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Acoustic transducer

  • US 5,146,435 A
  • Filed: 12/04/1989
  • Issued: 09/08/1992
  • Est. Priority Date: 12/04/1989
  • Status: Expired due to Term
First Claim
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1. An acoustic transducer comprising:

  • perforated plate means;

    movable capacitor plate spaced from said perforated plate means;

    spring means interconnecting said movable plate means and said perforated plate means for movably supporting said movable capacitor plate means relative to said perforated plate means;

    said perforated plate, movable plate and spring means made from a silicon wafer, and said perforated plate, movable plate, and spring means forming a unified monolithic structure;

    a dielectric fluid in the space between said movable and perforated plate means; and

    means for applying an electric field across said movable and perforated plate means for producing an output signal representative of the variation in capacitance induced by the variation of the space between the plates in response to an incident acoustic signal.

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