Boron nitride crucible

• US 5,158,750 A
• Filed: 08/27/1991
• Issued: 10/27/1992
• Est. Priority Date: 06/06/1990
• Status: Expired due to Term

• Current Assignee: General Electric Company
• Original Assignee: Praxair S.T. Technology, Inc. (Linde Plc)
• Inventors: Finicle, Robert L.
• Primary Examiner(s): Housel, James C.
• Assistant Examiner(s): Ludlow, Jan M.
• Application Number:
  US07/750,296
• Time in Patent Office: 427 Days
• Field of Search: 422/99, 422/102, 422/248, 432/262-265, 432/156
• US Class Current: 422/547
• CPC Class Codes: C23C 14/243 Crucibles for source material C23C14/28, C23C14/30 take precedence
• CPC Class Codes: C23C 16/01 on temporary substrates, e.g. substrates subsequently removed by etching
• CPC Class Codes: C23C 16/342 Boron nitride
• CPC Class Codes: C30B 23/066 Heating of the material to be evaporated
• CPC Class Codes: Y10S 117/90 Apparatus characterized by composition or treatment thereof, e.g. surface finish, surface coating
• CPC Class Codes: Y10T 117/1032 Seed pulling
• CPC Class Codes: Y10T 117/1092 Shape defined by a solid member other than seed or product [e.g., Bridgman-Stockbarger]

Abstract

A boron nitride crucible having a closed end, an open end, an internal surface and an external surface, and wherein at least a portion of the external surface, preferably proximate the open end of the crucible, has a duplex coating comprising an undercoat of pyrolytic graphite and a top coat of pyrolytic boron nitride. A process for making the boron nitride crucible is also disclosed.

Claims

1. A boron nitride crucible having a closed end, an open end, a length extending from the open end to the closed end;

an internal surface and an external surface;

wherein at least a portion of the external surface of the crucible has a duplex coating comprising an undercoat of pyrolytic graphite and a top coat of pyrolytic boron nitride completely superimposing the undercoat and wherein neither the undercoat nor the top coat is the structural member of the crucible.

2. The boron nitride crucible of claim 1 wherein the undercoat of pyrolytic graphite is from 0.001 to 0.1 inch thick.

3. The boron nitride crucible of claim 1 wherein the top coat of pyrolytic boron nitride is from 0.002 to 0.04 inch thick.

4. The boron nitride crucible of claim 1 wherein the undercoat of pyrolytic graphite is from 0.001 to 0.01 inch thick and the top coat of pyrolytic boron nitride is from 0.004 to 0.01 inch thick.

5. The boron nitride crucible of claim 1 wherein the duplex coating extends for said length of 10 to 80 percent of the length of the boron nitride crucible.

6. The boron nitride crucible of claim 1 wherein the crucible is a single walled boron nitride crucible.

7. The boron nitride crucible of claim 1 wherein the crucible is a multi-wall boron nitride crucible.

8. The boron nitride crucible of claim 1 wherein the duplex coating extends on the external surface from the open end of the crucible for a length of 10 to 80 percent of the length of the boron nitride crucible.

9. The boron nitride crucible of claim 8 wherein the undercoat of pyrolytic graphite is from 0.001 to 0.1 inch thick and the top coat of pyrolytic boron nitride is from 0.002 to 0.04 inch thick.