Interconnect package having means for waveguide transmission of RF signals

• US 5,138,436 A
• Filed: 11/16/1990
• Issued: 08/11/1992
• Est. Priority Date: 11/16/1990
• Status: Expired due to Fees

• Current Assignee: Ball Corporation
• Original Assignee: Ball Corporation
• Inventors: Koepf, Gerhard A.
• Primary Examiner(s): James, Andrew J.
• Assistant Examiner(s): CLARK, SHEILA V
• Application Number:
  US07/614,936
• Time in Patent Office: 634 Days
• Field of Search: 357/80, 357/74, 357/75, 357/81, 174/52.4, 361/401, 361/386, 361/321, 361/398, 361/399, 361/400, 361/392, 361/393, 361/394, 361/397, 361/413, 361/414
• US Class Current: 257/728
• CPC Class Codes: G02B 6/43 Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
• CPC Class Codes: H01L 2224/16225 the item being non-metallic, e.g. insulating substrate with or without metallisation
• CPC Class Codes: H01L 2224/73253 Bump and layer connectors
• CPC Class Codes: H01L 23/48 Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
• CPC Class Codes: H01L 23/5385 Assembly of a plurality of insulating substrates
• CPC Class Codes: H01L 23/66 High-frequency adaptations
• CPC Class Codes: H01L 2924/15151 the die mounting substrate comprising an aperture, e.g. for underfilling, outgassing, window type wire connections
• CPC Class Codes: H01L 2924/3011 Impedance

Abstract

An interconnection package is provided for a circuitry component, such as an integrated circuit, comprising a support member for supporting the circuitry component and an interconnect member placed over the circuitry component. The interconnect member has interconnect transmission lines on at least one surface for transmitting currents and signals to and from the circuitry component. When the package is to contain a monolithic microwave integrated circuit (MMIC), millimeter waveguides are employed to transmit RF signals to and from the MMIC through the package. The MMIC is positioned in cavities in the support member and the interconnect member is placed over the MMIC. RF interconnect transmission lines on the interconnect member can be connected directly to RF contact pads on the MMIC or can be electromagnetically coupled. DC interconnect transmission lines are connected directly to DC contact pads on the integrated circuit. Use of the support member and the interconnect member provides a total of three levels on which to dispose interconnect transmission networks, including cross-overs, and peripheral circuit components.

Claims

1. An interconnect package for an integrated circuit chip having at least one chip contact pad on a first surface, comprising:

a support member for supporting the chip;

an interconnect member disposed in opposing relation to the first surface of the chip for transmission of at least one of electrical currents or signals to and from the chip; and

means for waveguide transmission of signals to and from the chip, including;

an interconnect transmission line disposed on a surface of said interconnect member and electrically coupled to one of the at least one chip contact pad;

a package ground means on said support member wherein a chip ground plane on a second surface of the chip is substantially parallel to said package ground means and electrically coupled thereto; and

dielectric means disposed between said interconnect transmission line and said package ground plane.

2. The interconnect package of claim 1 wherein said interconnect transmission line is electromagnetically coupled to the chip contact pad.

3. The interconnect package of claim 1 wherein said interconnect transmission line faces the first surface of the chip and said means for waveguide transmission further includes a solder bump disposed between the chip contact pad and said interconnect transmission line.

4. The interconnect package of claim 1 wherein said interconnect transmission line faces away from the first surface of the chip and said means for waveguide transmission further includes:

a metallized via formed through said interconnect member, said via being in electrical contract with said interconnect transmission line; and

a solder bump disposed between the chip contact pad and said via.

11. The interconnect package of claim 1 and further including:

an input/output substrate disposed on the surface of said support member facing said interconnect member;

an input/output interconnect disposed on said input/output substrate; and

means for coupling said interconnect transmission line to said input/output interconnect.

13. The interconnect package of claim 1 and further comprising:

a lid disposed such that said interconnect member is positioned between said lid and said support member; and

a seal ring surrounding said interconnect member and disposed between said lid and said support member.

14. The interconnect package of claim 1 wherein said interconnect member has a first surface facing said support member and a second surface facing away from said support member, said interconnect package further comprising:

means for providing circuit components on at least one of said first surface of said interconnect member, said second surface of said interconnect member and the surface of said support member facing said interconnect member.

43. The interconnect package of claim 2 wherein said interconnect transmission line is disposed on the surface of said interconnect member facing the first surface of the chip.

44. The interconnect package of claim 2 wherein said interconnect transmission line is disposed on the surface of said interconnect member facing away from the first surface of the chip.

45. The interconnect package of claim 2 wherein said means for waveguide transmission further includes:

hard stops for providing substantially uniform spacing between said interconnect member and said support member.

46. The interconnect package of claim 1 wherein said means for waveguide transmission further includes:

said chip ground plane being in substantial planar contact with said package ground means.

5. An interconnect package for a monolithic microwave integrated circuit chip having an RF contact pad on a first surface, the interconnect package including:

a support member for supporting the chip;

an interconnect member disposed in opposing relation to the first surface of the chip for transmission of at least one of electrical currents or signals to and from the chip;

a package ground means on said support member wherein a chip ground plane on a second surface of the chip is in substantial planar contact with said package ground means;

an RF interconnect transmission line disposed on a surface of said interconnect member, said RF interconnect transmission line having a first end;

dielectric layer disposed between said RF interconnect transmission line and said package ground means; and

RF coupling means for coupling the RF contact pad with said first end of said RF interconnect transmission line;

wherein said RF interconnect transmission line, said package ground means and said dielectric layer form a waveguide for transmission of RF signals to and from the chip.

6. The interconnect package of claim 5 wherein said RF coupling means includes:

said RF interconnect transmission line being disposed on the surface of said interconnect member facing the first surface of the chip; and

a solder bump disposed between the RF contact pad on the chip and said first end of said RF interconnect transmission line.

7. The interconnect package of claim 5 wherein said RF coupling means includes means for electromagnetically coupling said RF interconnect transmission line and the RF contact pad on the chip.

8. The interconnect package of claim 7 wherein said RF interconnect transmission line is disposed on the surface of said interconnect member facing the first surface of the chip.

9. The interconnect package of claim 7 wherein said RF interconnect transmission line is disposed on the surface of said interconnect member facing away from the first surface of the chip.

10. The interconnect package of claim 7 wherein said RF coupling means further includes:

hard stops for providing substantially uniform spacing between said interconnect member and said support member.

12. The interconnect package of claim 5 wherein said support member includes a recess formed therein for retaining the chip.

15. An interconnect package for a monolithic microwave integrated circuit chip, comprising:

a carrier having a recess in a first surface thereof to retain the chip;

a package ground means disposed on a second surface of said carrier, whereby a chip ground plane on a first surface of the chip is in substantial planar contact with said package ground means;

an interconnect substrate positioned proximate to and substantially parallel to said first surface of said carrier, said interconnect substrate having;

an RF interconnect transmission line disposed on a surface of said interconnect substrate; and

a DC interconnect transmission line disposed on a surface of said interconnect substrate;

a dielectric layer disposed between said interconnect transmission lines and said package ground means;

means for coupling an RF contact pad on the chip to said RF interconnect transmission line; and

means for coupling a DC contact pad to the chip to said DC interconnect transmission line;

whereby said RF interconnect transmission line, said package ground means and said dielectric layer form a waveguide for transmission of RF signals to and from the RF contact pad of the chip.

16. The interconnect package of claim 15 and further comprising:

an RF input/output interconnect on said first surface of said carrier;

a DC input/output interconnect on said first surface of said carrier;

means for coupling said RF input/output interconnect to said RF interconnect transmission line; and

means for coupling said DC input/output interconnect to said DC interconnect transmission line.

17. The interconnect package of claim 15 wherein said RF coupling means includes:

means for electromagnetically coupling said RF interconnect transmission line to the RF contact pad on the chip.

18. The interconnect package of claim 17 wherein said RF coupling means includes:

means for directly coupling said RF interconnect transmission line to the RF contact pad on the chip.

19. The interconnect package of claim 18 wherein said direct RF coupling means comprises:

a solder bump disposed between the RF contact pad on the chip and said RF interconnect transmission line.

20. The interconnect package of claim 15 wherein said RF interconnect transmission line on said interconnect substrate faces said first surface of said carrier.

21. The interconnect package of claim 15 wherein said RF interconnect transmission line on said interconnect substrate faces away from said first surface of said carrier.

22. The interconnect package of claim 15 wherein said dielectric layer includes:

an air gap having a substantially uniform thickness.

23. The interconnect package of claim 15 wherein said dielectric layer includes:

said dielectric interconnect substrate.

24. The interconnect package of claim 15 wherein said RF and DC interconnect transmission lines comprise:

thin-film microstrip patterned onto said dielectric interconnect substrate.

25. The interconnect package of claim 15 wherein said DC coupling means includes:

a solder bump disposed between the DC contact pad on the chip and said DC interconnect transmission line.

26. The interconnect package of claim 15 wherein:

said RF interconnect transmission line is disposed on a first surface of said interconnect substrate; and

said DC interconnect transmission line is disposed on a second surface of said interconnect substrate, said second surface being different from said first surface.

27. The interconnect package of claim 15 wherein:

said RF interconnect transmission line is disposed on the same surface of said interconnect substrate as said DC interconnect transmission line.

28. The interconnect package of claim 15 wherein said interconnect substrate has a surface facing away from said carrier and wherein said DC coupling means includes:

said DC interconnect transmission line being disposed on said surface of said interconnect substrate facing away from said carrier;

a metallized via formed through said interconnect substrate in electrical contact with said DC interconnect transmission line; and

a solder bump for providing electrical contact between said metallized via and the DC contact pad on the chip.

29. The interconnect package of claim 15 and further including:

a lid disposed such that the chip and said interconnect substrate are positioned between said lid and said carrier; and

a seal ring surrounding said interconnect substrate and disposed between said lid and said carrier.

30. An interconnect package for an integrated circuit chip having an internal waveguide for transmission of RF signals within the chip and connected to at least one chip contact pad on a first surface, comprising:

a carrier having a recess formed in a first surface thereof for retaining the chip;

means for waveguide transmission of RF signals to and from the chip, including;

an interconnect substrate disposed proximate and substantially parallel to said carrier;

an interconnect transmission line disposed on a surface of said substrate and having first and second ends;

a conductive surface supported by said carrier in opposing relation to said interconnect transmission line; and

dielectric means disposed between said interconnect transmission line and said conductive surface; and

means for coupling the at least one chip contact pad on a chip to be retained in the recess to said first end of said interconnect transmission line for substantially continuous waveguide transmission of RF signals to and from the chip to be retained in the recess.

31. The interconnect package of claim 30 wherein said interconnect transmission line faces the first surface of the chip and said means for coupling includes a solder bump disposed between the chip contact pad and said first end of said interconnect transmission line.

32. The interconnect package of claim 30 wherein said interconnect transmission line faces away from said first surface of the chip and said means for coupling includes:

a metallized via formed through said interconnect substrate and in electrical contract with said first end of said interconnect transmission line; and

a solder bump disposed between the chip contact pad and said via.

33. The interconnect package of claim 30 and further including:

an input/output substrate disposed on said first surface of said carrier substrate;

an input/output interconnect disposed on said input/output substrate; and

means for coupling said second end of said interconnect transmission line to said input/output interconnect.

40. The interconnect package of claim 30 and further comprising:

a lid disposed on the interconnect package such that said interconnect substrate is positioned between said lid and said carrier; and

a seal ring surrounding said interconnect substrate and disposed between said lid and said carrier.

41. The interconnect package of claim 40 wherein said base, said I/O substrate, said interconnect substrate, said lid and said seal ring are formed from materials having coefficients of thermal expansion which are closely matched with the coefficient of thermal expansion of the chip.

42. The interconnect package of claim 30 wherein said interconnect substrate has a first surface facing said carrier and a second surface facing away from said carrier, said interconnect package further comprising means for providing peripheral circuit components on at least one of:

said first surface of said interconnect substrate, said second surface of said interconnect substrate and the surface of said carrier facing said interconnect substrate.

34. An interconnect package for an integrated circuit chip having at least one chip contact pad on a first surface, comprising:

a carrier having a recess formed in a first surface thereof for retaining the chip;

an interconnect substrate disposed proximate and substantially parallel to said carrier;

an interconnect transmission line disposed on a surface of said substrate and having first and second ends;

means for coupling the chip contact pad to said first end of said interconnect transmission line, wherein said interconnect transmission line is operable for transmission of electrical currents to and from the chip; and

means for transmission of RF signals to and from the chip, comprising;

a package ground means disposed on a second surface of said carrier wherein a chip ground plane on a second surface of the chip is in substantial planar contact with said package ground means;

an RF interconnect transmission line disposed on a surface of said interconnect substrate, said RF interconnect transmission line having a first end;

a dielectric layer disposed between said RF interconnect transmission line and said package ground means; and

RF coupling means for coupling the contact pad with a first end of said RF interconnect transmission line;

wherein said RF interconnect transmission line, said package ground means and said dielectric layer form a waveguide for transmission of RF signals.

35. The interconnect package of claim 34 wherein said RF coupling means includes:

said RF interconnect transmission line being disposed on the surface of said interconnect substrate facing the first surface of the chip; and

a solder bump disposed between the contact pad on the chip and said first end of said RF interconnect transmission line.

36. The interconnect package of claim 34 wherein said RF coupling means includes means for electromagnetically coupling said RF interconnect transmission line and the contact pad on the chip.

37. The interconnect package of claim 36 wherein said RF interconnect transmission line is disposed on the surface of said interconnect substrate facing the first surface of the chip.

38. The interconnect package of claim 36 wherein said RF interconnect transmission line is disposed on the surface of the interconnect substrate facing away from the first surface of the chip.

39. The interconnect package of claim 34 wherein said RF coupling means further includes:

means for providing substantially uniform spacing between said interconnect substrate and said carrier.