×

Capacitive pressure sensor

  • US 5,155,653 A
  • Filed: 08/14/1991
  • Issued: 10/13/1992
  • Est. Priority Date: 08/14/1991
  • Status: Expired due to Fees
First Claim
Patent Images

1. A sensor comprising a housing assembly defining a pressure chamber and a measurement chamber sealed from the pressure chamber, and a diaphragm assembly having a primary portion positioned in the pressure chamber and a supplemental free edge portion positioned in the measurement chamber.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×