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Circuit for adjusting the impedance of a plasma section to a high-frequency generator

  • US 5,140,223 A
  • Filed: 09/25/1989
  • Issued: 08/18/1992
  • Est. Priority Date: 07/18/1989
  • Status: Expired due to Fees
First Claim
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1. A device for a steadily burning plasma comprising a high frequency generator designed for a load of approximately fifty Ohms and having a frequency of approximately 13.56 MHz;

  • a plasma chamber (3) comprising a first electrode (7) and a sound electrode (4);

    a matching circuit (2) connecting said first and second electrodes (7,4) with said high frequency generator (1);

    said matching circuit (2) including two parallel resonant circuits (12, 13;

    9,

         10) coupled with a first fixed capacitance (11) and having capacitive input and output connections with second and third fixed capacitances (14,

         8), respectively;

    said parallel resonant circuits (12, 13;

    9,

         10) being placed on one side of a ground connection, the two parallel resonance circuits (12, 13;

    9,

         10) each including a fixed inductor and a variable shunt capacitor, the parallel resonance circuit (12,

         13) on the generator side having an inductance of 750 nH and a variable capacitance of 10 pF to 500 pF, and the load-side resonance circuit (9,

         10) having an inductance of 500 nH and a variable capacitance of 10 pF to 500 pF, said two parallel resonant circuits (12, 13;

    9,

         10) being connected with one of their sides to ground and being placed in a cooling device.

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