Switch matrix including optically non-linear elements

• US 5,150,183 A
• Filed: 05/10/1989
• Issued: 09/22/1992
• Est. Priority Date: 07/10/1987
• Status: Expired due to Fees

• Current Assignee: Kernforschungszentrum Karlsruhe GmbH
• Original Assignee: Kernforschungszentrum Karlsruhe GmbH
• Inventors: Mikosch, Falk, Smith, Stanley D.
• Primary Examiner(s): Hille, Rolf
• Assistant Examiner(s): TRAN, MINH LOAN
• Application Number:
  US07/349,615
• Time in Patent Office: 1,231 Days
• Field of Search: 357/32, 357/30 B, 357/30 D, 357/30 E, 357/30 H, 357/30 R, 357/55, 357/61, 357/68, 350/353, 350/354, 350/355, 350/356, 350/386, 350/96.13, 307/117, 359/240, 359/245, 359/248, 359/276, 385/16, 385/17
• US Class Current: 359/245
• CPC Class Codes: G02F 3/02 Optical bistable devices

Abstract

A switch matrix which comprises non-linear optical (e.g. bistable) elements each consisting of an optically active layer applied to a substrate. The surface of the substrate has a microstructure composed of pillars each of which functions as a switch element and has at least one optically active layer. The pillar structure prevents interaction due to thermal contact and diffusion of charge carriers across the optically active layer and the substrate. The lithographic-galvanic (LIGA) process described is suited to the mass production of these structured substrates my moulding plastics. Both transparent and opaque substrates with high aspect ratios and adequate stability can be advantageously manufactured in this way.

Claims

1. In a switch matrix composed of a plurality of optically non-linear elements disposed as optically active layers on a common substrate surface;

the improvement wherein;

the substrate surface is a microstructure composed of a plurality of pillars with lateral spacings in a micron range; and

the optically active layers of the respective devices are applied to respective frontal faces of free pillar ends in a cross-sectional region of the pillars.

2. Switch matrix according to claim 1, wherein the substrate is transparent.

3. A switch matrix according to claim 2 wherein said substrate is formed of plexiglass.

4. Switch matrix according to claim 1, wherein the substrate is non-transparent.

5. A switch matrix according to claim 4 wherein said substrate is formed of a metal.

6. A switch matrix according to claim 5 wherein said metal is formed of at least one of Ni and Cu.

7. A switch matrix according to claim 1 wherein said pillars have a height which is a multiple of said lateral spacing and of the cross-sectional dimension of said pillars.

8. A switch matrix according to claim 7 wherein:

said pillars have a height of approximately 500 μ

m and a cross-sectional dimension of approximately 10-30 μ

m, and said lateral spacing is approximately 5 μ

m.

9. A switch matrix according to claim 1 wherein said substrate is formed of a semiconductor material.

10. A switch matrix according to claim 1 wherein said switch elements are responsive to light to switch same between substantially transparent and opaque states.

11. A switch matrix according to claim 1 wherein the spaces between said pillars have an aspect ratio greater than 5.

12. A switch matrix according to claim 1 wherein said microstructure of spaced pillars has an aspect ratio greater than 5 and up to 100.