High precision micromachining of very fine features

• US 5,154,022 A
• Filed: 06/21/1991
• Issued: 10/13/1992
• Est. Priority Date: 06/21/1991
• Status: Expired due to Fees

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Euler, Harry D., Rohr, Robert L., Chalco, Pedro A.
• Primary Examiner(s): Smith, James G.
• Application Number:
  US07/718,733
• Time in Patent Office: 480 Days
• Field of Search: 125/16.01, 51/317, 51/281, 51/328
• US Class Current: 451/36
• CPC Class Codes: B23D 59/002 for the position of the saw blade mounting for swiveling or tilting a circular saw blade B27B5/36; portable power-driven circular saws with adjustment for cutting depth or amount of tilting B27B9/02
• CPC Class Codes: B23D 59/008 comprising computers
• CPC Class Codes: B24B 1/00 Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
• CPC Class Codes: B24B 19/028 for microgrooves or oil spots
• CPC Class Codes: B24B 27/0633 using a cutting wire
• CPC Class Codes: B28D 5/042 by cutting with blades or wires mounted in a reciprocating frame
• CPC Class Codes: Y10S 451/904 Flexible abrasive storage reel

Abstract

A method and apparatus is disclosed for machining very fine, smooth cuts and grooves on minute surfaces such as single point bonding tips. The invention accurately aligns the axis of a reciprocating cutting wire in the direction of reciprocating motion and permits precise positioning and repositioning of the cutting wire on a work surface. The apparatus allows an unobstructed view of the wire in proximity to the workpiece during the alignment, positioning, repositioning, and cutting operations.

Claims

1. A method of aligning a cutting wire with cross sectional dimensions smaller than 2 mils comprising the steps of:

a. holding the wire across a work area;

b. reciprocally moving the wire;

c. observing any apparent wire motion transverse to the direction of reciprocal motion;

d. aligning the wire axis to be parallel with the direction of reciprocal motion;

e. repeating steps c and d until there is no observable apparent wire motion transverse to the direction of reciprocal motion.

2. A method of aligning as in claim 1 wherein the wire motion is observed with respect to the workpiece which is positioned below the cutting wire.

3. A method of machining a groove on a minute workpiece with a reciprocally moving cutting wire comprising the steps of:

a. placing the workpiece and a reciprocating cutting wire in proximity so that the axis of the wire is parallel to the axis of the groove to be machined in the workpiece;

b. moving the workpiece and wire together until the workpiece experiences a first contact pressure with the cutting wire at a first contact position where the groove is to be machined on the workpiece;

c. observing the cutting wire to see if the wire slides to a position different from the first contact position;

d. if the wire slides, reducing wire pressure on the workpiece by moving the wire and workpiece apart;

e. returning the wire axis location to the first contact position;

f. moving the workpiece and wire together again until the workpiece experiences a subsequent first contact pressure with the cutting wire less than the previous first contact pressure;

g. repeating steps c through f until reaching an initiating light pressure contact between the wire and the workpiece at which the wire no longer slides on the workpiece;

h. maintaining the initiating light pressure contact between the wire and workpiece until the wire machines a groove seat in the workpiece surface.

4. A method as in claim 3 performed while maintaining the cutting wire in tension.

5. A method as in claim 3 wherein the pressure between the wire and workpiece is increased to a cutting light pressure after wire seating.

6. A method as in claim 5 maintaining cutting light pressure until the wire cuts to the desired depth in the workpiece.

7. A method as in claim 6 wherein the wire cuts through the entire workpiece.

8. A method of micromachining a groove in a minute workpiece using a cutting wire with cross sectional dimensions smaller than 2 mils comprising the steps of:

1. Aligning the cutting wire by;

a. holding the wire across a work area;

b. reciprocally moving the wire;

c. observing any apparent wire motion transverse to the direction of reciprocal motion;

d. aligning the wire axis to be parallel with the direction of reciprocal motion;

e. repeating steps c and d until there is no observable apparent wire motion transverse to the direction of reciprocal motion.

2. Initiating machining on the minute workpiece by;

a. placing the workpiece and cutting wire in proximity so that the axis of the wire is parallel to the axis of the groove to be machined in the workpiece;

b. maintaining the wire in tension;

c. moving the workpiece and wire together in the direction of the depth of the groove to be machined until the workpiece experiences a first contact pressure with the cutting wire at a first contact position;

d. observing the cutting wire to see if the wire slides to a position different from the first contact position;

e. if the wire slides, reducing wire pressure on the workpiece by moving the wire and workpiece apart;

f. returning the wire axis location to the first contact position;

g. moving the workpiece and wire together again until the workpiece experiences a subsequent first contact pressure with the cutting wire less than the previous first contact pressure;

h. repeating steps d through g until reaching an initiating light pressure contact between the wire and the workpiece at which the wire no longer slides on the workpiece;

i. maintaining the initiating light pressure contact between the wire and workpiece until the wire machines a groove seat in the workpiece surface.

9. A method for micromachining minute workpieces as in claim 8 wherein the pressure between the cutting wire and the workpiece is increased to a cutting light pressure after the wire machines a groove seat in the workpiece surface.

10. A method as in claim 8 wherein the cutting wire axis is aligned with the direction of reciprocal motion by angularly moving the wire around a circular work area.

11. A method as in claim 8 wherein the workpiece and wire are moved together and apart by moving a positioning stage to which the workpiece is attached.

12. A method as in claim 8 wherein the wire alignment and cut initiating are observed with a microscope.

13. A method as in claim 9 wherein the cutting light pressure is adjusted to affect the smoothness of groove walls in the surface of the workpiece.

14. A method for repositioning the cutting wire to a different location on the workpiece surface to machine a subsequent groove comprising the steps of:

a. separating the wire and workpiece at a first cutting position on the workpiece surface;

b. moving the cutting wire and workpiece relative to each other;

c. observing the relative wire and workpiece movement in the work area while accurately positioning the wire in close proximity to the workpiece with the wire axis parallel to the axis of a second groove to be machined in the surface of the workpiece;

d. moving the wire and the workpiece together in the direction of the depth of the second groove to be machined in the workpiece until there is first contact pressure between the wire and workpiece at a second contact position;

e. observing the cutting wire to see if the wire slides to a position different from the second contact position;

f. if the wire slides, reducing wire pressure on the workpiece by moving the wire and workpiece apart;

g. returning the wire axis location to the second contact position;

h. moving the workpiece and wire together again until the workpiece experiences a subsequent first contact pressure with the cutting wire less than the previous first contact pressure;

i. repeating steps e through h until reaching an initiating light pressure contact between the wire and the workpiece, i.e., a subsequent first contact pressure at which the wire no longer slides on the workpiece;

j. maintaining the initiating light pressure contact between the wire and workpiece until the wire machines a groove seat in the workpiece surface at the second contact position.

15. A method as in claim 14 wherein the pressure between the wire and workpiece is increased to a cutting light pressure after the wire seats in the groove.

16. A method as in claim 15 wherein the steps of the claim are repeated to machine a pattern on a minute workpiece.

17. A method as in claim 15 wherein the wire is maintained in spring tension.

18. A method of micromachining a groove in a workpiece comprising the steps of:

holding a cutting wire under tension with a working length of the wire across a work area in a wire holding assembly;

reciprocally moving the assembly and wire;

holding the workpiece on a stage;

aligning the stage so that the wire is in precise proximity to the workpiece;

aligning the wire axis parallel to the direction of reciprocal motion;

moving the stage to place the workpiece in a light pressure contact with the reciprocating wire;

maintaining light pressure contact until a groove seat of specified depth is cut into the workpiece surface.

19. A method as in claim 18 wherein, after the groove seat is cut, the stage is adjusted to increase the wire contact pressure to a cutting light pressure on the workpiece.

20. A method as in claim 18 where the light pressure contact is adjusted to effect groove wall smoothness.

21. A method as in claim 19 where the cutting light pressure contact is adjusted to effect the groove wall smoothness.