High vacuum pump using bulk getter material

• US 5,161,955 A
• Filed: 08/20/1991
• Issued: 11/10/1992
• Est. Priority Date: 08/20/1991
• Status: Expired due to Fees

• Current Assignee: Danielson Associates, Inc.
• Original Assignee: Danielson Associates, Inc.
• Inventors: Danielson, Philip, Carrea, Giovanni
• Primary Examiner(s): Smith, Leonard E.
• Application Number:
  US07/747,667
• Time in Patent Office: 448 Days
• Field of Search: 417/48, 417/51, 313/553
• US Class Current: 417/51
• CPC Class Codes: B01J 3/006 Processes utilising sub-atmospheric pressure; Apparatus therefor
• CPC Class Codes: F04B 37/02 for evacuating by absorption or adsorption
• CPC Class Codes: F04B 37/04 Selection of specific absorption or adsorption materials
• CPC Class Codes: H01J 7/18 Means for absorbing or adsorbing gas, e.g. by gettering

Abstract

A bulk getter-pump, consisting primarily of large beds of heated getter-material for use in pumping down in a high-vacuum environment. The pump is designed for applications now are served by turbo, cryo, diffusion, and ion pumps. The pump consists of a meshed cage filled with bulk getter-material pellets, which cage is housed in a housing coupled to a conduit of a vacuum chamber, so that the bulk getter-material is exposed to the interior of the vacuum chamber. In use, a roughing pump is first used to bring the chamber down to a pressure of about 10³ torr, and then the bulk getter-pump of the invention is operatively coupled to the chamber for sorbing gases, in order to reach a high vacuum.

Claims

1. A getter pump for pumping down a vessel or chamber to high vacuum, comprising:

a bulk getter-material pump comprising a pump-body housing, said pump-body housing comprising an interior;

a cage-element mounted in said interior of said pump-body housing;

a supply of bulk getter-material in said cage-element, said bulk getter-material comprising a plurality of separate getter-pellets;

means for fluidly coupling said bulk getter-material pump to a conduit of a vessel or container to be pumped down; and

heating means operatively associated with said bulk getter-material pump for heating said supply of bulk-getter material.

2. A getter-pump according to claim 1, in combination with a roughing pump for initially pumping down a vacuum chamber;

and valve means for alternately coupling said bulk getter-material pump and said roughing pump to a vacuum chamber to be pumped down;

said valve means being operatively connected between a vacuum chamber to be pumped down and said pumps.

3. A getter-pump according to claim 2, further comprising a vacuum chamber to be pumped down by said pumps, and conduit means comprising a first end and a second end for coupling said vacuum chamber to said pumps, said conduit means being coupled at said first end to said vacuum chamber and at said second end to said valve means.

4. A getter-pump according to claim 1, wherein said pump-body housing comprises an open entrance-mouth leading to said interior thereof;

said means for fluidly coupling comprising an annular mounting-flange about said pump-body housing at said entrance-mouth, said mounting-flange being capable of being coupled to a similar flange of a conduit leading to the interior of a vessel or container to be pumped down.

5. A getter-pump according to claim 4, further comprising an outer housing insulating material therein about said bulk getter-material pump for retaining the heat from said heating means.

6. A getter-pump according to claim 4, further comprising a vacuum vessel to be pumped down said bulk getter-material pump, and conduit means for coupling said interior of said, pump-body housing to the interior of said vacuum vessel, said conduit means comprising a mating flange for sealed connection to said annular mounting-flange, whereby the interior volume of said vacuum vessel is exposed to said bulk getter-material in said cage-element for pumping down said vacuum vessel to high vacuum.

7. A getter-pump according to claim 4, further comprising an outer housing comprising a first, lower, larger-diameter portion and a second, upper, smaller-diameter portion, said mounting flange being peripherally encircled by a portion of said second portion;

said second portion comprising clamping means for securing said mounting flange therein.

8. A getter-pump according to claim 7, wherein said second, upper, smaller-diameter portion comprises a split ring having ends, said clamping means securing said ends of said split ring together to hold fast said annular mounting-flange therein.

9. A getter-pump according to claim 1, wherein said cage-element is removably mounted in said interior for subsequent removal in order to place a new, fresh charge of bulk getter-material therein, said cage element comprising a central hollow cage-member, and an annular, hollow cage-member about said central cage-member;

said bulk getter-material being stored in said annular, hollow cage-member.

10. A getter-pump according to claim 9, wherein said heating means comprises an exterior, annular, coil-heating means circumferentially surrounding a portion of the circumference of said pump-body housing, and electrical power means connected to said coil-heating means for supplying electrical current thereto.

11. A getter-pump according to claim 9, wherein said central, hollow, cage-member serves as a heater-well receptacle;

said heating means comprising a heater positioned in said heater-well receptacle; and

power means exterior of said heater for powering said heater.

12. A getter-pump according to claim 11, an outer housing is closely and annularly spaced about said, pump-body housing, and comprises a series of openings therein for ventilation.