Sensor element for determination of concentration of substances
First Claim
1. An electro-optical sensor element for determining the concentration of substances contained in gaseous and liquid samples, comprisinga carrier layer,an indicator layer which has been produced by microelectronic and photolithographic techniques and which comprises at least one indicator substance having optical properties, wherein at least one of said optical properties of said indicator substance will change upon interaction with said substances contained in said gaseous and liquid samples, depending on the concentrations of said substances in said gaseous and liquid samples,a transparent coupling layer located between said carrier layer and said indicator layer,a thin film arrangement of a plurality of light-emitting sources located between said carrier layer and said transparent coupling layer, said light-emitting sources being in optical contact with said indicator layer and having electrical leads connected thereto, anda thin film arrangement of a plurality of photosensitive elements located between said carrier layer and said transparent coupling layer, said photosensitive elements being in optical contact with said indicator layer and having electrical leads connected thereto.
1 Assignment
0 Petitions
Accused Products
Abstract
Due to the size of the devices used for the excitation and measuring of light, conventional sensor elements for optically determining the concentrations of substances contained in gaseous and liquid samples, featuring an indicator layer with one or more indicator substances, are not well suited for use with microanalysis equipment, nor are they easy to mass-produce. These disadvantages are eliminated by integrating on the carrier layer (1) at least one photosensitive element (3) and its electric contact leads in planar arrangement, and by establishing optical contact between the indicator substance (7, 7'"'"') of the indicator layer (6) stimulated by the excitation radiation (11), and the photosensitive elements (3).
113 Citations
14 Claims
-
1. An electro-optical sensor element for determining the concentration of substances contained in gaseous and liquid samples, comprising
a carrier layer, an indicator layer which has been produced by microelectronic and photolithographic techniques and which comprises at least one indicator substance having optical properties, wherein at least one of said optical properties of said indicator substance will change upon interaction with said substances contained in said gaseous and liquid samples, depending on the concentrations of said substances in said gaseous and liquid samples, a transparent coupling layer located between said carrier layer and said indicator layer, a thin film arrangement of a plurality of light-emitting sources located between said carrier layer and said transparent coupling layer, said light-emitting sources being in optical contact with said indicator layer and having electrical leads connected thereto, and a thin film arrangement of a plurality of photosensitive elements located between said carrier layer and said transparent coupling layer, said photosensitive elements being in optical contact with said indicator layer and having electrical leads connected thereto.
Specification