Method for fabrication of force sensing elements by laminating dielectric tape
First Claim
1. Method for fabrication of a force sensing element for use in a force sensor which comprises the steps of:
- A) providing unfired ceramic tape;
B) fabricating a lamina which includes said tape byi) disposing a conductor and thick film resistor system on said tape;
ii) disposing said tape on a ceramic substrate;
iii) firinga) said system to said tape, andb) said tape to said substrate;
C) wherein during the fabrication process, a portion of said tape is disposed to overhang an edge portion of said substrate and thereby provide a force sensing zone which, in the fabricated sensing element, is effective to induce measurable strain in said tape in response to force acting on said zone, andD) wherein during the fabrication process, said system is disposed on said tape so as to be effective, in the fabricated sensing element, to measure strain induced in said tape in response to force acting on said zone and thereby provide a signal thereof which is capable of electrical detection.
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Accused Products
Abstract
Unfired ceramic tape is fired to a ceramic substrate during the laminar fabrication of a thick film force sensing element to provide the fabricated sensing element with a force sensing zone which is effective in response to the application of force thereto to induce strain in the fired ceramic tape. A conductor and thick film resistor system is printed and fired to the tape during the fabrication process to provide the fabricated sensing element with an electrically detectable signal correlating with the induced strain. Accelerometer and pressure sensor embodiments are disclosed. The invention is well-suited for the commercial mass-production of sensing elements, such as for automotive vehicle usage, because it can practiced through the use of automated production processes.
11 Citations
21 Claims
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1. Method for fabrication of a force sensing element for use in a force sensor which comprises the steps of:
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A) providing unfired ceramic tape; B) fabricating a lamina which includes said tape by i) disposing a conductor and thick film resistor system on said tape; ii) disposing said tape on a ceramic substrate; iii) firing a) said system to said tape, and b) said tape to said substrate; C) wherein during the fabrication process, a portion of said tape is disposed to overhang an edge portion of said substrate and thereby provide a force sensing zone which, in the fabricated sensing element, is effective to induce measurable strain in said tape in response to force acting on said zone, and D) wherein during the fabrication process, said system is disposed on said tape so as to be effective, in the fabricated sensing element, to measure strain induced in said tape in response to force acting on said zone and thereby provide a signal thereof which is capable of electrical detection. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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- 13. A force sensing element comprising a ceramic substrate, a ceramic tape that has been fired onto said substrate, said substrate and said tape being constructed and arranged such that a portion of said tape is disposed to overhang an edge portion of said substrate and thereby form a force sensing zone which is effective to induce measurable strain in said tape in response to force acting on said zone, and a conductor and thick film resistor system disposed on said tape so as to be effective to measure strain induced in said tape in response to force acting on said zone and thereby provide a signal thereof which is capable of electrical detection.
Specification