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Position detector for maintaining a fixed distance between two objects

  • US 5,162,661 A
  • Filed: 11/05/1990
  • Issued: 11/10/1992
  • Est. Priority Date: 02/08/1990
  • Status: Expired due to Term
First Claim
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1. A position detector comprising:

  • first and second light emitting means for irradiating a surface of an object to be measured;

    first and second light receiving means for receiving light reflected by said surface, said first and second light receiving means being positioned adjacent a corresponding one of said first and second light emitting means, in order to receive light from said corresponding light emitting means,wherein a distance from said first light receiving and emitting means to said surface as viewed in a direction substantially perpendicular to said surface is less than a distance from said second light receiving and emitting means to said surface;

    calculating means for calculating a correction quantity for correcting the distances between said surface and said light receiving means, said correction quantity being calculated on the basis of a difference between the output signals of said first and second light receiving means; and

    moving means for correcting the distances between said surface and said light receiving means in accordance with said correction quantity.

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