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High sensitivity, large detection area particle sensor for vacuum applications

  • US 5,132,548 A
  • Filed: 09/14/1990
  • Issued: 07/21/1992
  • Est. Priority Date: 09/14/1990
  • Status: Expired due to Term
First Claim
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1. A particle sensor comprising:

  • means for providing a high intensity light beam, said light beam having a thickness and a width along a cross-section;

    means for compressing said thickness of said light beam without lessening said width of said light beam;

    a detection area through which said light beam propagates, said detection area and said light beam being accessible to particles, said width of said light beam being substantially larger than said particles; and

    photosensor means positioned in said detection area for sensing light scattered when particles pass through said light beam.

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