Spin coating apparatus

• US 5,134,962 A
• Filed: 05/16/1990
• Issued: 08/04/1992
• Est. Priority Date: 09/29/1989
• Status: Expired due to Term

• Current Assignee: CKD Corporation, Hitachi, Ltd.
• Original Assignee: CKD Corporation, Hitachi, Ltd.
• Inventors: Sakai, Atsuyuki, Shimura, Katsumasa, Maekawa, Hisamitsu, Kojima, Akihiro, Amada, Haruo, Kagohashi, Hiroshi
• Primary Examiner(s): Jones, W. Gary
• Assistant Examiner(s): BURNS, TODD
• Application Number:
  US07/524,378
• Time in Patent Office: 811 Days
• Field of Search: 118/683, 118/688, 118/695, 118/696, 118/697, 118/52, 118/712, 118/320, 222/571, 222/52, 222/63, 222/71, 222/148, 222/334, 222/146.1, 417/63, 417/393, 417/395, 92/103 R, 92/103 M, 239/71, 73/40, 73/40.5 R
• US Class Current: 118/688
• CPC Class Codes: B05C 11/08 Spreading liquid or other fluent material by manipulating the work, e.g. tilting
• CPC Class Codes: H01L 21/6715 Apparatus for applying a liquid, a resin, an ink or the like H01L21/67126 takes precedence

Abstract

The present invention relates to a spin coating apparatus for feeding a clean liquid at a fixed rate. In any of the feeding apparatus in the prior art, no constituent other than a filter has the function of eliminating foreign matter, and the operation of feeding a liquid under precise control is not attained. This results in the problem of the mixing of the foreign matter (and air bubbles) in the feed liquid, and the problem of nonuniformity in a feed speed as well as a feed amount. As expedients for solving these problems, the present invention provides the functions of automatically sensing and excluding factors for the appearances of the foreign matters, and devices for automatically and precisely controlling feed control elements such as a pump, thereby feeding the clean liquid in a constant amount and at a constant speed.

Claims

1. An apparatus for spin-coating a flat object with a viscous coating liquid, comprising:

(a) dispenser means having a diaphragm pump for sucking the coating liquid from a liquid source and for discharging and dropping the sucked liquid in a constant amount and at a constant speed from a discharge nozzle onto the flat object placed on a rotary stage;

(b) a dispenser central control device including a microcomputer or minicomputer for controlling said diaphragm pump; and

(c) diaphragm displacement detection means for detecting at least one of a position and displacement speed of a diaphragm of said diaphragm pump in a noncontacting manner, and for delivering data of the at least one of the position and displacement speed to said central control device.

2. A coating apparatus according to claim 1, further comprising:

(d) viscosity measurement means for measuring a viscosity of said coating liquid, and for delivering data of the viscosity to said central control device.

3. A coating apparatus according to claim 1, further comprising:

(e) foreign matter detection means for detecting foreign matter contained in said coating liquid within said dispenser means, and for delivering data of the foreign matter to said central control device.

4. A coating apparatus according to claim 1, further comprising:

(f) said diaphragm pump having a coating liquid suction valve or discharge valve provided independently of a diaphragm drive section, said diaphragm drive further includes a liquid pressure feed chamber and a pressure chamber.

5. A coating apparatus according to claim 4, further comprising:

(g) filter means interposed between said diaphragm pump and said suction or discharge valve, for removing any foreign matter contained in said coating liquid.

6. A coating apparatus according to claim 5, further comprising:

feed pressure detection means for detecting a pressure of said pressure feed chamber of said diaphragm pump;

wherein said central control device calculates an optimum feed pressure from the diaphragm displacement speed data and data of the feed pressure so as to control the feed pressure.

7. A coating apparatus according to claim 1, further comprising:

(i) valve or diaphragm damage detection means for detecting any damage of a valve or diaphragm provided in said dispenser means, and for delivering data of the damage to said central control device.

8. coating apparatus according to claim 1, further comprising:

(i) gas bubble trap means provided in said dispenser means, for trapping gas bubbles contained in said coating liquid.

9. A coating apparatus according to claim 8, further comprising:

(k) gas bubble detection means for detecting presence or an amount of the gas bubbles trapped in said gas bubble trap means, and for delivering data of the presence or amount to said central control device.

10. A coating apparatus according to claim 9, further comprising:

(l) gas bubble exclusion means for excluding the air bubbles on the basis of said data from said air bubble detection means.

11. A coating apparatus according to claim 6, wherein said central control device manages an upper limit or lower limit of a pressure loss ascribable to said filter means, on the basis of data items of the diaphragm displacement speed and the feed pressure.

12. A coating apparatus according to claim 5, further comprising:

(m) filter temperature control means for controlling a temperature of said coating liquid in said filter means.

13. A coating apparatus according to claim 12, wherein said filter temperature control means is controlled by said central control device.

14. A coating apparatus according to claim 12, wherein an amount of said coating liquid to be stored behind said filter mean is set to be smaller than an amount of discharge in a previous discharge disposal for discharging and eliminating at an initial stage of operation the coating liquid which has accumulated on a discharge nozzle side and which might have deteriorated.

15. A coating apparatus according to claim 14, further comprising:

(n) suck-back valve means for preventing said coating liquid from undesirably dropping out of the discharge nozzle which is provided on a suction side with respect to said filter means, within a suction and discharge path for said coating liquid.

16. An apparatus for spin-coating a flat object with a viscous liquid comprising:

(a) dispenser means having suck-back means including a diaphragm pump by which, in sucking the coating liquid from a liquid source and then dropping the coating liquid from a discharge nozzle onto the flat object placed on a rotary stage, the coating liquid within said discharge nozzle is sucked inwardly of said nozzle in a constant amount and at a constant speed after each preceding drop in order to prevent any undesirable drop;

(b) a dispenser central control device including a microcomputer and minicomputer for controlling said suck-back means; and

(c) diaphragm displacement detection means for detecting at least one of a position and displacement speed of a diaphragm of said diaphragm pump of said suck-back means in a noncontacting manner, and for delivering data of at least one of the position and displacement speed to said central control device.

17. A coating apparatus according to claim 16, further comprising:

(d) viscosity measurement means for measuring a viscosity of said coating liquid, and for delivering data of the viscosity to said central control device.

18. A coating apparatus according to claim 16, further comprising:

(e) foreign matter detection means for detecting foreign matter contained in said coating liquid within said dispenser means, and for delivering data of the foreign matter to said central control device.

19. A coating apparatus according to claim 16, further comprising:

(f) diaphragm damage detection means for detecting damage of a diaphragm provided in said suck-back means, and for delivering data of the damage to said central control device.

20. A coating apparatus according to claim 16, further comprising:

(g) gas bubble trap means provided in said dispenser means, for trapping gas bubbles contained in said coating liquid.

21. A coating apparatus according to claim. 20, further comprising:

(h) gas bubble detection means for detecting a presence or an amount of the gas bubbles trapped in said gas bubble trap means, and for delivering data of the presence or amount to said central control device.

22. A coating apparatus according to claim 21, further comprising:

(i) gas bubble exclusion means for excluding the gas bubbles on the basis of said data from said gas bubble detection means.

23. An apparatus for spin-coating a flat object with a viscous coating liquid, comprising:

(a) dispenser means having a diaphragm pump for sucking the coating liquid from a liquid source and for discharging and dropping the sucked liquid in a constant amount and at a constant speed from a discharge nozzle onto the flat object placed on a rotary stage; and

(b) a dispenser central control device including a microcomputer or minicomputer for controlling said diaphragm pump;

(c) diaphragm displacement detection means for detecting at least one of a position and displacement speed of a diaphragm of said diaphragm pump in a noncontacting manner, and for delivering data of the at least one of the position and displacement speed to said central control device;

(d) viscosity measurement means for measuring a viscosity of said coating liquid, and for delivering data of the viscosity to said central control device;

(e) foreign matter detection means for detecting foreign matter contained in said coating liquid within said dispenser means, and for delivering data of the foreign matter to said central control device;

(f) said diaphragm pump having a coating liquid suction valve or discharge valve provided independently of a diaphragm drive section, said diaphragm drive further includes a liquid pressure feed chamber and a pressure chamber;

(g) filter means interposed between said diaphragm pump and said suction or discharge valve, for removing foreign matter contained in said coating liquid;

(h) feed pressure detection means for detecting a pressure of said pressure feed chamber of said diaphragm pump;

wherein said central control device calculates an optimum feed pressure from the diaphragm displacement data and data of the feed pressure so as to control the feed pressure;

(i) valve or diaphragm damage detection means for detecting damage of a valve or diaphragm provided in said dispenser means, and for delivering data of the damage to said central control device; and

(j) gas bubble trap means provided in said dispenser means, for trapping gas bubbles contained in said coating liquid.