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Semiconductor device which relieves internal stress and prevents cracking

  • US 5,144,391 A
  • Filed: 02/20/1991
  • Issued: 09/01/1992
  • Est. Priority Date: 02/28/1990
  • Status: Expired due to Term
First Claim
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1. A semiconductor device for relieving stress and preventing cracking, comprising:

  • a semiconductor thin film;

    first and second insulator films provided in such arrangement that said semiconductor thin film is sandwiched therebetween and each contains a constituent element of said semiconductor thin film; and

    means for relieving internal stress and preventing cracking, said relieving and preventing means including first and second multilayered graded layers each having a plurality of respective insulating thin films each containing the constituent element of said semiconductor thin film and a constituent element of said insulator films deposited therein so that a content of the constituent element of the insulator films in said insulating thin films decreases in the direction of said semiconductor thin film, said first and second multilayered graded layers each being interposed between said semiconductor thin film and a respective one of said insulator films.

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