Acoustic transducer
First Claim
1. An acoustic transducer comprising:
- perforated plate means;
movable capacitor plate spaced from said perforated plate means;
spring means interconnecting said movable plate means and said perforated plate means for movably supporting said movable capacitor plate means relative to said perforated plate means;
said perforated plate, movable plate and spring means made from a silicon wafer, and said perforated plate, movable plate, and spring means forming a unified monolithic structure;
a dielectric fluid in the space between said movable and perforated plate means; and
means for applying an electric field across said movable and perforated plate means for producing an output signal representative of the variation in capacitance induced by the variation of the space between the plates in response to an incident acoustic signal.
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Accused Products
Abstract
An acoustic transducer includes a perforated capacitor plate; a movable capacitor plate spaced from the perforated plate; springs for movably supporting the movable capacitor plate relative to the perforated plate; and a support structure for supporting the perforated and movable plates, where the movable plate is interconnected to the support structure by the springs and where the plates, springs and support structure form a unified, monolithic structure. The movable plate, springs and support structure are made from a silicon wafer. The transducer also includes a dielectric fluid in the space between the plates; and equipment for applying an electric field across the plates for producing an output signal representative of the variation in capacitance induced by the variation in space between the plates in response to an acoustic signal.
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Citations
30 Claims
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1. An acoustic transducer comprising:
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perforated plate means; movable capacitor plate spaced from said perforated plate means; spring means interconnecting said movable plate means and said perforated plate means for movably supporting said movable capacitor plate means relative to said perforated plate means; said perforated plate, movable plate and spring means made from a silicon wafer, and said perforated plate, movable plate, and spring means forming a unified monolithic structure; a dielectric fluid in the space between said movable and perforated plate means; and means for applying an electric field across said movable and perforated plate means for producing an output signal representative of the variation in capacitance induced by the variation of the space between the plates in response to an incident acoustic signal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30)
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Specification