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Magnetic field sensor contacts

  • US 5,153,557 A
  • Filed: 01/28/1991
  • Issued: 10/06/1992
  • Est. Priority Date: 01/28/1991
  • Status: Expired due to Term
First Claim
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1. A magnetic field sensor comprising:

  • a substrate having a surface;

    an active layer of indium antimonide on said substrate surface;

    a conductive contact on said active layer, said contact comprising a thin layer of an n-type conductivity semiconductor material which is highly conductive so as to have a low sheet resistance and a low contact resistance with the active layer, wherein the semiconductor material of the contact has a lattice constant close to that of indium antimonide; and

    a thin layer of a highly doped n-type indium antimonide between the semiconductor material and the active layer.

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