Thin soft magnetic film and method of manufacturing the same
First Claim
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1. A thin soft magnetic film of high magnetic permeability exhibiting isotropic magnetostriction which comprises a thin film of magnetic material of cubic crystallographic symmetry, formed on an underlayer with corresponding crystallographic symmetry to the magnetic material, the plane (111) of the thin film of magnetic material being oriented substantially in parallel to the surface of the thin film.
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Abstract
Disclosed is a soft magnetic film comprising a thin film of magnetic material of cubic symmetry, characterized in that crystal face (111) of the thin film is oriented substantially parallel to the surface of the thin film.
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6 Claims
- 1. A thin soft magnetic film of high magnetic permeability exhibiting isotropic magnetostriction which comprises a thin film of magnetic material of cubic crystallographic symmetry, formed on an underlayer with corresponding crystallographic symmetry to the magnetic material, the plane (111) of the thin film of magnetic material being oriented substantially in parallel to the surface of the thin film.
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5. The method of manufacturing a thin soft magnetic film, which comprises forming a thin film of a magnetic material of cubic crystallographic symmetry on an underlayer corresponding to the magnetic material, both the thin film of a magnetic material and the underlayer having the same lattice constant, while heating the underlayer at 300°
- C. or higher, thereby making the plane (111) of the thin film of the magnetic material orient substantially in parallel to the surface of the thin film.
- View Dependent Claims (6)
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