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Cantilevered air-gap type thin film piezoelectric resonator

  • US 5,162,691 A
  • Filed: 01/22/1991
  • Issued: 11/10/1992
  • Est. Priority Date: 01/22/1991
  • Status: Expired due to Fees
First Claim
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1. An air gap type piezoelectric resonator, comprising:

  • a substrate;

    a support layer of dielectric material in the form of a cantilever structure including a base portion formed on said substrate and an overhanging beam portion joined at one end to said base portion with the opposite end of said beam portion being unsupported;

    an air gap between said beam portion and said substrate;

    a first electrode formed on a top surface of said support layer, and covering at least a portion of said beam portion;

    a thin film of piezoelectric resonator material on said first electrode at said beam portion; and

    a second electrode on a top surface of said thin film of piezoelectric material,whereby upon being excited, a compressional wave will be generated across said electrodes having a fundamental frequency which is a function of the thickness of said thin film of piezoelectric material.

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