said substrate over a range of convergent, parallel and divergent relationships, with the selected relationship being maintained over the scan.

45. The system of claim 38 wherein said second magnetic means comprises a solenoid means.

46. The system of claim 45 wherein said solenoid means comprises adjacent solenoids of opposite polarity.

49. The system of claim 46 wherein said solenoid system comprises a pair of solenoids having opposite current flows, whereby the second solenoid compensates for rotation of said beam by said first solenoid.

50. The system of claim 49 wherein the magnitudes of currents in said solenoids are equalized to prevent rotation of said beam.

89. The system of claim 42 or 88 wherein said ion beam transport system has three quadrupoles, quad 1, quad 2 and quad 3 respectively, located, in succession, substantially as set forth in the following table:

space="preserve" listing-type="tabular">______________________________________ Quadrupole Parameters ______________________________________ Locations Along the z-axis (m);

`x` Object Point to Quad 1 Entrance (p) 0.25 `y` Object Point to Quad 1 Entrance (q) 0.55 Effective Length Quad 1 0.36 Spacing Quad 2 to 3 0.10 Effective Length Quad 3 0.60 Spacing Quad 2 to 3 0.07 Effective Length Quad 3 0.36 Exit of Quad 3 to Wafer 0.25 `y` Object Point to Wafer 2.29 Quad 1 Parameters for 200 keV As.sup.+ Ions;

Aperture Diameter (mm) 200 Width (mm) 690 Pole Tip Field (T) 0.198 Total Coil Power (kW) 1.9 Quad 2 Parameters for 200 keV As.sup.+ Ions;

Aperture Diameter (mm) 280 Width (mm) 1000 Pole Tip Field (T) 0.321 Total Coil Power (kW) 7.8 Quad 3 Parameters for 200 keV As.sup.+ Ions;

Aperture Diameter (mm) 240 Width (mm) 820 Pole Tip Field (T) 0.243 Total Coil Power (kW) 3.1 Transfer Matrix Elements from Entrance of Quad 1 to Target Substrate M.sub.11 0.042 M.sub.12 (mm/mrad) 0.756 M.sub.21 (mrad/mm) -1.305 M.sub.22 0.326 M.sub.33 0.087 M.sub.34 (mm/mrad) 2.153 M.sub.43 (mrad/mm) -0.454 M.sub.44 0.250 ______________________________________

47. System for irradiating a surface of a substrate with atomic or molecular ions by rapid scanning of a beam in two dimensions over the substrate, the system including:

an end station for presenting a substrate to the beam,

an ion source and associated beam-forming devices for producing a beam of atomic or molecular ions,

a magnetic scanning system for deflecting the beam in two dimensions relative to a reference axis, said system employing, for each dimension of scan, a single scanning magnet means formed of a yoke and pole means of magnetic material and associated energizing coils,

and a magnetic ion beam transport system following the scanning system,

said transport system arranged to receive the beam from the scanning system over the range of two dimensional deflections of said scanning system and constructed to impose magnetic field conditions along the beam path of characteristics selected to reorient the two-dimensionally deflected beam to a direction having a predetermined desired angular relationship with the axis in said two dimensions at the desired instantaneous two dimensional displacement of the beam from the axis, to produce the desired scan of the beam over the substrate,

wherein said ion beam transport system comprises a solenoid system and wherein said solenoid system has multiple solenoids, the currents in said solenoids being controlled to control beam rotation.

48. The system of claim 47 further including means to adjust currents of said solenoids relative to each other to provide a desired, controlled amount of rotation.

51. System for irradiating a surface of a substrate with atomic or molecular ions by rapid scanning of a beam in two dimensions over the substrate, the system including:

an end station for presenting a substrate to the beam,

an ion source and associated beam-forming devices for producing a beam of atomic or molecular ions,

a magnetic scanning system for deflecting the beam in two dimensions relative to a reference axis, said system employing, for each dimension of scan, a single scanning magnet means formed of a yoke and pole means of magnetic material and associated energizing coils,

and a magnetic ion beam transport system following the scanning system,

said transport system arranged to receive the beam from the scanning system over the range of two dimensional deflections of said scanning system and constructed to impose magnetic field conditions along the beam path of characteristics selected to reorient the two-dimensionally deflected beam to a direction having a predetermined desired angular relationship with the axis in said two dimensions at the desired instantaneous two dimensional displacement of the beam from the axis, to produce the desired scan of the beam over the substrate,

wherein said ion beam transport system comprises a solenoid system,

and wherein said scanning system comprises first and second scanners that are located at different axial positions and said ion beam transport system further comprises a magnetic device to superimpose the virtual objects of the x and y dimension rays presented to said solenoid system.

52. System for irradiating a surface of a substrate with atomic or molecular ions by rapid scanning of a beam in two dimensions over the substrate, the system including:

an end station for presenting a substrate to the beam,

an ion source and associated beam-forming devices for producing a beam of atomic or molecular ions,

a magnetic scanning system for deflecting the beam in two dimensions relative to a reference axis, said system employing, for each dimension of scan, a single scanning magnet means formed of a yoke and pole means of magnetic material and associated energizing coils,

and a magnetic ion beam transport system following the scanning system,

said transport system arranged to receive the beam from the scanning system over the range of two dimensional deflections of said scanning system and constructed to impose magnetic field conditions along the beam path of characteristics selected to reorient the two-dimensionally deflected beam to a direction having a predetermined desired angular relationship with the axis in said two dimensions at the desired instantaneous two dimensional displacement of the beam from the axis, to produce the desired scan of the beam over the substrate, wherein said ion beam transport system comprises a solenoid system and

wherein scanners for the first and second dimensions are substantially superimposed and said ion beam transport system comprises solely solenoid means.

53. System for irradiating a surface of a substrate with atomic or molecular ions by rapid scanning of a beam in two dimensions over the substrate, the system including:

an end station for presenting a substrate to the beam,

an ion source and associated beam-forming devices for producing a beam of atomic or molecular ions,

a magnetic scanning system for deflecting the beam in two dimensions relative to a reference axis, said system employing, for each dimension of scan, a single scanning magnet means formed of a yoke and pole means of magnetic material and associated energizing coils,

and a magnetic ion beam transport system following the scanning system,

said transport system arranged to receive the beam from the scanning system over the range of two dimensional deflections of said scanning system and constructed to impose magnetic field conditions along the beam path of characteristics selected to reorient the two-dimensionally deflected beam to a direction having a predetermined desired angular relationship with the axis in said two dimensions at the desired instantaneous two dimensional displacement of the beam from the axis, to produce the desired scan of the beam over the substrate, and

wherein said magnetic ion beam transport system for imposing magnetic fields comprises a bending magnet followed by a quadrupole.

54. System for irradiating a surface of a substrate with atomic or molecular ions by rapid scanning of a beam in two dimensions over the substrate, the system including:

an end station for presenting a substrate to the beam,

an ion source and associated beam-forming devices for producing a beam of atomic or molecular ions,

a magnetic scanning system for deflecting the beam in two dimensions relative to a reference axis, said system employing, for each dimension of scan, a single scanning magnet means formed of a yoke and pole means of magnetic material and associated energizing coils,

and a magnetic ion beam transport system following the scanning system,

said transport system arranged to receive the beam from the scanning system over the range of two dimensional deflections of said scanning system and constructed to impose magnetic field conditions along the beam path of characteristics selected to reorient the two-dimensionally deflected beam to a direction having a predetermined desired angular relationship with the axis in said two dimensions at the desired instantaneous two dimensional displacement of the beam from the axis, to produce the desired scan of the beam over the substrate, and

wherein said magnetic ion beam transport system for imposing magnetic fields comprises a bending magnet followed by at least one solenoid.

55. System for irradiating a surface of a substrate with atomic or molecular ions by rapid scanning of a beam providing an ion-distributing beam spot in two dimensions over the substrate, the system including:

an end station for presenting a substrate to the beam,

an ion source and associated beam-forming devices for producing a beam of atomic or molecular ions,

a magnetic scanning system for deflecting the beam in two dimensions relative to a reference axis, said system employing, for each dimension of scan, a single scanning magnet means formed of a yoke and pole means of magnetic material and associated energizing coils,

and a magnetic ion beam transport system following the scanning system,

said transport system arranged to receive the beam from the scanning system over the range of two dimensional deflections of said scanning system and constructed to impose static magnetic field conditions along the beam path of characteristics selected to reorient the two-dimensionally deflected beam to a direction having a predetermined desired angular relationship with the axis in said two dimensions at the desired instantaneous two dimensional displacement of the beam from the axis, and produce the desired scan of an ion beam spot of ion-distributing size over the substrate, and

the system including a dynamic feedback control system including;

magnetic field detection means for detecting the magnetic fields of said scanning system and producing signals indicative of the fields affecting said beam during scanning of said ion beam;

and feedback control system for controlling the scanning system to produce a prescribed magnetic field profile in each of said two dimensions in a closed loop manner in response to said field detection means.

56. The system of claim 55 wherein said field detection means comprise inductive coils inside said magnetic scanning system.

57. The system of claim 55 wherein said control system includes means to perform analysis of signals from said magnetic field detection means into Fourier components and/or phase power series analysis.

58. System for irradiating a surface of a substrate with atomic or molecular ions by rapid scanning of a beam in two dimensions over the substrate, the system including:

an end station for presenting a substrate to the beam,

an ion source and associated beam-forming devices for producing a beam of atomic or molecular ions,

a magnetic scanning system for deflecting the beam in two dimensions relative to a reference axis, said system employing, for each dimension of scan, a single scanning magnet means formed of a yoke and pole means of magnetic material and associated energizing coils,

and a magnetic ion beam transport system following the scanning system,

said transport system arranged to receive the beam from the scanning system over the range of two dimensional deflections of said scanning system and constructed to impose static magnetic field conditions along the beam path of characteristics selected to reorient the two-dimensionally deflected beam to a direction having a predetermined desired angular relationship with the axis in said two dimensions at the desired instantaneous two dimensional displacement of the beam from the axis, to produce the desired scan of the beam over the substrate, and

the system including a dynamic feedback control system including;

ion dose detection means for detecting the dose at the target of said scanning system and producing signals indicative of the dose during scanning of said ion beam;

and feedback control system for controlling the scanning system to produce a prescribed ion dose in said two dimensions in a closed loop manner in response to said dose detection means.

60. The system of claim 58 wherein said field detection means comprise inductive coils inside said magnetic scanning system.

61. The system of claim 58 wherein said control system includes means to perform analysis of signals from said magnetic field detection means into Fourier components and/or phase power series analysis.

59. An ion implantation system for doping a substrate by irradiating a surface of the substrate with atomic or molecular ions with a desired uniformity the beam providing an ion-distributing beam spot, the system constructed to enable rapid scanning in two dimensions over the substrate of beams over a wide range of perveance including perveance above 0.02/M[amu]^1/2 (mA/keV^3/2) and including:

an end station for presenting a substrate to the ion beam,

an ion source and associated beam-forming devices for producing a beam of atomic or molecular ions,

a magnetic scanning system capable of scanning said beam in two dimensions over the surface of the substrate, said scanning system employing, for each dimension of scan, a single respective scanning magnet means formed of yoke and pole means of magnetic material and associated energizing coils;

means for providing signals representing the desired position of said beam to produce a prescribed ion dose profile;

and a dynamic closed loop feedback control system including;

magnetic field detection means for detecting the magnetic fields of said scanning system and producing signals indicative of the fields affecting said beam during scanning of said beam,

and feedback control system for controlling the scanning system to produce a magnetic field profile in said two dimensions in closed loop manner, in response to said field detection means to produce the desired scan of said ion-distributing beam spot.

62. An ion implantation system for doping a substrate by irradiating a surface of the substrate with atomic or molecular ions with a desired uniformity, the beam providing an ion-distributing beam spot, the system constructed to enable rapid scanning in two dimensions over the substrate of beams over a wide range of perveance including perveance above 0.02/M[amu]^1/2 (mA/keV^3/2) and including:

an end station for presenting a substrate to the beam,

an ion source and associated beam-forming devices for producing a beam of atomic or molecular ions,

a magnetic scanning system capable of scanning said beam in two dimensions over the surface of the substrate, said system employing, for each dimension of scan, a single respective scanning magnet means formed of yoke and pole means for magnetic material and associated energizing coils;

means for providing signals representing the desired position of said beam to produce a prescribed ion dose profile;

and a dynamic closed loop feedback control system including;

ion dose detection means for detecting the progress of implantation at the target of said scanning system and producing signals indicative thereof during scanning of said ion beam;

and feedback control system for controlling the scanning system to produce a prescribed ion dose in said two dimensions in a closed loop manner in response to said dose detection means.

63. A magnetic scanning system constructed to deflect a beam of atomic or molecular ions in a first and second dimension relative to a reference axis, said system having a first and second time-variable-field magnetic scanners in first and second positions along the axis of the system for successively deflecting the beam in the respective dimensions, each magnetic scanner comprising a yoke and pole means of magnetic material and associated energizing coils, and each having a respective deflection circuit and power supply for applying time-varying current to said coils,

said first time-variable-field magnetic scanner having a magnetic gap through which the beam passes of volume smaller than the volume of the magnetic gap of said second scanner and being constructed to scan the beam in its respective dimension more rapidly than does the second scanner whereby the power requirement imposed by the higher frequency for the first scanner is ameliorated by the lower gap volume of said scanner, and

the scanners being effective at each instant to deflect the ion beam from said reference axis in a decoupled manner at respective angles in the respective dimensions that are determined by the desired instantaneous displacement of the ion beam.

64. The system of claim 63 wherein the second scanner is located closely adjacent said first scanner without any beam-influencing optical element interposed therebetween.

65. The system of claim 63 including means to provide a ribbon-form ion beam to said scanning system, the shorter dimension of the cross section of said ribbon being aligned with the direction of the thickness of the gap of said first scanner.

66. The system of claim 63 wherein the gap of said second scanner diverges in the direction of the beam path in manner corresponding generally to the divergence of the deflection envelope produced by the first scanner, the width (direction perpendicular to the gap) of the poles of said second magnetic scanner correspondingly increasing progressively in the axial direction.

67. The system of claim 63 or 64 wherein said magnetic scanning means, for at least one dimension of scan, is constructed to scan the beam over the surface of said substrate at a frequency greater than 100 Hz.

68. The system of claim 63 wherein said first scanner is constructed to operate at a scanning frequency of the order of about ten times higher than, and not an integer multiple of, the scanning frequency of said second scanner.

69. The system of claim 63, 64 or 68 wherein the scanning system is constructed to deflect the beam in said first dimension at a scan frequency of the order of 1000 Hz or higher and in the second dimension at a scan frequency of the order of 50 Hz or higher.

73. The system of claim 63 or 72 in combination with a beam forming device for producing a beam of said atomic or molecular ions to be scanned, wherein said scanning system is positioned in the region of a conjugate ion optical image of said beam forming device to keep relatively small the magnetic gaps of said scanning system.

74. The system of claim 63 or 72 wherein poles and yoke structure of said magnetic scanning system are comprised of insulated laminations of magnetic material of thickness less than 1 mm.

75. The system of claim 74 wherein the thickness of said laminations is of the order of 0.5 mm.

76. The system of claim 63 or 72 further comprising an ion beam transport system following the scanning system, arranged to receive the beam from the scanning system over the range of two dimensional deflections of said scanning system and constructed to impose static magnetic field conditions along the beam path of characteristics selected to reorient the two-dimensionally deflected beam to a direction having a predetermined desired angular relationship with the axis in each of said two dimensions at the desired instantaneous two dimensional displacement of the beam from the axis, to produce the desired scan of the beam.

70. A magnetic scanning system for deflecting a beam of atomic or molecular ions in a first and second dimension relative to a reference axis, said system employing respective first and second time-variable-field magnetic scanning magnet means formed of a yoke and pole means of magnetic material and associated energizing coils, and each having a respective deflection circuit and power supply for applying time varying current to said coils,

said scanner coils and associated magnetic circuits being effective to generate fields to deflect the beam in decoupled manner in both dimensions and being located in the same general vicinity along the beam path,

the pole means for each scanning dimensions comprising a relatively large number of poles that are spaced at different angles θ

about the reference axis and have associated coil turns,

the number of coil turns about respective poles for the first scan dimension being proportional to the value of cos θ and

the number of coil turns about respective poles for the second scan dimension being proportioned to the value of sin θ

, the coil turns respecting each scan dimension being connected in series, whereby, by selection of the frequency, phase and amplitude of the time-varying current applied to each coil, differing desired scan patterns can be produced.

71. The system of claim 70 comprising a circular iron yoke, a multiplicity of poles distributed about and extending inwardly toward the axis of said yoke, and respective, separate x and y dimension deflection coils associated with said poles.

72. A magnetic scanning system for deflecting a beam of atomic or molecular ions in a first and second dimension relative to a reference axis, said system employing respective first and second time-variable-field magnetic scanning magnet means formed of a yoke and pole means of magnetic material and associated energizing coils, and each having a respective deflection circuit and power supply for applying time varying current to said coils,

said scanning system comprising a circular iron yoke, a multiplicity of poles distributed about and extending inwardly toward the axis of said yoke, and respective, separate x and y dimension deflection coils associated with said poles, the windings of the coils on the poles for the respective deflection directions varying in number according to the angular position of said poles relative to the respective deflection axis, and means connecting the respective sets of coils in series to be driven by a single, respective energization current for deflection in the respective dimension,

said scanner coils and associated magnetic circuits being effective to generate fields to deflect the beam in decoupled manner in both dimensions and being located in the same general vicinity along the beam path.

77. A magnetic scanning system for deflecting a beam of atomic or molecular ions that provides an ion-distributing beam spot in a first and second dimension relative to a reference axis, said system employing respective first and second time-variable-field magnetic scanning magnet means formed of a yoke and pole means of magnetic material and associated energizing coils, and each having a respective deflection circuit and power supply for applying time varying current to said coils,

said scanner coils and associated magnetic circuits being effective to generate fields to deflect the beam in decoupled manner in both dimensions and being located in the same general vicinity along the beam path, the system including a dynamic feedback control system comprising:

magnetic field detection means for detecting the magnetic fields of said scanning system and producing signals indicative of the fields affecting said ion beam during scanning of said beam;

and a feedback control system for controlling the scanning system to produce a prescribed ion dose profile in said two dimensions in a closed loop manner in response to said field detection means to produce the desired scan of said ion-distributing beam spot.

78. An ion implantation system for doping a substrate by irradiating a surface of the substrate with atomic or molecular ions by rapid scanning of a beam in two dimensions, the beam providing an ion-distributing beam spot, the system including:

an end station for presenting a substrate to the ion beam,

a scanning system for deflecting the ion beam in two dimensions relative to a reference axis, and

a magnetic ion beam transport system following the scanning system, and preceding said end station, said transport system arranged to determine the angular relationship with which ions reach and are implanted into said substrate of said end station,

said magnetic transport system having multiple, axially spaced-apart static magnetic field-imposing elements constructed to impose static magnetic field conditions along the beam path of characteristics selected to reorient the two-dimensionally deflected ion beam to an implanting direction having a predetermined desired angular relationship with the axis in each of said two directions at the desired instantaneous two dimensional displacement of the ion beam from the axis, to produce the desired scan of the beam over the substrate.

79. The system of claim 78 wherein said magnetic ion transport system has characteristics to reorient the two-dimensionally deflected beam in a dimensionally decoupled manner.

80. The system of claim 78 wherein said ion beam transport system is constructed to establish static magnetic fields capable of effecting a linear transformation of the two-dimensionally deflected beam such that the final position and angle at which the beam impinges on the target is a linear function of the angular direction and displacement of the beam entering the ion beam transport system.

81. The system of claim 80 wherein said magnetic ion beam transport system is constructed to impose static magnetic field conditions along the beam path sufficient to produce a beam of ions such that the direction of each ion deviates by less than about 2°

from a desired direction over the range of scan.

82. The system of claim 80 wherein said magnetic ion beam transport system has adjustable parameters for adjusting the angle of said beam upon said substrate over the range of diverging, parallel and converging values.

83. The system of claim 80 wherein said magnetic ion beam transport system imposes static magnetic field conditions to produce a beam that is parallel with said reference axis in said two dimensions.

84. The system of claim 80 wherein said magnetic ion beam transport system is constructed to impose static magnetic field conditions along the beam path to produce a beam that has a substantially constant ion-distributing spot size at said substrate over the range of scan.

85. The system of claim 78 wherein said magnetic ion beam transport system includes means to apply at least one static quadrupole field followed by second magnetic means applying static magnetic fields effective in the two dimensions of deflection.

86. The system of claim 85 wherein said magnetic ion beam transport system comprises at least three quadrupole magnets in sequence.

87. The system of claim 85 wherein said magnetic ion beam transport system comprises a bending magnet having at least three differing sections along its length constructed to produce respective quadrupole fields.

88. The system of claim 85 for use with x and y scanners that are spaced apart along the axis of the system wherein the x and y dimension object points of said quadrupole field system occur respectively at the x and y dimension magnetic scanners in the manner to satisfy telecentric conditions.

90. The system of claim 85 wherein said second magnetic means comprises a solenoid means.

91. The system of claim 78 wherein said ion beam transport system comprises a solenoid system having multiple solenoids, the currents in said solenoids being controlled to control beam rotation.

92. The system of claim 78 wherein said magnetic ion beam transport system for imposing magnetic fields comprises a bending magnet followed by a quadrupole.

93. The system of claim 78 wherein said magnetic ion beam transport system for imposing magnetic fields comprises a bending magnet followed by at least one solenoid.

94. The system of any one of claims 78 to 93 wherein said scanned beam is scanned by a system comprising first and second scanners that are located at different axial positions and said transport system is constructed such that its focal planes in the respective dimensions accommodate to the difference in center location of said first and second scanners.