Rough surface profiler and method

• US 5,133,601 A
• Filed: 06/12/1991
• Issued: 07/28/1992
• Est. Priority Date: 06/12/1991
• Status: Expired due to Term

• Current Assignee: Veeco Metrology Inc. (Veeco Instruments Incorporated)
• Original Assignee: WYKO, Inc.
• Inventors: Cohen, Donald K., Brophy, Chris P., Caber, Paul J.
• Primary Examiner(s): Turner, Samuel A.
• Assistant Examiner(s): KEESEE, LACHARLES
• Application Number:
  US07/714,215
• Time in Patent Office: 412 Days
• Field of Search: 356/359, 356/360, 356/376, 356/377, 356/381, 250/561, 382/8
• US Class Current: 356/497
• CPC Class Codes: G01B 11/2441 using interferometry

Abstract

A method of profiling a rough surface of an object includes moving the object along a z axis so that a highest point of the rough surface is optically aligned with and outside of the focus range of a solid-state imaging array. An interferogram of the rough surface then is produced by means of a two beam interferometer. The solid-state imaging array is operated to scan the rough surface along x and y axes to produce intensity data for each pixel of the solid-state imaging array for a plurality of frames each shifted from the other by a preselected phase difference. The modulation for each pixel is computed from the intensity data. The most recently computed modulation of each pixel is compared with a stored prior value of modulation of that pixel. The prior value is replaced with the most recently computed value if the most recently computed value is greater. The object is incrementally moved a selected distance along the z axis, and the foregoing procedure is repeated until maximum values of modulation and corresponding relative height of the rough surface are obtained and stored for each pixel.

Claims

1. A method of profiling a rough surface of an object, comprising the steps of:

(a) positioning the object along an optical axis so that a predetermined feature of the rough surface is optically aligned with an imaging device;

(b) producing an interference pattern of the rough surface by means of an interferometer;

(c) operating the imaging device to scan the rough surface to produce intensity data for each pixel of an image of the rough surface for a plurality of frames each shifted from the other by a preselected phase difference;

(d) computing a modulation for each pixel from the intensity data;

(e) comparing a most recently computed modulation for each pixel with a stored prior value of modulation for that pixel, and replacing the prior value with the most recently computed modulation and also obtaining and storing a corresponding relative height of the rough surface if the most recently computed modulation is greater than the prior value; and

(f) varying an optical path difference between the object and a reference surface of the interferometer, and repeating steps (b)-(e) for each pixel until maximum values of modulation and a corresponding relative height are obtained and stored for each pixel.

2. The method of claim 1 including illuminating the rough surface with a broad bandwidth light source to cause intensities of fringes of the interferogram to fall off sharply as the optical path difference is varied.

3. The method of claim 1 wherein step (d) includes producing 3 frames of intensity data corresponding to optical phase difference phase changes of π

/2 for each modulation computation, and computing the modulation in accordance with the expression ##EQU5##

4. The method of claim 1 including computing phase information for each pixel, and combining the phase information with the computed modulation values to obtain a more accurate phase and relative height at which peak modulation occurs.

5. The method of claim 1 wherein step (e) includes replacing the prior value of modulation only if the most recently computed modulation has (I₁ -I₂) and (I₃ -I₂) terms that both are negative or one is negative and the other is zero, the method further including then computing a phase offset term according to the expression ##EQU6## wherein I₁, I₂, and I₃ are values of intensity of the interferogram at the present pixel for successive measurements spaced a predetermined phase difference apart, computing a relative height offset term from the phase offset term, and combining the relative height offset term with the relative height of the rough surface to increase the measurement resolution.

6. A device for profiling a rough surface of an object, comprising in combination:

(a) an imaging device;

(b) means for moving the object along an optical axis so that a predetermined feature of the rough surface is optically aligned with the imaging device;

(c) an interferometer, and means for producing an interference pattern of the rough surface by means of the interferometer;

(d) means for operating the imaging device to scan the rough surface to produce intensity data for each pixel of an image of the rough surface for a plurality of frames each shifted from the other by a preselected phase difference;

(e) means for computing a modulation for each pixel from the intensity data;

(f) means for comparing a most recently computed modulation for each pixel with a stored prior value of modulation for that pixel;

(g) means for replacing the prior value with the most recently computed modulation;

(h) means for obtaining and storing a corresponding relative height of the rough surface if the most recently computed modulation is greater; and

(i) means for varying an optical path difference between the object until maximum values of modulation and corresponding relative heights of the rough surface are obtained and stored for each pixel, respectively.

7. The device of claim 6 including a broad band light source illuminating the rough surface.

8. A method of profiling a rough surface of an object, comprising the steps of:

(a) positioning the object along an optical axis so that a predetermined feature of the rough surface is optically aligned with an imaging device;

(b) producing an interference pattern of the rough surface by means of an interferometer;

(c) varying an optical path difference between the object and a reference surface of the interferometer;

(d) operating the imaging device to scan the rough surface to produce intensity data for each pixel of an image of the rough surface for a plurality of frames each shifted from the other by a preselected phase difference;

(e) extracting a modulation envelope from the intensity data for each pixel;

(f) locating a preselected characteristic of the modulation envelope for each pixel;

(g) correlating the preselected characteristic of the modulation envelope to a relative height of the rough surface for each pixel.

9. A method of profiling a rough surface of an object, comprising the steps of:

(a) moving the object along an optical axis so that a predetermined feature of the rough surface is optically aligned with an imaging device;

(b) producing an interference pattern of the rough surface by means of an interferometer;

(c) varying an optical path difference between the object and a reference surface at the interferometer;

(d) operating the imaging device to scan the rough surface to produce intensity data for each pixel of an image of the rough surface for a plurality of frames each shifted from the other by a preselected phase difference;

(e) computing phase information from the intensity data for each pixel, and computing phase offsets for each pixel from the phase information;

(f) extracting a modulation envelope from the intensity data for each pixel;

(g) locating a preselected characteristic of the modulation envelope for each pixel;

(h) correlating the preselected characteristic of the modulation envelope to a relative height of the rough surface for each pixel;

(i) combining the phase offsets with the relative height of the preselected characteristic to obtain a relative height of improved accuracy for the rough surface at each pixel.

10. A method of profiling a surface of an object, comprising the steps of:

(a) moving the object along an optical axis so that a predetermined feature of the surface is optically aligned with an imaging device;

(b) producing an interference pattern of the surface by means of an interferometer;

(c) varying an optical path difference between the object and a reference surface at the interferometer;

(d) operating the imaging device to scan the surface to produce intensity data for each pixel of an image of the surface for a plurality of frames each shifted from the other by a preselected phase difference;

(e) computing phase information from the intensity data for each pixel;

(f) determining a relative height corresponding to the phase information for each pixel, and using the relative heights as the profile of the surface if the surface is of a predetermined smoothness;

(g) extracting a modulation envelope from the intensity data for each pixel;

(h) locating a preselected characteristic of the modulation envelope for each pixel;

(i) correlating the preselected characteristic of the modulation envelope to a relative height of the rough surface for each pixel, and using the relative heights as the profile of the surface if the surface is of roughness greater than a predetermined high roughness; and

(j) combining the phase information with the relative height of the peak to obtain a relative height of improved accuracy for the surface at each pixel, and using the relative heights as the profile of the surface if the surface is of a predetermined intermediate roughness.

11. A device for profiling a rough surface of an object, comprising in combination:

(a) an imaging device;

(b) means for moving the object along an optical axis so that a highest point of the rough surface is optically aligned with the imaging device;

(c) an interferometer, and means for producing an interference pattern of the rough surface by means of the interferometer;

(d) means for operating the imaging device to scan the rough surface to produce intensity data for each pixel of an image of the rough surface for a plurality of frames each shifted from the other by a preselected phase difference;

(e) means for extracting a modulation envelope from the intensity data for each pixel;

(f) means for locating a preselected characteristic of the modulation envelope for each pixel; and

(g) means for correlating the preselected characteristic of the modulation envelope to a relative height of the rough surface at the peak for each pixel to obtain the profile of the rough surface.

12. A device for profiling a rough surface of an object, comprising in combination:

(a) an imaging device;

(b) means for moving the object along an optical axis so that a highest point of the rough surface is optically aligned with the imaging device;

(c) an interferometer, and means for producing an interference pattern of the rough surface by means of the interferometer;

(d) means for operating the imaging device to scan the rough surface to produce intensity data for each pixel of an image of the rough surface for a plurality of frames each shifted from the other by a preselected phase difference;

(e) means for computing phase information from the intensity data for each pixel, and means for computing phase offsets for each pixel from the phase information;

(f) means for extracting a modulation envelope from the intensity data for each pixel;

(g) means for determining a peak of the modulation envelope for each pixel;

(h) means for determining a relative height of the rough surface corresponding to the peak for each pixel; and

(i) means for combining the phase offsets with the relative height of the peak to obtain a relative height of improved accuracy for the rough surface at each pixel.