Magnetic field sensor contacts
First Claim
1. A magnetic field sensor comprising:
- a substrate having a surface;
an active layer of indium antimonide on said substrate surface;
a conductive contact on said active layer, said contact comprising a thin layer of an n-type conductivity semiconductor material which is highly conductive so as to have a low sheet resistance and a low contact resistance with the active layer, wherein the semiconductor material of the contact has a lattice constant close to that of indium antimonide; and
a thin layer of a highly doped n-type indium antimonide between the semiconductor material and the active layer.
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Accused Products
Abstract
A magnetic field sensor, such as a magnetoresistor, Hall effect device or magnetotransistor, comprising an active layer of indium antimonide on the surface of a substrate having a length substantially greater than its width. A conductive contact is on the active layer at each end thereof and a plurality of shorting bar contacts are on the active layer and spaced along the length of the active layer between the end contacts. The contacts are each of a thin layer of a highly conductive n-type conductivity semiconductor material which has a low sheet resistivity and a low contact resistance with the active layer. A layer of a conductive metal may be provided on the semiconductor material layer of the contact, and a thin layer of highly conductive n-type indium antimonide may be provided between the semiconductive material layer and the active layer.
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Citations
16 Claims
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1. A magnetic field sensor comprising:
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a substrate having a surface; an active layer of indium antimonide on said substrate surface; a conductive contact on said active layer, said contact comprising a thin layer of an n-type conductivity semiconductor material which is highly conductive so as to have a low sheet resistance and a low contact resistance with the active layer, wherein the semiconductor material of the contact has a lattice constant close to that of indium antimonide; and a thin layer of a highly doped n-type indium antimonide between the semiconductor material and the active layer. - View Dependent Claims (2, 3, 4, 5)
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6. A magnetoresistor comprising:
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a substrate having a surface; a narrow active layer of n-type conductivity indium antimonide on said substrate surface having a length substantially greater than its width; a conductive contact on said active layer at each end thereof; and a plurality of shorting bar contacts on said active layer spaced along the length of the active layer between the end contacts; each of said shorting bar contacts comprising a thin layer of an n-type conductivity semiconductor material which is highly conductive so as to have a low sheet resistance and a low contact resistance with the active layer, wherein the semiconductor material of the contact has a lattice constant close to that of indium antimonide; and a thin layer of highly doped n-type indium antimonide between the semiconductor material layer and the active layer. - View Dependent Claims (7, 8, 9, 10, 11, 12)
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13. A magnetoresistor comprising:
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a substrate having a surface; a narrow active layer of n-type conductivity indium antimonide on said substrate surface, said active layer having a length substantially greater than its width; a conductive contact on said active layer at each end thereof; a plurality of shorting bar contacts on said active layer spaced along the length of the active layer between the end contacts; each of said end contacts comprising a thin layer of an n-type conductivity semiconductor material which is highly conductive so as to have a low sheet resistance and a low contact resistance with the active layer, wherein the semiconductor material of the contact has a lattice constant close to that of the indium antimonide; and a thin layer of highly doped n-type indium antimonide between the semiconductor material layer of the contact and the active layer. - View Dependent Claims (14, 15, 16)
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Specification