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Device for detecting the position of a surface

  • US 5,162,642 A
  • Filed: 02/21/1991
  • Issued: 11/10/1992
  • Est. Priority Date: 11/18/1985
  • Status: Expired due to Term
First Claim
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1. A device for detecting a position of a surface, said device comprising:

  • projecting means having a plurality of light-emitting means for producing light of different wavelengths and for directing the light toward the surface, being examined, along an inclined direction with respect to the surface being examined;

    light receiving means for receiving light reflected from the surface and for producing an analog electric signal corresponding to a position of reception of the light;

    light source means for projecting reference light onto a reference position on said light receiving means, separately of the light reflected from the surface being examined; and

    processing means for receiving the signal outputted from said light receiving means in response to reception of the light reflected from the surface and the signal outputted from said light receiving means in response to reception of the reference light, and for detecting positional deviation of the surface, being examined, from a predetermined reference plane on the basis of the outputs from said light receiving means.

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