Apparatus for testing integrated circuits
First Claim
1. Apparatus for testing integrated circuit chips comprising:
- a fixture mounting member having test circuitry connections,an elastomeric member carried by said mounting member and having a plurality of connector elements thereon,said elements being electrically connected to said test circuitry connections, anda probe comprising;
a flexible membrane,a plurality of contact pads on said membrane,a plurality of electrical conductors on said membrane electrically connected to said contact pads, said conductors and contact pads being positioned on one side of said membrane,a substrate having a first side supporting said membrane and having a second side,means for connecting said membrane to said fixture mounting member,a plurality of membrane connector pads formed on said second side of said substrate and connected to said conductors,said probe being positioned in said fixture mounting member with said membrane connector pads in contact with said connector elements of said elastomeric member.
2 Assignments
0 Petitions
Accused Products
Abstract
A membrane probe (10, 12, 14, 16, 58, 144) for testing integrated circuits (56,138) while still on the wafer upon which they are manufactured includes a flexible visually clear and self planarizing membrane (26) having circuit traces (20) and ground shielding planes (14), terminating resistor (152) and active buffer chips (172) formed thereon. Probe contact pads (36,38) electroplated on areas of the traces, and connector pads (32) plated on the membrane facilitate rapid detachable connection to a test fixture (50). The probe has a configuration, dimension and structure like that of the wafer itself so that automated pick and place equipment (136, 142) employed for handling the wafers (138) may also be used to handle the probes (144). An unique test fixture (50) is adapted to receive and detachably secure a selected probe to the fixture. A metal-on-elastomer annulus (88,104) is employed in the test fixture to make electrical contact between contact pads (32) plated on the back side of the membrane probe and a printed circuit board that is used to route signals to the testing equipment.
224 Citations
15 Claims
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1. Apparatus for testing integrated circuit chips comprising:
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a fixture mounting member having test circuitry connections, an elastomeric member carried by said mounting member and having a plurality of connector elements thereon, said elements being electrically connected to said test circuitry connections, and a probe comprising; a flexible membrane, a plurality of contact pads on said membrane, a plurality of electrical conductors on said membrane electrically connected to said contact pads, said conductors and contact pads being positioned on one side of said membrane, a substrate having a first side supporting said membrane and having a second side, means for connecting said membrane to said fixture mounting member, a plurality of membrane connector pads formed on said second side of said substrate and connected to said conductors, said probe being positioned in said fixture mounting member with said membrane connector pads in contact with said connector elements of said elastomeric member. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. Apparatus for testing integrated circuit chips comprising:
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a fixture mounting member having test circuitry connections, an elastomeric member connected to said mounting member and having a plurality of connector elements thereon, said elements being electrically connected to said test circuitry connections, a probe including; a probe body having first and second sides, probe contact elements on said first probe side, probe connector pads on said second probe side, and electrically connected to said probe contact elements, and cooperating means on said fixture mounting member and probe for detachably mechanically interconnecting said probe to said fixture mounting member in a probe operational position, said probe connector pads in said operational position of said probe being in firm electrical contact with said connector elements of said elastomeric member. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. Apparatus for testing integrated circuit chips comprising:
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a fixture mounting plate having test circuitry connections, a gas chamber housing mounted to said fixture mounting plate, an annular circuit board carried by said fixture mounting plate and having an internal aperture receiving a portion of said gas chamber housing, said circuit board having a plurality of electrical conductors, an annular elastomeric member carried by said circuit board and having elastomeric member connector elements connected to said circuit board electrical conductors, a probe including; a flexible probe body having first and second sides, probe contact elements on said first probe side, and probe connector pads on said second probe side electrically connected to said probe contact elements, said probe connector pads being in contact with and pressing against said elastomeric member connector elements, vacuum means extending into said gas chamber housing having a vacuum aperture adjacent said probe body for attaching said probe body to said mounting plate and circuit board with said probe connector pads in contact with and pressed against said elastomeric member connector elements, said gas chamber housing having an opening in contact with said second probe side, and means for introducing gas under pressure into said gas chamber housing to press said probe body away from said gas chamber housing.
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Specification