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Horizontal microelectronic field emission devices

  • US 5,144,191 A
  • Filed: 06/12/1991
  • Issued: 09/01/1992
  • Est. Priority Date: 06/12/1991
  • Status: Expired due to Term
First Claim
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1. A microelectronic field emitter comprising:

  • a horizontal substrate having a horizontal face;

    a first insulating layer on said horizontal face, said first insulating layer having a first vertical sidewall;

    a first horizontal emitter electrode on said first insulating layer with one end thereof extending adjacent said first vertical sidewall; and

    a vertical extraction electrode on said first vertical sidewall with one end thereof extending adjacent said first horizontal emitter electrode, said one end of said first horizontal emitter electrode and said one end of said vertical extraction electrode forming an electron emission gap therebetween anda horizontal cap, spaced from said horizontal face, for encapsulating said first horizontal emitter electrode and said vertical extraction electrode.

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