Device for detecting the position of a surface

• US 5,162,642 A
• Filed: 02/21/1991
• Issued: 11/10/1992
• Est. Priority Date: 11/18/1985
• Status: Expired due to Term

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Kubo, Hiroyoshi, Akamatsu, Takahiro, Kawashima, Haruna
• Primary Examiner(s): Nelms, David C.
• Application Number:
  US07/657,950
• Time in Patent Office: 628 Days
• Field of Search: 250/201 AF, 250/204, 250/548, 250/557, 250/560, 250/561, 250/225, 250/201.6, 356/1, 356/4, 356/376, 356/381, 356/382, 356/369, 356/375, 356/376
• US Class Current: 250/201.6
• CPC Class Codes: G03F 9/7026 Focusing

Abstract

A surface position detecting device usable with a semiconductor device manufacturing exposure apparatus having a projection lens system for projecting an image of a pattern of a mask onto a semiconductor wafer. The device is arranged to detect the position of the wafer relative to an image plane of the projection lens system, into which plane the wafer is to be positioned. The device includes a sensor for sensing light reflected by the wafer thereby to detect the position of the wafer. Also, in order to avoid detection errors due to interference of light caused by a resist layer formed on the wafer, the wafer is irradiated with different wavelengths of lights from plural light sources. In one aspect, the device uses a reference light which is directed to the sensor without reflection by the wafer in order to avoid an effect of drift of the sensor.

Claims

1. A device for detecting a position of a surface, said device comprising:

projecting means having a plurality of light-emitting means for producing light of different wavelengths and for directing the light toward the surface, being examined, along an inclined direction with respect to the surface being examined;

light receiving means for receiving light reflected from the surface and for producing an analog electric signal corresponding to a position of reception of the light;

light source means for projecting reference light onto a reference position on said light receiving means, separately of the light reflected from the surface being examined; and

processing means for receiving the signal outputted from said light receiving means in response to reception of the light reflected from the surface and the signal outputted from said light receiving means in response to reception of the reference light, and for detecting positional deviation of the surface, being examined, from a predetermined reference plane on the basis of the outputs from said light receiving means.

2. A device according to claim 1, wherein said projecting means includes a first optical system adapted to define substantially the same optical path for the light emitted from said plural-emitting means.

3. A device according to claim 1, wherein the light directed to the surface, being examined, is S-polarized with respect to the surface being examined and wherein the light, when it is incident on the surface, defines an angle not greater than 10 degrees relative to the surface.

4. A device according to claim 1, wherein said projecting means is arranged to cause said plural light-emitting means to emit the light substantially at one time.

5. A device according to claim 1, further comprising a second optical system effective to bring the surface, being examined, and the surface of said light receiving means into a substantially optically conjugate relation.

6. A position detecting device, comprising:

first light source means for projecting light onto the surface, being examined, along an inclined direction with respect to the surface being examined;

light receiving means for receiving light reflected from the surface, being examined, and for producing an electric signal corresponding to a position of reception of light;

second light source means for projecting light onto a reference position on said light receiving means, wherein the light from said second light source means is incident on said light receiving means without being reflected by the surface being examined;

means for actuating said first and second light source means, independently of each other; and

processing means for detecting positional deviation of the surface being examined, with respect to a predetermined reference plane, on the basis of the output of said light receiving means produced in response to the reception of the light reflected from the surface being examined and the output of said light receiving means produced in response to the reception of light from said second light source means.

7. A method for detecting a position of a surface of a resist on a wafer, said method comprising:

projecting a light beam containing S-polarized light onto the wafer obliquely in a direction of an angle not greater than 10 degrees with respect to the surface so as to form a light image on the surface;

re-focusing the S-polarized light reflected by the surface to form a re-focused light image on a position detector, said position detector being located at a position substantially optically conjugate with the surface; and

determining the position of the surface in accordance with the position of the re-focused light image.

8. A device for providing positional information of a wafer, coated with a resist, with respect to a direction of an exposure axis of an exposure system, said device comprising:

a light source for supplying light for different wavelengths;

an illumination optical system for projecting the light from said light source to the wafer, wherein the projected light is reflected by the wafer;

a light receiving optical system for receiving the reflected light from the wafer, said light receiving optical system including (i) a stop having an optical opening and (ii) an objective lens system for directing the reflected light from the wafer to said stop; and

means for receiving light from said opening of said stop and producing an electric signal corresponding to the positional information of the wafer.

9. A device according to claim 8, wherein said light source supplies beams of light of different wavelengths sequentially.

10. A device according to claim 8, wherein said light source supplies beams of light of different wavelengths simultaneously.

11. A device according to claim 8, wherein said stop and said objective lens system are so disposed that the distance between said stop and a principal point of said objective lens system is substantially equal to a focal length of said objective lens system.