Microprobe provided circuit substrate and method for producing the same
First Claim
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1. A microprobe-provided circuit substrate comprising:
- a base made of an inorganic electrically-insulating material or a semiconductive material and having a plurality of fine through holes;
microprobes constituted by pillar-shaped conductors correspondingly respectively provided in said fine through holes, each of said microprobes having one end that projects beyond one surface of said base, said one end being brought into contact with a circuit to be tested; and
conductive portions provided on the other surface of said base electrically connected to the other end of corresponding microprobes.
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Abstract
A probe assembly for testing semiconductor wafer chips includes microprobes embedded in a circuit substrate. The microprobes are pillar-shaped conductors formed in through holes in a base of the substrate. One end of the microprobe is flush with the base surface contacts and is electrically connected through a reinforcing substrate to a probe assembly test head which generates various test signals. The other end of the pillar-shaped microprobes projects beyond the base to make contact with and deliver test signals to various electrodes of a chip to be tested.
21 Citations
18 Claims
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1. A microprobe-provided circuit substrate comprising:
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a base made of an inorganic electrically-insulating material or a semiconductive material and having a plurality of fine through holes; microprobes constituted by pillar-shaped conductors correspondingly respectively provided in said fine through holes, each of said microprobes having one end that projects beyond one surface of said base, said one end being brought into contact with a circuit to be tested; and conductive portions provided on the other surface of said base electrically connected to the other end of corresponding microprobes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A microprobe comprising:
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a flat base member made of an inorganic electrically-insulating material or semiconductive material having a plurality of transverse holes through the thickness of the base member; a plurality of cylindrically-shaped microprobe conductors provided in the transverse holes so that one end of each microprobe is flush to one surface of the base member and the other end of each microprobe projects beyond the opposite surface of the base member; and conductive members formed on the first surface of the base plate making electrical contact to the flush end of a corresponding microprobe, wherein the projecting ends of the microprobes are adapted for contacting various electrodes contained on an integrated circuit for test purposes. - View Dependent Claims (16, 17, 18)
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Specification