High resolution imagery systems and methods
First Claim
1. The method of making a blazed grating phase lens comprising the steps of:
- layering a photoresist material on a light transmissive planar element;
forming the image of a plurality of first tracks on the photoresist material;
forming first tracks of a given differential height on the planar element;
removing the first layer of photoresist material; and
forming, using like sequences, successive tracks on the planar element of differential height that vary in binary fashion to the given differential height and selectively overlay in cumulative fashion to form incrementally varying progressions.
1 Assignment
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Accused Products
Abstract
The current limits of resolution of multi-element optical systems are exceeded by reducing the number of elements while introducing at the critical aperture a blazed transmission grating having grating rings of low bending power defined by multiple plateaus. By illuminating the optical train with monochromatic light that constitutes a multiplicity of distributed sources having a substantial temporal coherence but spatial incoherence and by varying the slopes and widths of the grating rings, local phase delays are introduced that adjust aberrations in the optical system, providing an aligned composite wavefront. The system and method may be used for presenting an image, as for a wafer stepper, or for viewing an image, as in a microscope.
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Citations
5 Claims
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1. The method of making a blazed grating phase lens comprising the steps of:
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layering a photoresist material on a light transmissive planar element; forming the image of a plurality of first tracks on the photoresist material; forming first tracks of a given differential height on the planar element; removing the first layer of photoresist material; and forming, using like sequences, successive tracks on the planar element of differential height that vary in binary fashion to the given differential height and selectively overlay in cumulative fashion to form incrementally varying progressions. - View Dependent Claims (2, 3, 4, 5)
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Specification