Cryogenic cooling of circuit boards

• US 5,142,443 A
• Filed: 04/29/1991
• Issued: 08/25/1992
• Est. Priority Date: 04/29/1991
• Status: Expired due to Fees

• Current Assignee: Koch Process Systems, Inc. (KOCH Industries Incorporated)
• Original Assignee: Koch Process Systems, Inc. (KOCH Industries Incorporated)
• Inventors: Moore, Raymond W. Jr.
• Primary Examiner(s): Thompson, Gregory D.
• Application Number:
  US07/692,608
• Time in Patent Office: 484 Days
• Field of Search: 174/15.4, 357/81, 357/82, 357/83, 361/382, 361/385, 361/386, 361/388, 361/389
• US Class Current: 361/718
• CPC Class Codes: H01L 23/445 the fluid being a liquefied gas, e.g. in a cryogenic vessel
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

A mounting arrangement for electronic circuit chips in which at least one chip is mounted upon an appropriately electrically insulating chip plate. A connector board is mounted on top of the chip plate to electrically connect the chip with a cable allowing signals to be passed to and from the chip. The chip plate is mounted for good thermal conductivity to a refrigerator cold head. A plate formed of a material with good heat conductitivity properties may be interposed between the chip plate and the cold head. This plate may include an element, such as a spring biased piston, which contacts the chip to allow heat transfer by conduction. The refrigerator cold head forms the upper surface of the expansion space in a Stirling-cycle cryogenic cooling engine. To reduce power requirements, the elements are insulated from contact with the atmosphere. Specifically, the elements are enclosed in a vessel which includes a double walled hood having insulating material and a high vacuum between the double walls to reduce heat transfer. Additionally, bulk insulation may be placed around the refrigerator cold head and aluminum plate within the confines of the hood. Finally, sealing means are provided at the bottom of the hood to seal the interior of the vessel, thus further reducing heat transfer.

Claims

1. A cryogenic cooling mount for integrated circuits, comprising:

a chip support plate for supporting at least one integrated circuit chip;

means for allowing electrical communication with the chip;

a piston plate supporting said support plate, said piston plate being formed of a material allowing thermal conductivity through said piston plate;

a cold head supporting, and in thermal communication with, said piston plate, said cold head being formed of a material allowing thermal conductivity through said cold head;

cryogenic heat sink means in thermal communication with said cold head, at least a portion of said cold head forming operative structure of said heat sink means; and

thermally insulating hood means surrounding said support plate, said piston plate and said cold head, said head means being coupled to said cold head.

2. A mount as in claim 1, wherein said hood means includes a hood comprising spaced outer and inner hood shells defining an interior space therebetween, and said hood further comprising a thermally insulating material within said interior space.

3. A mount as in claim 2, further comprising:

a thermally insulating mass surrounding the periphery of said cold head and said piston plate, said mass being interposed between said hood means and said cold head and piston plate.

4. A mount as in claim 2, wherein said hood means further includes a support hub coupled to, and extending outwardly from, said cold head, said support hub supporting said hood.

5. A mount as in claim 4, wherein said hood means further includes a seal between said support hub and said hood.

6. A mount as in claim 5, including an integrated circuit chip supported on said chip support plate and wherein said means allowing electrical communication includes electrically conductive cable means operatively connected to said chip and extending to the exterior of said hood, and wherein said hood means further includes an intermediate ring and an intermediate seal, said support hub supporting said intermediate ring with said seal and said cable means interposed between said support hub and intermediate ring, and wherein said intermediate ring supports said hood with said intermediate seal interposed between said intermediate ring and said hood.

7. A mount as in claim 1, wherein said piston plate is biased into contact with said cold head.

8. A mount as in claim 7, further comprising:

a cooling plate interposed between, and in thermal communication with, said cold head and said piston plate, said cooling plate being formed of a material allowing thermal conductivity through said cooling plate.

9. A mount as in claim 8, further comprising:

a shim of relatively soft material allowing thermal conductivity interposed between, and in thermal communication with, said cold head and said cooling plate.

10. A cryogenic cooling mount for integrated circuits, comprising:

a chip support plate supporting an integrated circuit chip;

means for allowing electrical communication with said chip;

a piston plate supporting said support plate, said piston plate being formed of a material allowing thermal conductivity through said piston plate, said piston plate including a cavity extending therein associated with said chip, said cavity being located within said piston plate to substantially correspond to, and communicate with, the position of said chip when said piston plate supports said support plate;

a piston located in each said cavity, said piston being formed of a material allowing thermal conductivity through said piston;

means biasing said piston into physical contact, and therefore thermal communication, with said chip;

a cold head supporting, and in thermal communication with, said piston plate, said cold head being formed of a material allowing thermal conductivity through said cold head;

cryogenic heat sink means in thermal communication with said cold head; and

thermally insulating hood means surrounding said support plate, said piston plate and said cold head, said hood means being coupled to said cold head.

11. A mount as in claim 10, wherein said hood means includes a hood comprising spaced outer and inner hood shells defining an interior space therebetween, and said hood further comprising a thermally insulating material within said interior space.

12. A mount as in claim 11, further comprising:

a thermally insulating mass surrounding the periphery of said cold head and said piston plate, said mass being interposed between said hood means and said cold head and piston plate.

13. A mount as in claim 12, wherein said insulating mass is self-supporting.

14. A mount as in claim 13, wherein said hood means further includes a support hub coupled to, and extending outwardly from, said cold head, said support hub supporting said hood.

15. A mount as in claim 14, wherein said hood means further includes a seal between said support hub and said hood.

16. A mount as in claim 15, wherein said means allowing electrical communication includes electrically conductive cable means operatively connected to said chip and extending to the exterior of said hood, and wherein said hood means further includes an intermediate ring and an intermediate seal, said support hub supporting said intermediate ring with said seal and said cable means interposed between said support hub and intermediate ring, and wherein said intermediate ring supports said hood with said intermediate seal interposed between said intermediate ring and said hood.

17. A mount as in claim 10, wherein said piston plate is biased into contact with said cold head.

18. A mount as in claim 17, further comprising:

a cooling plate interposed between, and in thermal communication with, said cold head and said piston plate, said cooling plate being formed of a material allowing thermal conductivity through said cooling plate.

19. A mount as in claim 18, further comprising:

a shim of relatively soft material allowing thermal conductivity interposed between, and in thermal communication with, said cold head and said cooling plate.

20. A mount as in claim 10, further comprising an adsorbent material coupled to an interior surface of said hood means, or a surface of said piston plate or said cold head.