High sensitivity, large detection area particle sensor for vacuum applications

• US 5,132,548 A
• Filed: 09/14/1990
• Issued: 07/21/1992
• Est. Priority Date: 09/14/1990
• Status: Expired due to Term

• Current Assignee: Hach Ultra Analytics Incorporated (Danaher Corporation)
• Original Assignee: High Yield Technology
• Inventors: Borden, Peter, Nokes, Mark, Stolz, James, Kain, Maurits
• Primary Examiner(s): Nelms, David C.
• Assistant Examiner(s): Lee, John R.
• Application Number:
  US07/582,718
• Time in Patent Office: 676 Days
• Field of Search: 250/574, 356/336, 356/338, 356/339, 356/340, 356/342, 356/343, 350/421, 359/669
• US Class Current: 250/574
• CPC Class Codes: G01N 15/0205 by optical means
• CPC Class Codes: G01N 21/53 within a flowing fluid, e.g. smoke

Abstract

A particle sensor which employs the principle that a particle passing through an intense laser beam will scatter light to a photodetector which then generates a measurable signal is provided. The particle sensor uses prisms and a cylindrical lens to compress the laser beam to make it very thin along the axis of particle motion but very wide in the plane perpendicular to particle motion, thereby simultaneously providing high beam intensity for enhanced sensitivity and a large detection area. The optical components of the sensor are mounted on separate sections which allows the optical components to be separately aligned and changed so that the sensor may be easily adapted to various applications.

Claims

1. A particle sensor comprising:

means for providing a high intensity light beam, said light beam having a thickness and a width along a cross-section;

means for compressing said thickness of said light beam without lessening said width of said light beam;

a detection area through which said light beam propagates, said detection area and said light beam being accessible to particles, said width of said light beam being substantially larger than said particles; and

photosensor means positioned in said detection area for sensing light scattered when particles pass through said light beam.

2. The particle sensor of claim 1 wherein said means for compressing said thickness of said light beam comprises a cylindrical focusing lens through which said light beam propagates whereby said light beam has a focus in said detection area.

3. The particle sensor of claim 2 wherein said means for compressing said thickness of said light beam further comprises at least two prisms positioned between said cylindrical focusing lens and said means for providing s id high intensity light beam.

4. The particle sensor of claim 3 wherein said thickness of said light beam is compressed by at least a factor of three.

5. The particle sensor of claim 4 wherein said photosensor means is a photodiode which is covered by a filter, a layer of vacuum grease being applied between said photodiode and said filter whereby said photodiode is protected from corrosive gases.

6. The particle sensor according to claim 1 wherein said means for producing a high intensity light beam is a laser diode producing laser light.

7. The particle sensor according to claim 6 further comprising a baffle having an aperture, said baffle being positioned before said detection area for preventing any stray laser light from entering said detection area.

8. The particle sensor of claim 7 further comprising a beam stop positioned after said detection area.