Distributed resonant cavity light beam modulator

• US 5,157,537 A
• Filed: 02/01/1991
• Issued: 10/20/1992
• Est. Priority Date: 02/01/1991
• Status: Expired due to Term

• Current Assignee: Yeda Research and Development Co. Ltd. (Weizmann Institute of Science)
• Original Assignee: Yeda Research and Development Co. Ltd. (Weizmann Institute of Science)
• Inventors: Rosenblatt, David
• Primary Examiner(s): LaRoche, Eugene R.
• Assistant Examiner(s): Lester, Evelyn A.
• Application Number:
  US07/650,559
• Time in Patent Office: 627 Days
• Field of Search: 350/353, 350/355, 350/96.13, 350/385, 350/386, 350/389, 350/162.17, 350/162.19, 350/162.2, 359/245, 359/248, 359/251, 359/260, 359/263, 359/320, 359/321, 359/563, 359/568, 359/571, 359/578, 359/579, 359/584, 359/585, 359/586, 359/587, 359/589, 357/23.1, 385/2, 385/3, 385/10, 385/37, 372/96, 372/102, 372/18-20
• US Class Current: 359/245
• CPC Class Codes: G02F 1/015 based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction G02F1/03 takes precedence
• CPC Class Codes: G02F 1/0338 structurally associated with a photoconductive layer or having photo-refractive properties G02F1/05 takes precedence
• CPC Class Codes: G02F 2201/302 grating coupler
• CPC Class Codes: G02F 2202/101 Ga×As and alloy
• CPC Class Codes: G02F 2202/105 single crystal Si
• CPC Class Codes: G02F 2203/01 transmissive
• CPC Class Codes: G02F 2203/10 plasmon
• CPC Class Codes: G02F 2203/12 spatial light modulator
• CPC Class Codes: G02F 2203/22 diffractive
• CPC Class Codes: G02F 3/024 based on non-linear elements, e.g. non-linear Fabry-Perot cavity G02F3/028 takes precedence

Abstract

An optical apparatus consisting of a laser for producing a coherent polarized beam of electromagnetic radiation of a preselected wavelength. A substrate of silicon has a first transparent cover layer for receiving the polarized beam substantially normally incident thereto, an a second transparent guide layer for receiving the polarized beam from said first layer and for supporting at least one resonant mode. The first and second layers have a preselected index of refraction and a grating is interposed between them, having a grating period less than half the preselected wavelength. The layers and grating interact to produce a standing wave resonance by Bragg reflection. A control obtains a resonance wavelength in the guide layer equal to the predetermined radiation wavelength and thereby high reflectance to modulate the polarized beam.

Claims

1. An optical device comprising

a transparent layer means for receiving a normally incident coherent polarized beam of electromagnetic radiation having a preselected wavelength, and for supporting at least one resonant mode,

grating means imposed on said layer means for establishing exclusively optical interaction with the layer means and having a grating period less than said preselected wavelength to establish first order coupling with the normally incident beam and

the layer means and grating means interacting responsive to receiving the normally incident polarized beam to couple the layer means with the grating means exclusively providing the coupling of the beam into the layer means to produce a standing wave resonance by Bragg reflection in said layer means by second order coupling by the grating means.

2. The optical device of claim 1 further including termination means at each end of the grating means for producing reflection in the layer means.

3. The optical device of claim 1 further including a cover layer means over the grating means for covering the grating means.

4. The optical device of claim 1 wherein the layer means and grating means are composed of silicon.

5. The optical device of claim 1 further including a transparent conducting electrode on said grating means, a substrate supporting said layer means and a contact to said substrate.

6. The optical device of claim 5 wherein the grating means is an n+ contact region of silicon etched to form alternate bars and walls, the layer means is a lightly doped n type region of silicon, the substrate is a heavily doped p type region of silicon and said contact is a p+ region.

7. The optical device of claim 1 wherein said grating and layer means is a non-linear medium and is supported on a substrate.

8. The optical device of claim 1 wherein said layer means is composed of a photorefractive material.

9. The optical device of claim 1 wherein the layer means is an inversion layer supporting long range plasmons.

10. The optical device of claim 1 further including temperature compensating means coacting with the layer means and the grating means for compensating the variations in temperature.

11. An optical apparatus comprising means for producing a coherent polarized beam of electromagnetic radiation having a preselected wavelength,

a transparent layer means for receiving normally incident thereto the polarized beam and for supporting at least one resonant mode,

grating means imposed on said layer means for establishing exclusively optical interaction with the layer means and having a grating period less than said preselected wavelength, to establish first order coupling with the normally incident beam,

the layer means and grating means interacting responsive to receiving the normally incident polarized beam to couple the layer means with the grating means with the grating means exclusively providing the coupling of the beam into the layer means to produce a standing wave resonance by Bragg reflection in the layer means by second order coupling by the grating means, and

control means coacting with the layer means and the grating means for controlling the relative indices of refraction of the layer means and the grating means for obtaining a resonance wavelength in the layer means equal to the preselected radiation wavelength and thereby high reflectance to modulate the polarized beam.

12. The optical apparatus of claim 11 further including termination means at each end of the grating means for producing reflection in the layer means.

13. The optical apparatus of claim 11 wherein the layer means and grating means are composed of silicon.

14. The optical apparatus of claim 13 further including a substrate on which said layer means and grating means are supported.

15. The optical apparatus of claim 11 further including a transparent conducting electrode on said grating means, a substrate supporting said layer means and a contact to said substrate.

16. The optical apparatus of claim 11 wherein the layer means is an inversion layer supporting long range plasmons.

17. The optical apparatus of claim 11 further including temperature compensating means coasting with the layer means and the grating means for compensating the variations in temperature.

18. An optical apparatus according to claim 11 wherein said control means includes modulation means for modulating the layer means between two stable states, a first of which obtains a resonance condition in the layer means of equal wavelength to the preselected radiation wavelength and thereby high reflectance, and a second of which obtains a non-resonance condition in the second layer means relative to the predetermined radiation wavelength and thereby transparency for transmission of a modulated polarized beam.

19. An optical apparatus according to claim 11 further including a cover layer over the grating means and wherein said control means controls the interaction of the layer means and the grating means by modifying the index of refraction of one of said cover layer and said layer means for obtaining a resonance wavelength in said layer means equal to the preselected radiation wavelength and thereby high reflectance.

20. A spatial light modulator comprising an array of modulators onto which is directed a plurality of coherent polarized beams of electromagnetic radiation having a preselected wavelength, drive means connected to drive each modulator and photosensor means to sense light and responsive thereto to control said drive, each said modulator of said array comprising

a transparent layer means for receiving at least one normally incident coherent polarized beam and for supporting at least one resonant mode and

grating means associated with and imposed on said layer means of each said modulator for establishing exclusively optical interaction with the layer means and having a grating period less than said preselected wavelength, to establish first order coupling with the normally incident beam

the layer means and associated grating means interacting to produce a standing wave resonance by Bragg reflection in the layer means by second order coupling by the grating means, and

said drive means associated with each modulator controlling same to obtain in said layer means of each said modulator a resonance wavelength in the layer means equal to the preselected radiation wavelength and thereby high reflectance to modulate the at least one coherent polarized beam received thereby.