Three wavelength optical measurement apparatus and method

• US 5,153,669 A
• Filed: 03/27/1991
• Issued: 10/06/1992
• Est. Priority Date: 03/27/1991
• Status: Expired due to Fees

• Current Assignee: Hughes Danbury Optical Systems Incorporated
• Original Assignee: Hughes Danbury Optical Systems Incorporated
• Inventors: DeGroot, P. J.
• Primary Examiner(s): Turner, Samuel A.
• Assistant Examiner(s): KURTZ, RICHARD
• Application Number:
  US07/676,144
• Time in Patent Office: 559 Days
• Field of Search: 356/349, 356/360, 356/355, 356/356, 356/357, 356/358
• US Class Current: 356/489
• CPC Class Codes: G01B 2290/30 Grating as beam-splitter
• CPC Class Codes: G01B 2290/70 Using polarization in the interferometer
• CPC Class Codes: G01B 9/02007 Two or more frequencies or sources used for interferometric measurement using only beat G01B9/02003
• CPC Class Codes: G01B 9/02027 Two or more interferometric channels or interferometers
• CPC Class Codes: G01B 9/02078 Caused by ambiguity
• CPC Class Codes: G01D 5/266 by interferometric means G01D5/353 takes precedence

Abstract

Optical metrology method and apparatus wherein three optical wavelengths are generated and separated into a reference beam (RB) and an object beam (OB) having substantially equal optical path lengths. After reflecting from a surface being measured OB is combined with RB and provided to sensors which measure the intensity associated with each of the wavelengths. Any difference between the intensities is indicative of a difference in the optical path lengths of OB and RB and is a function of the polarization state of each of the three returned wavelengths. Differences in optical path length are shown to be indicative of a displacement of the object being measured. Preferably, two multimode laser diodes (12,14) are provided for generating the three optical wavelengths. Two synthetic wavelengths are derived from the three optical wavelengths and are employed to improve the precision of measurement while retaining a large dynamic range made possible by the use of a large synthetic wavelength.

Claims

1. Optical metrology apparatus comprising:

optical source means including a plurality of laser means, at least one of which is a multi-mode laser diode means, the optical source means having an output beam that simultaneously includes at least three discrete optical wavelengths;

means, coupled to an output of the optical source means, for separating the output beam into a reference beam and into a measurement beam, the measurement beam being directed to a surface of interest;

means for combining into a combined beam the reference beam and a portion of the measurement beam that reflects from the surface of interest; and

means, responsive to a relative interferometric phase at each of the three optical wavelengths within the combined beam, for detecting a difference between an optical path length of the reference beam and an optical path length of the measurement beam.

2. Apparatus as set forth in claim 1 and further including an optical fiber for conveying the output beam and the combined beam.

3. Apparatus as set forth in claim 2 wherein the optical fiber is a single mode optical fiber.

4. Apparatus as set forth in claim 1 wherein the detecting means includes diffraction grating means for separating the combined beam into a plurality of beams each of which corresponds to one of the three wavelengths.

5. Apparatus as set forth in claim 4 and further comprising a plurality of photodetectors individual ones of which are disposed for receiving one of the plurality of beams for measuring a beam intensity thereof.

6. Apparatus as set forth in claim 5 and further including means, coupled to an output of each of the plurality of detectors, for processing the output thereof to determine a displacement of the surface of interest.

7. Apparatus as set forth in claim 1 wherein the optical source means includes a first multi-mode laser diode means providing at least two wavelengths and a second laser diode means providing a third wavelength.

8. Apparatus as set forth in claim 7 wherein each of the laser diode means is a multi-mode laser diode.

9. Apparatus as set forth in claim 1 wherein the separating means includes a polarizing beam splitter means disposed for receiving the optical output of the source means and for orthogonally polarizing the reference beam with respect to the measurement beam.

10. Apparatus as set forth in claim 1 wherein the separating means includes means for focussing the measurement beam upon the surface of interest.

11. Apparatus as set forth in claim 1 wherein the detecting means includes means for deriving a first synthetic wavelength and a second synthetic wavelength from the three optical wavelengths.

12. Apparatus as set forth in claim 1 and further including means for phase modulating the reference beam with respect to the measurement beam.

13. A method for performing optical metrology, comprising the steps of:

operating a plurality of laser means, at least one of which is a multimode laser diode means, for generating an optical output having a plurality of optical wavelengths;

modifying the optical output to provide a phase modulated reference beam and a measurement beam having a fixed polarization relationship one to another, the measurement beam being directed to and reflecting from a surface of interest;

combining the phase modulated reference beam and the reflected measurement beam into a combined beam; and

responsive to a relative interferometric phase at each of the three optical wavelengths within the combined beam, detecting a difference between an optical path length of the reference beam and an optical path length of the measurement beam.

14. A method as set forth in claim 13 wherein the step of modifying includes a step of phase modulating the reference beam.

15. A method as set forth in claim 13 wherein the step of detecting includes a step of deriving a first synthetic wavelength and a second synthetic wavelength from the plurality of optical wavelengths.

16. A method as set forth in claim 13 wherein the step of operating includes a step of simultaneously operating at least two multi-mode laser diodes.

17. A method as set forth in claim 13 and including a step of translating the surface of interest with respect to the measurement beam.

18. A method of performing optical metrology to determine an absolute distance (L), comprising the steps of:

operating at least one multi-mode laser diode means while generating a plurality of optical wavelengths (λ

) such that λ

₁ <

λ

₂ <

λ

₃, and deriving two corresponding synthetic wavelengths Λ

₁₂ >

Λ

₁₃ therefrom;

for L<

Λ

₁₂ /4, determining a first synthetic fringe order (M₁₂) in accordance with

space="preserve" listing-type="equation">M.sub.12 =f(M.sub.12)=f(m.sub.1)-f(m.sub.2),

where m₁ is the optical fringe order of λ

₁ and m₂ is the optical fringe order of λ

₂ ;

employing M₁₂ in determining M₁₃ in accordance with

space="preserve" listing-type="equation">M.sub.13 =f(M.sub.13)+I((M.sub.12 Λ

.sub.12 /Λ

.sub.13)-f(M.sub.13)),

where the function I(a) yields an integer nearest to a value of the argument (a);

determining the optical fringe order m₁ in accordance with

space="preserve" listing-type="equation">m.sub.1 =f(m.sub.1)+I((M.sub.13 Λ

.sub.13 /λ

.sub.1)-f(m.sub.1)); and

determining the absolute distance L in accordance with

space="preserve" listing-type="equation">L=(M.sub.ij Λ

.sub.ij)/2.