Treatment system having gate device for decompression chamber

• US 5,150,882 A
• Filed: 07/17/1991
• Issued: 09/29/1992
• Est. Priority Date: 07/20/1990
• Status: Expired due to Fees

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Kaneko, Satoshi
• Primary Examiner(s): Fox, John C.
• Application Number:
  US07/731,474
• Time in Patent Office: 440 Days
• Field of Search: 251/193, 251/203, 251/280, 251/368
• US Class Current: 251/193
• CPC Class Codes: H01J 2237/186 Valves
• CPC Class Codes: H01J 37/18 Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel vacuum locks for electron-beam tubes in general H01J29/865
• CPC Class Codes: H01J 37/3405 Magnetron sputtering
• CPC Class Codes: H01L 21/67126 Apparatus for sealing, encapsulating, glassing, decapsulating or the like processes H01L23/02, H01L23/28

Abstract

A toggled gate device to be used for opening and closing a gate aperture leading to a magnetron plasma etching apparatus comprises a gate for being pressed against the wall defining the gate aperture to hermetically cover the gate aperture. The gate is supported by a support member such that the gate is movable in substantially the horizontal direction toward and away from the gate aperture. The support member is vertically driven by a cylinder. Stopper plates are arranged at an upper portion of the gate and provided with a surface inclined divergently from the edge remote from the gate aperture toward the edge close to the gate aperture. Rollers are arranged on the wall to abut the respective stopper plates. The stopper plates and the rollers are made of an iron or nickel-based double boride hard alloy. Part of the force applied to the rollers by the gate through the respective stopper plates is converted into a force moving and urging the gate toward the wall.

Claims

1. A treatment system having a gate device for a decompression chamber to be used for opening and closing a gate aperture through which an object to be treated is loaded and unloaded, comprising:

wall means for defining the gate aperture arranged on it;

a gate for being pressed against said wall means to hermetically cover the gate aperture;

a support member for supporting said gate, said support member being movable toward and away from said gate aperture in a first direction;

means for driving said support member in a second direction substantially perpendicular to said first direction;

a stopper plate arranged at an end of said gate in said second direction and having a surface inclined divergently from an edge remote from the gate aperture toward an edge close to the gate aperture, said stopper plate being made of a material selected from sapphire, ruby and an iron or nickel-based double boride hard alloy;

a roller arranged to abut said stopper plate, the axis of said roller being stationary relative to said wall means; and

converting means for converting part of a force applied to said roller by said gate through said stopper plate in said second direction into a force moving and urging said gate toward said wall means in said first direction.

2. A treatment system according to claim 1, wherein said stopper plate is made of an iron or nickel-based double boride hard alloy.

3. A treatment system according to claim 1, wherein said roller is made of a material selected from sapphire, ruby and an iron or nickel-based double boride hard alloy.

4. A treatment system according to claim 3, wherein said roller is made of an iron or nickel-based double boride hard alloy.

5. A treatment system according to claim 3, wherein said device further comprises a rail held stationary relative to said wall means and defining a track of said support member in said second direction, and a bearing arranged to engage with said rail and secured to said support member, said bearing being made of a material selected from sapphire, ruby and an iron or nickel-based double boride hard alloy.

6. A treatment system according to claim 5, wherein said device is used to close or open a gate aperture leading to a magnetron plasma etching apparatus.

7. A treatment system according to claim 5, wherein said gate device is a toggled gate device.

8. A treatment system having a gate device for a decompression chamber to be used for opening and closing a gate aperture through which an object to be treated is loaded and unloaded, comprising:

wall means for defining the gate aperture arranged on it;

a gate for being pressed against said wall means to hermetically cover the gate aperture;

a support member for supporting said gate, said support member being movable toward and away from said gate aperture in a first direction;

means for driving said support member in a second direction substantially perpendicular to said first direction; and

converting means for converting part of a force applied to said support member in said second direction into a force which moves and urges said gate toward said wall means in said first direction;

wherein;

a whole or part of each of the device+s components directly subjected to friction between a part stationary relative to the wall means and a part movable relative to the wall means is made of a material selected from sapphire, ruby and an iron or nickel-based double boride hard alloy; and

said components subject to friction comprise a stopper plate arranged at an end of said gate in said second direction and a roller arranged to abut said stopper plate, the axis of said roller being stationary relative to said wall means.

9. A treatment system according to claim 8, wherein the material for said stopper plate and said roller is an iron or nickel-based double boride hard alloy.

10. A treatment system having a gate device for a decompression chamber to be used for opening and closing a gate aperture through which an object to be treated is loaded and unloaded, comprising:

wall means for defining the gate aperture arranged on it;

a gate for being pressed against said wall means to hermetically cover the gate aperture;

a support member for supporting said gate, said support member being movable toward and away from said gate aperture in a first direction;

means for deiving said support member in a second direction substantially perpendicular to said first direction; and

converting means for converting part of a force applied to said support member in said second direction into a force which moves and urges said gate toward said wall means in said first direction;

wherein;

a whole or part of each of the device'"'"'s components directly subjected to friction between a part stationary relative to the wall means and a part movable relative to the wall means is made of a material selected from sapphire, ruby and an iron or nickel-based double boride hard alloy; and

said components subject to friction comprise a rail held stationary relative to said wall means and defining a track of said support member in said second direction, and a bearing arranged to engage with said rail and secured to said support member.

11. A treatment system according to claim 10, wherein the material for said rail and said bearing is an iron or nickel-based double boride hard alloy.